[Scan]
initial_time=2015-12-16T00:23:59
final_time=2015-12-16T00:24:19
ip_count=19
run=1017
dataset=5
scan=311
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08876E-4
ql1_vset=
ql1_vmon=-8.1768E-1
ql1_imon=2.68897E-9
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=6.34694E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=6.19686E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.32556E-10
mult1=-9.23928E-9
mult2=-2.88396E-9
rf_tmon=-4.71004E-3
rf_agc=3.2495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=6.34384E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65796E0
bslens_imon=2.72377E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19488E1
lens5a_imon=1.98227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12541E2
lens4a_imon=2.05302E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53845E1
cs_ef1b_imon=3.182E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02333E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05041E1
cs_ea1_imon=1.09246E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4345E0
lens1_imon=2.73085E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64392E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.37773E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=3.03892E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=2.2349E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=3.1074E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15193E1
os_ea1_imon=1.9536E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21788E0
cs_ionrep_imon=9.45572E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91847E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=1.95413E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=6.37149E-9
tplens_vset=1.4E-1
tplens_vmon=1.57005E0
tplens_imon=-1.85626E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25741E1
iondef3_imon=1.48427E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.59895E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98201E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=1.0053E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24266E0
ionrepsh_imon=8.59211E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33687E1
lens5b_imon=2.18366E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75432E1
cs_ef2b_imon=3.14055E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.92612E-1
os_ea2_imon=-3.80294E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.55371E0
os_ef2alow_imon=-2.69158E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.73087E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=2.95747E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.30671E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01515E1
cs_anode2_imon=2.0918E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73269E1
iondef1_imon=1.08892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68298E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.69812E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=1.28342E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-7.70669E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56033E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=1.89712E-1
window_imon=-8.57164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.8644E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=6.41183E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93751E3
defgrida_imon=6.9392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50088E3
multb_neg_imon=7.09848E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=6.07559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3337E1
os_fil1_imon=8.97785E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.83792E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65394E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31663E1
cs_fil1_imon=7.49722E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.55748E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66502E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12929E-2
os_fil2_imon=-2.97831E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.87813E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86602E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22306E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.77658E-1
chamber_ion_pmon=1.16823E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.10348E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09843E0	-8.17633E-1	-7.98059E-1	-9.13131E0	-9.14173E0	5.81741E-3	9.29356E-2	2.73195E1	-3.26747E1	-3.26747E1	2.6803E1	1.16923E-7	2.52384E-3	2.52384E-3	6.32896E-3	1.78417E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09781E0	-8.17943E-1	-7.98392E-1	-9.13148E0	-9.14178E0	5.79357E-3	9.33647E-2	2.73275E1	-3.26567E1	-3.26337E1	2.6795E1	1.1693E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.77691E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09858E0	-8.17871E-1	-7.98464E-1	-9.13107E0	-9.14178E0	5.65052E-3	9.3317E-2	2.7266E1	-3.26591E1	-3.26254E1	2.6801E1	1.16774E-7	2.51954E-3	2.51954E-3	6.34518E-3	1.78265E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09827E0	-8.17609E-1	-7.98273E-1	-9.13095E0	-9.14178E0	6.05583E-3	9.3317E-2	2.73273E1	-3.26452E1	-3.26104E1	2.67998E1	1.1693E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.77691E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0975E0	-8.17585E-1	-7.98035E-1	-9.13117E0	-9.14154E0	5.8651E-3	9.34601E-2	2.73135E1	-3.2623E1	-3.26549E1	2.68268E1	1.16829E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.7831E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09704E0	-8.17561E-1	-7.98488E-1	-9.13115E0	-9.14137E0	5.57899E-3	9.32455E-2	2.72921E1	-3.26632E1	-3.26272E1	2.68148E1	1.16576E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.77846E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09657E0	-8.17752E-1	-7.98607E-1	-9.13098E0	-9.14152E0	5.88894E-3	9.31978E-2	2.72974E1	-3.26555E1	-3.26189E1	2.68458E1	1.16848E-7	2.52384E-3	2.52384E-3	6.31817E-3	1.78113E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0965E0	-8.17585E-1	-7.98106E-1	-9.13107E0	-9.14166E0	5.81741E-3	9.31025E-2	2.73021E1	-3.26236E1	-3.26437E1	2.68028E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09704E0	-8.1749E-1	-7.98583E-1	-9.131E0	-9.14173E0	5.98431E-3	9.31501E-2	2.73352E1	-3.26642E1	-3.26295E1	2.68395E1	1.16873E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.77355E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.17466E-1	-7.98583E-1	-9.13122E0	-9.1419E0	5.93662E-3	9.31978E-2	2.73232E1	-3.26322E1	-3.26709E1	2.68244E1	1.16916E-7	2.52236E-3	2.52236E-3	6.33388E-3	1.77625E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.178E-1	-7.98321E-1	-9.13131E0	-9.14152E0	5.74589E-3	9.31263E-2	2.73556E1	-3.26242E1	-3.26458E1	2.67868E1	1.16946E-7	2.51725E-3	2.51725E-3	6.3245E-3	1.77763E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.17585E-1	-7.9813E-1	-9.13129E0	-9.14185E0	5.48363E-3	9.31025E-2	2.73045E1	-3.2672E1	-3.25953E1	2.67938E1	1.16829E-7	2.52538E-3	2.52538E-3	6.33486E-3	1.77537E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.178E-1	-7.98512E-1	-9.13134E0	-9.14178E0	5.74589E-3	9.31263E-2	2.72867E1	-3.26891E1	-3.26223E1	2.6831E1	1.16829E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.78155E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.17633E-1	-7.98488E-1	-9.13131E0	-9.1418E0	5.53131E-3	9.32932E-2	2.73216E1	-3.2675E1	-3.26183E1	2.68022E1	1.16677E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.7831E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.17323E-1	-7.98726E-1	-9.13112E0	-9.14207E0	5.74589E-3	9.30309E-2	2.73093E1	-3.27017E1	-3.26056E1	2.67583E1	1.16426E-7	2.52061E-3	2.52061E-3	6.28056E-3	1.77506E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.17466E-1	-7.98702E-1	-9.13126E0	-9.14202E0	5.55515E-3	9.30548E-2	2.73081E1	-3.26939E1	-3.26164E1	2.67842E1	1.16474E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.77691E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.17633E-1	-7.98273E-1	-9.13126E0	-9.14211E0	5.72205E-3	9.3174E-2	2.73075E1	-3.25906E1	-3.26366E1	2.67821E1	1.16474E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.78E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-8.17943E-1	-7.98488E-1	-9.13091E0	-9.14171E0	5.67436E-3	9.34601E-2	2.73405E1	-3.27051E1	-3.25959E1	2.6819E1	1.16923E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.77658E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.17895E-1	-7.98607E-1	-9.13146E0	-9.14176E0	5.43594E-3	9.32455E-2	2.72933E1	-3.26614E1	-3.26225E1	2.68412E1	1.16923E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.78569E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.1768E-1	-7.98774E-1	-9.13117E0	-9.14195E0	5.24521E-3	9.33886E-2	2.73269E1	-3.26614E1	-3.25741E1	2.68298E1	1.16823E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.77658E-1