[Scan]
initial_time=2015-12-16T00:25:19
final_time=2015-12-16T00:25:39
ip_count=19
run=1017
dataset=5
scan=314
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.17204E-1
ql1_imon=2.69277E-9
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=6.80172E-10
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=5.75542E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=4.68063E-10
mult1=-1.03699E-8
mult2=-2.68154E-9
rf_tmon=-3.74766E-3
rf_agc=3.51627E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=6.58727E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19634E1
lens5a_imon=1.9737E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5349E1
cs_ef1b_imon=3.17731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02402E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04886E1
cs_ea1_imon=1.08904E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43384E0
lens1_imon=2.77928E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64987E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.39078E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84076E1
cs_ef1a_imon=3.0382E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=2.23635E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11754E1
os_restr1_imon=3.111E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14945E1
os_ea1_imon=1.95748E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.0728E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20644E0
cs_ionrep_imon=9.66475E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9183E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=1.95917E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=6.28899E-9
tplens_vset=1.4E-1
tplens_vmon=1.59096E0
tplens_imon=-4.07495E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26608E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26816E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98101E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=1.09335E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26291E0
ionrepsh_imon=8.40301E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33922E1
lens5b_imon=2.15899E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.11461E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.24423E-1
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71065E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60416E0
os_ef2alow_imon=-2.33479E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.07325E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10529E1
os_restr2_imon=2.97693E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.30253E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01401E1
cs_anode2_imon=2.10189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73654E1
iondef1_imon=1.07607E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69082E1
iondef4_imon=1.11008E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.7442E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=1.2808E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-1.20314E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.11937E-1
window_imon=-9.54471E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86656E1
mask2_imon=-7.81481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=6.82044E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.84928E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50231E3
multb_neg_imon=7.20617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48277E0
defgridb_imon=5.95164E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=8.97172E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.83492E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65508E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31657E1
cs_fil1_imon=7.38309E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0032E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66533E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22848E-2
os_fil2_imon=-3.08643E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.90817E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91959E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40651E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22451E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.78417E-1
chamber_ion_pmon=1.16525E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.93219E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=144
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.1768E-1	-7.98512E-1	-9.13103E0	-9.1418E0	5.60284E-3	9.33647E-2	2.72641E1	-3.26271E1	-3.26067E1	2.68151E1	1.1693E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.77383E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.17847E-1	-7.98368E-1	-9.13115E0	-9.1418E0	5.72205E-3	9.32217E-2	2.73469E1	-3.26566E1	-3.26391E1	2.6792E1	1.16574E-7	2.52659E-3	2.52659E-3	6.3074E-3	1.7852E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.17299E-1	-7.98154E-1	-9.13117E0	-9.14221E0	5.38826E-3	9.31501E-2	2.72877E1	-3.2644E1	-3.26602E1	2.68325E1	1.16788E-7	2.52407E-3	2.52407E-3	6.31879E-3	1.77442E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.17752E-1	-7.98082E-1	-9.13103E0	-9.14168E0	5.26905E-3	9.34124E-2	2.73193E1	-3.26944E1	-3.26366E1	2.6831E1	1.16623E-7	2.52236E-3	2.52236E-3	6.3074E-3	1.78072E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.17513E-1	-7.98202E-1	-9.13115E0	-9.14171E0	5.65052E-3	9.31025E-2	2.73033E1	-3.26494E1	-3.26663E1	2.67966E1	1.16973E-7	2.52384E-3	2.52384E-3	6.35059E-3	1.78417E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.1749E-1	-7.98845E-1	-9.13117E0	-9.1419E0	5.4121E-3	9.30071E-2	2.73322E1	-3.26738E1	-3.26231E1	2.6822E1	1.16677E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.77846E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.17442E-1	-7.98297E-1	-9.13112E0	-9.14204E0	5.79357E-3	9.30309E-2	2.72775E1	-3.26278E1	-3.26362E1	2.68238E1	1.16624E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.77658E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.17585E-1	-7.97963E-1	-9.13062E0	-9.14183E0	5.93662E-3	9.29117E-2	2.72903E1	-3.26838E1	-3.26431E1	2.68058E1	1.16774E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.77355E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.17227E-1	-7.98225E-1	-9.13084E0	-9.14195E0	5.96046E-3	9.29117E-2	2.72962E1	-3.2636E1	-3.26095E1	2.68165E1	1.16373E-7	2.52538E-3	2.52538E-3	6.31288E-3	1.78775E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.17394E-1	-7.98273E-1	-9.1311E0	-9.14185E0	5.53131E-3	9.31501E-2	2.72947E1	-3.26585E1	-3.26428E1	2.68146E1	1.16376E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.77961E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.17227E-1	-7.98345E-1	-9.13107E0	-9.14185E0	5.62668E-3	9.31263E-2	2.73333E1	-3.26682E1	-3.25844E1	2.68226E1	1.16427E-7	2.52025E-3	2.52025E-3	6.2863E-3	1.78371E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.17513E-1	-7.98488E-1	-9.1311E0	-9.14154E0	5.57899E-3	9.29594E-2	2.72898E1	-3.26632E1	-3.26478E1	2.68208E1	1.16424E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.78465E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.17561E-1	-7.98249E-1	-9.13091E0	-9.14168E0	5.38826E-3	9.29356E-2	2.73225E1	-3.27011E1	-3.2608E1	2.67866E1	1.16222E-7	2.51443E-3	2.51443E-3	6.34037E-3	1.78E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17919E-1	-7.98678E-1	-9.13117E0	-9.14176E0	5.36442E-3	9.30548E-2	2.73075E1	-3.26785E1	-3.26172E1	2.68208E1	1.16424E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.7831E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.17919E-1	-7.98607E-1	-9.13126E0	-9.14173E0	5.8651E-3	9.31501E-2	2.72561E1	-3.26667E1	-3.26337E1	2.67908E1	1.16376E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.77053E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.178E-1	-7.98345E-1	-9.13115E0	-9.14147E0	5.45979E-3	9.30309E-2	2.73222E1	-3.26531E1	-3.26296E1	2.67775E1	1.16426E-7	2.52492E-3	2.52492E-3	6.32896E-3	1.77506E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.17466E-1	-7.98178E-1	-9.13136E0	-9.14185E0	5.84126E-3	9.29117E-2	2.73037E1	-3.26437E1	-3.26493E1	2.67863E1	1.16475E-7	2.51954E-3	2.51954E-3	6.33977E-3	1.77658E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.17657E-1	-7.98059E-1	-9.13124E0	-9.14166E0	5.93662E-3	9.29832E-2	2.7322E1	-3.26799E1	-3.26176E1	2.68575E1	1.16382E-7	2.5187E-3	2.5187E-3	6.32028E-3	1.77072E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.1718E-1	-7.98154E-1	-9.13119E0	-9.14164E0	5.53131E-3	9.28402E-2	2.73243E1	-3.26765E1	-3.26398E1	2.68124E1	1.16469E-7	2.5195E-3	2.5195E-3	6.31344E-3	1.78392E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.17204E-1	-7.98464E-1	-9.13112E0	-9.1419E0	5.60284E-3	9.30071E-2	2.73654E1	-3.26816E1	-3.26608E1	2.69082E1	1.16525E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.78417E-1