[Scan]
initial_time=2015-12-18T18:58:39
final_time=2015-12-18T18:58:42
ip_count=19
run=1020
dataset=0
scan=1
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.81265E-6
ql1_vset=
ql1_vmon=-8.79974E1
ql1_imon=-2.59231E-9
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.57253E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-7.36457E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.64735E-8
mult1=-9.81263E-9
mult2=-2.92022E-9
rf_tmon=-1.3653E-3
rf_agc=3.55242E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=7.97224E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6143E0
bslens_imon=2.52202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19022E1
lens5a_imon=1.94581E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.04569E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54715E1
cs_ef1b_imon=2.89786E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.02457E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04752E1
cs_ea1_imon=2.57051E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08079E0
lens1_imon=1.53099E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64738E1
os_ef1alow_imon=2.94846E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04516E1
cs_ea2_imon=1.5317E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84297E1
cs_ef1a_imon=2.93289E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.27779E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11026E1
os_restr1_imon=4.31465E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15654E1
os_ea1_imon=2.35992E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63992E1
os_ef1bup_imon=3.04188E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2344E0
cs_ionrep_imon=1.17422E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02042E1
cs_anode1_imon=2.94457E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20642E0
olens4_imon=3.95797E-8
tplens_vset=1.4E-1
tplens_vmon=1.57654E0
tplens_imon=-4.40497E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25222E1
iondef3_imon=1.46976E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26974E1
iondef2_imon=1.56178E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02992E2
lens6_imon=2.98027E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=1.064E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.19016E0
ionrepsh_imon=1.76176E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32944E1
lens5b_imon=2.18472E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7489E1
cs_ef2b_imon=3.1314E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.31994E0
os_ea2_imon=-8.40417E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71485E1
cs_ef2a_imon=3.16838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06753E0
os_ef2alow_imon=-2.58779E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56339E-1
os_ef2bup_imon=-5.33185E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10767E1
os_restr2_imon=3.41554E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.2692E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.24396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7224E1
iondef1_imon=1.08042E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68796E1
iondef4_imon=1.07238E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.34983E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.64466E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.05878E0
cs_ionaccel_imon=-1.86772E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02123E2
cs_ionfocb_imon=1.47382E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56438E1
einzel_imon=7.60999E-6
window_vset=0.0E0
window_vmon=6.15311E-2
window_imon=-1.05034E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39065E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-5.63801E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92502E3
multa_neg_imon=8.89296E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.45077E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.10556E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=5.79597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33216E1
os_fil1_imon=9.4109E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0454E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61803E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30768E1
cs_fil1_imon=9.9782E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62047E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62758E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.5345E-2
os_fil2_imon=-2.65876E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8498E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.47832E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-3.5994E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3957E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22017E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.16621E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.02299E-1
res40_imon=-2.54887E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.3E2	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.79974E1	-3.09944E-4	-8.8001E1	1.19209E-4	5.05447E-3	9.36508E-2	2.72903E1	-3.27204E1	-3.26585E1	2.67325E1	2.37538E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.14781E-2
2.0E0	2.69E2	0.0E0	3.16E2	1.6E2	-7.29374E-2	-8.79974E1	-2.86102E-4	-8.80013E1	7.15256E-5	5.17368E-3	9.36985E-2	2.73797E1	-3.26974E1	-3.25546E1	2.68893E1	2.37538E-9	2.51632E-3	2.51632E-3	6.28056E-3	2.16621E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.79973E1	-4.29153E-4	-8.8001E1	4.76837E-5	5.126E-3	9.36031E-2	2.72402E1	-3.2626E1	-3.26812E1	2.6766E1	2.37538E-9	2.52977E-3	2.52977E-3	6.24849E-3	2.20066E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.79974E1	-2.38419E-4	-8.80012E1	-2.38419E-5	5.03063E-3	9.35793E-2	2.73473E1	-3.27201E1	-3.26552E1	2.67141E1	2.38096E-9	2.51203E-3	2.51203E-3	6.33706E-3	2.15975E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.79972E1	-3.33786E-4	-8.80011E1	7.15256E-5	5.24521E-3	9.36747E-2	2.72756E1	-3.26673E1	-3.27115E1	2.68623E1	2.37538E-9	2.52835E-3	2.52835E-3	6.27928E-3	2.17768E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.79974E1	-3.8147E-4	-8.8001E1	5.00679E-4	5.24521E-3	9.37223E-2	2.72483E1	-3.27017E1	-3.25882E1	2.68212E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.79974E1	-1.19209E-4	-8.80009E1	3.57628E-4	5.43594E-3	9.34839E-2	2.73952E1	-3.25864E1	-3.27918E1	2.67531E1	2.38045E-9	2.51632E-3	2.51632E-3	6.22721E-3	2.18477E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.79974E1	-2.86102E-4	-8.80011E1	3.09944E-4	5.126E-3	9.34362E-2	2.72532E1	-3.26779E1	-3.25417E1	2.68179E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.18011E-2
1.2E1	1.2E1	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.79974E1	-2.6226E-4	-8.80012E1	2.14577E-4	5.24521E-3	9.35316E-2	2.72402E1	-3.26422E1	-3.27039E1	2.69347E1	2.37538E-9	2.51203E-3	2.51203E-3	6.33706E-3	2.18011E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.79975E1	-3.8147E-4	-8.80013E1	1.90735E-4	5.19753E-3	9.36031E-2	2.73844E1	-3.27017E1	-3.25034E1	2.68341E1	2.37538E-9	2.52384E-3	2.52384E-3	6.33706E-3	2.15975E-2
1.4E1	1.0E1	0.0E0	5.66E2	3.82E2	-7.44059E-2	-8.79975E1	-2.14577E-4	-8.80012E1	2.6226E-4	5.57899E-3	9.35316E-2	2.72337E1	-3.26714E1	-3.27071E1	2.67466E1	2.37538E-9	2.53306E-3	2.53306E-3	6.27461E-3	2.16313E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.79973E1	-2.86102E-4	-8.80013E1	3.57628E-4	5.38826E-3	9.37462E-2	2.73797E1	-3.2626E1	-3.25871E1	2.68601E1	2.37538E-9	2.51793E-3	2.51793E-3	6.36687E-3	2.16991E-2
1.6E1	2.5E1	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.79971E1	-2.86102E-4	-8.80013E1	1.43051E-4	5.60284E-3	9.38654E-2	2.74176E1	-3.27342E1	-3.2559E1	2.6829E1	2.37538E-9	2.52977E-3	2.52977E-3	6.33706E-3	2.18011E-2
1.7E1	8.5E1	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.79974E1	-2.86102E-4	-8.80014E1	3.57628E-4	5.48363E-3	9.39369E-2	2.72662E1	-3.26909E1	-3.26974E1	2.6766E1	2.37538E-9	2.53401E-3	2.53401E-3	6.32858E-3	2.13672E-2
1.8E1	2.83E2	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.79973E1	-2.38419E-4	-8.80014E1	4.29153E-4	5.34058E-3	9.37462E-2	2.74057E1	-3.26941E1	-3.25709E1	2.67433E1	2.37538E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.18477E-2
1.9E1	1.68E2	1.0E0	7.68E2	5.29E2	-7.3401E-2	-8.79974E1	-4.52995E-4	-8.80012E1	3.33786E-4	5.29289E-3	9.37939E-2	2.7198E1	-3.26909E1	-3.27039E1	2.68666E1	2.38158E-9	2.51334E-3	2.51334E-3	6.37351E-3	2.16313E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.79975E1	-4.05312E-4	-8.80012E1	5.72205E-4	5.29289E-3	9.34601E-2	2.74172E1	-3.27381E1	-3.26201E1	2.68379E1	2.37538E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.1941E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.79973E1	-4.05312E-4	-8.80014E1	5.00679E-4	5.31673E-3	9.34601E-2	2.71461E1	-3.26682E1	-3.25968E1	2.67217E1	2.38045E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.16621E-2
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.79975E1	-4.52995E-4	-8.80014E1	3.09944E-4	5.14984E-3	9.35316E-2	2.73729E1	-3.26349E1	-3.27292E1	2.6764E1	2.37538E-9	2.51203E-3	2.51203E-3	6.36687E-3	2.15975E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.79974E1	-4.52995E-4	-8.80014E1	3.8147E-4	5.24521E-3	9.36747E-2	2.7224E1	-3.26974E1	-3.25222E1	2.68796E1	2.37538E-9	2.51096E-3	2.51096E-3	6.3074E-3	2.16621E-2