[Scan]
initial_time=2015-12-18T18:58:50
final_time=2015-12-18T18:58:53
ip_count=19
run=1020
dataset=0
scan=2
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.82708E-6
ql1_vset=
ql1_vmon=-8.79976E1
ql1_imon=-2.03218E-9
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.57138E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-5.99242E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.6416E-8
mult1=-7.79704E-9
mult2=-2.5214E-9
rf_tmon=-8.37333E-3
rf_agc=2.68939E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=7.06029E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66061E0
bslens_imon=2.27603E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20771E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.05197E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53126E1
cs_ef1b_imon=2.83364E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02374E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04372E1
cs_ea1_imon=2.57335E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02033E0
lens1_imon=1.10803E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64673E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03982E1
cs_ea2_imon=1.54745E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83454E1
cs_ef1a_imon=2.90176E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.27438E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11675E1
os_restr1_imon=4.31855E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15008E1
os_ea1_imon=2.33585E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07691E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21641E0
cs_ionrep_imon=1.21067E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93089E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01945E1
cs_anode1_imon=2.9796E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20604E0
olens4_imon=3.93718E-8
tplens_vset=1.4E-1
tplens_vmon=1.62846E0
tplens_imon=1.3469E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25773E1
iondef3_imon=1.4871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25903E1
iondef2_imon=1.57665E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0303E2
lens6_imon=2.98521E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=9.71556E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23912E0
ionrepsh_imon=1.783E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34073E1
lens5b_imon=2.19374E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74696E1
cs_ef2b_imon=3.11778E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46299E0
os_ea2_imon=-3.13045E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.062E2
lens4b_imon=2.00876E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04158E0
os_ef2alow_imon=-3.01594E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46608E-1
os_ef2bup_imon=-5.54592E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10864E1
os_restr2_imon=3.38245E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2301E2
cs_ionfoca_imon=6.29344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01848E1
cs_anode2_imon=2.20309E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73473E1
iondef1_imon=1.12113E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67693E1
iondef4_imon=1.05681E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.30348E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.60334E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12041E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02041E2
cs_ionfocb_imon=1.4744E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56535E1
einzel_imon=7.29861E-6
window_vset=0.0E0
window_vmon=9.72104E-2
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.38812E-4
mask2_vset=0.0E0
mask2_vmon=-1.85825E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=8.68059E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=7.04539E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5008E3
multb_neg_imon=8.15499E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.08517E0
defgridb_imon=6.38352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33279E1
os_fil1_imon=9.43296E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05675E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61367E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=1.00012E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61334E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62436E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.98312E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81737E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.94973E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38042E-1
cs_fil2_imon=-2.62632E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.44295E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22037E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.14964E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52977E-3
foreline_cvt_pmon=2.52977E-3
chamber_tmon=1.40009E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.70414E-1
res40_imon=-2.35425E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.32E2	0.0E0	1.47E2	4.1E1	-7.50241E-2	-8.79975E1	4.76837E-5	-8.80012E1	9.53674E-5	4.98295E-3	9.36031E-2	2.73505E1	-3.26325E1	-3.27233E1	2.67822E1	2.37538E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.15189E-2
2.0E0	2.96E2	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.79977E1	-1.90735E-4	-8.80012E1	3.8147E-4	5.19753E-3	9.36508E-2	2.73628E1	-3.26981E1	-3.26044E1	2.68406E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.16991E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.47923E-2	-8.79979E1	-2.38419E-5	-8.8001E1	1.66893E-4	5.10216E-3	9.37462E-2	2.72901E1	-3.27109E1	-3.26185E1	2.67812E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.15975E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.43285E-2	-8.79976E1	9.53674E-5	-8.80012E1	3.57628E-4	4.95911E-3	9.38416E-2	2.73619E1	-3.26017E1	-3.26098E1	2.67433E1	2.37538E-9	2.52977E-3	2.52977E-3	6.3074E-3	2.18011E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.39421E-2	-8.79975E1	2.86102E-4	-8.80011E1	3.09944E-4	5.34058E-3	9.36031E-2	2.72694E1	-3.27006E1	-3.25644E1	2.68828E1	2.37538E-9	2.53306E-3	2.53306E-3	6.27461E-3	2.17444E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.45602E-2	-8.79976E1	4.52995E-4	-8.8001E1	3.09944E-4	5.43594E-3	9.3627E-2	2.73198E1	-3.2682E1	-3.27499E1	2.68114E1	2.37538E-9	2.52977E-3	2.52977E-3	6.3074E-3	2.12957E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.41738E-2	-8.79976E1	3.09944E-4	-8.8001E1	5.48363E-4	5.19753E-3	9.38654E-2	2.72078E1	-3.27109E1	-3.26085E1	2.67595E1	2.37538E-9	2.52169E-3	2.52169E-3	6.36144E-3	2.13867E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.79977E1	1.19209E-4	-8.8001E1	4.52995E-4	5.126E-3	9.38177E-2	2.73995E1	-3.26496E1	-3.26526E1	2.68471E1	2.37538E-9	2.51838E-3	2.51838E-3	6.37607E-3	2.16053E-2
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.79978E1	2.38419E-5	-8.8001E1	4.76837E-4	5.24521E-3	9.36508E-2	2.73087E1	-3.27342E1	-3.25936E1	2.68309E1	2.37538E-9	2.51096E-3	2.51096E-3	6.28056E-3	2.17547E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.40967E-2	-8.79977E1	2.38419E-5	-8.80013E1	4.29153E-4	5.14984E-3	9.39131E-2	2.74543E1	-3.27136E1	-3.25319E1	2.67693E1	2.38158E-9	2.5199E-3	2.5199E-3	6.37351E-3	2.16313E-2
1.4E1	7.0E0	0.0E0	5.66E2	3.82E2	-7.42513E-2	-8.79978E1	-2.14577E-4	-8.80013E1	7.39098E-4	5.05447E-3	9.40084E-2	2.72321E1	-3.2726E1	-3.26882E1	2.68277E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.14964E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.79979E1	-2.38419E-5	-8.80014E1	6.91414E-4	5.31673E-3	9.38177E-2	2.73346E1	-3.26437E1	-3.26024E1	2.68109E1	2.37538E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.18477E-2
1.6E1	4.2E1	0.0E0	6.47E2	4.41E2	-7.43285E-2	-8.79978E1	-2.38419E-4	-8.80012E1	9.77516E-4	5.03063E-3	9.36985E-2	2.73556E1	-3.28027E1	-3.26657E1	2.67498E1	2.37538E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.18011E-2
1.7E1	6.5E1	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.79978E1	0.0E0	-8.80013E1	7.62939E-4	5.19753E-3	9.36747E-2	2.72629E1	-3.24833E1	-3.27039E1	2.69152E1	2.37538E-9	2.5199E-3	2.5199E-3	6.27461E-3	2.15189E-2
1.8E1	2.79E2	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.79979E1	1.66893E-4	-8.8001E1	5.96046E-4	5.14984E-3	9.36747E-2	2.73311E1	-3.26812E1	-3.27363E1	2.68212E1	2.38096E-9	2.52384E-3	2.52384E-3	6.24849E-3	2.14964E-2
1.9E1	1.64E2	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.79979E1	-1.43051E-4	-8.80011E1	4.05312E-4	5.19753E-3	9.38416E-2	2.737E1	-3.26732E1	-3.25995E1	2.67433E1	2.37538E-9	2.51203E-3	2.51203E-3	6.36687E-3	2.19036E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.79978E1	-2.14577E-4	-8.8001E1	5.24521E-4	5.10216E-3	9.37462E-2	2.73267E1	-3.27954E1	-3.27558E1	2.69152E1	2.37538E-9	2.50028E-3	2.50028E-3	6.33706E-3	2.12957E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.79979E1	-2.38419E-4	-8.80013E1	5.48363E-4	5.26905E-3	9.37939E-2	2.7426E1	-3.27705E1	-3.25375E1	2.66785E1	2.37538E-9	2.51203E-3	2.51203E-3	6.33706E-3	2.19036E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.7998E1	-4.29153E-4	-8.80011E1	4.05312E-4	5.38826E-3	9.3627E-2	2.71883E1	-3.25709E1	-3.27655E1	2.68212E1	2.37538E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.17547E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.79976E1	-1.66893E-4	-8.80011E1	5.72205E-4	5.43594E-3	9.34601E-2	2.73473E1	-3.25903E1	-3.25773E1	2.67693E1	2.37538E-9	2.52977E-3	2.52977E-3	6.3074E-3	2.14964E-2