[Scan]
initial_time=2015-12-18T18:58:59
final_time=2015-12-18T18:59:03
ip_count=19
run=1020
dataset=0
scan=3
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.86063E-6
ql1_vset=
ql1_vmon=-8.79975E1
ql1_imon=-1.77995E-9
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.48513E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-5.33849E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.63216E-8
mult1=-1.12431E-8
mult2=-2.84476E-9
rf_tmon=-4.09065E-3
rf_agc=3.40317E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=6.90043E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61987E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18691E1
lens5a_imon=1.94738E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53775E1
cs_ef1b_imon=2.83753E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05385E1
cs_ea1_imon=2.60709E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04736E0
lens1_imon=1.15345E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6516E1
os_ef1alow_imon=3.04188E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03943E1
cs_ea2_imon=1.56237E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84686E1
cs_ef1a_imon=2.93289E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.27787E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11707E1
os_restr1_imon=4.32049E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16021E1
os_ea1_imon=2.36051E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62987E1
os_ef1bup_imon=3.10221E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28094E0
cs_ionrep_imon=1.1168E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93334E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02658E1
cs_anode1_imon=2.9543E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20608E0
olens4_imon=3.95942E-8
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=2.87048E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26001E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26844E1
iondef2_imon=1.55156E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03051E2
lens6_imon=2.98951E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=9.74178E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31699E0
ionrepsh_imon=1.74623E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34156E1
lens5b_imon=2.19396E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7382E1
cs_ef2b_imon=3.10221E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41072E0
os_ea2_imon=-1.11767E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.0619E2
lens4b_imon=2.0032E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70804E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.13889E0
os_ef2alow_imon=-2.19856E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14723E-1
os_ef2bup_imon=-5.42916E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1054E1
os_restr2_imon=3.42721E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23114E2
cs_ionfoca_imon=6.33822E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.26731E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72207E1
iondef1_imon=1.04542E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68041E1
iondef4_imon=1.11909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.30862E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.64811E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.19177E0
cs_ionaccel_imon=-1.55633E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.46681E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.62946E-6
window_vset=0.0E0
window_vmon=1.10185E-1
window_imon=-9.33568E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82696E2
mask1_imon=2.39259E-4
mask2_vset=0.0E0
mask2_vmon=-1.85241E1
mask2_imon=-1.18657E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=7.40444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.0634E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=6.84207E-5
defgridb_vset=0.0E0
defgridb_vmon=-7.91029E-1
defgridb_imon=5.54428E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.36322E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.04897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62174E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30754E1
cs_fil1_imon=9.93928E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62696E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62884E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42194E-2
os_fil2_imon=-2.52902E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97954E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.24208E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38042E-1
cs_fil2_imon=-1.3289E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=-6.80183E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2178E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.42689E-3
inlet_lpb_pmon=2.15975E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.06094E-1
res40_imon=-2.64617E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.21E2	0.0E0	1.47E2	4.1E1	-7.43285E-2	-8.79976E1	-1.90735E-4	-8.80011E1	6.4373E-4	5.4121E-3	9.36031E-2	2.72986E1	-3.27331E1	-3.25579E1	2.67628E1	2.38158E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.16313E-2
2.0E0	2.63E2	0.0E0	3.16E2	1.6E2	-7.42513E-2	-8.79978E1	-2.6226E-4	-8.8001E1	8.10623E-4	5.24521E-3	9.36031E-2	2.73992E1	-3.26747E1	-3.2759E1	2.68309E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.15975E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.41738E-2	-8.79979E1	2.38419E-5	-8.80011E1	7.15256E-4	5.19753E-3	9.37462E-2	2.73083E1	-3.26487E1	-3.25644E1	2.68731E1	2.37538E-9	2.52977E-3	2.52977E-3	6.33706E-3	2.15975E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.42513E-2	-8.79976E1	-7.15256E-5	-8.80011E1	7.86781E-4	5.126E-3	9.37223E-2	2.73339E1	-3.2608E1	-3.26044E1	2.67531E1	2.37538E-9	2.5068E-3	2.5068E-3	6.34037E-3	2.16313E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.43285E-2	-8.79979E1	-4.76837E-5	-8.80013E1	8.34465E-4	5.29289E-3	9.3627E-2	2.72668E1	-3.25434E1	-3.27233E1	2.67785E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.13958E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.43285E-2	-8.79979E1	2.38419E-5	-8.80012E1	7.62939E-4	5.14984E-3	9.35793E-2	2.74142E1	-3.27145E1	-3.25316E1	2.67628E1	2.37538E-9	2.51632E-3	2.51632E-3	6.22721E-3	2.16621E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.79978E1	-4.76837E-5	-8.80011E1	5.96046E-4	5.10216E-3	9.36985E-2	2.72402E1	-3.26997E1	-3.26437E1	2.68114E1	2.37538E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.17547E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.79977E1	-2.38419E-5	-8.80014E1	5.72205E-4	4.95911E-3	9.36508E-2	2.737E1	-3.26837E1	-3.26945E1	2.67725E1	2.37538E-9	2.52384E-3	2.52384E-3	6.27788E-3	2.18011E-2
1.2E1	9.0E0	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.79978E1	4.76837E-5	-8.8001E1	4.05312E-4	5.22137E-3	9.37223E-2	2.72541E1	-3.26561E1	-3.25843E1	2.67989E1	2.37538E-9	2.51793E-3	2.51793E-3	6.36687E-3	2.16991E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.44059E-2	-8.79977E1	-1.66893E-4	-8.8001E1	6.91414E-4	5.03063E-3	9.3627E-2	2.73862E1	-3.26779E1	-3.26487E1	2.68406E1	2.37937E-9	2.50867E-3	2.50867E-3	6.32858E-3	2.14389E-2
1.4E1	9.0E0	0.0E0	5.66E2	3.82E2	-7.44831E-2	-8.79975E1	-2.38419E-5	-8.8001E1	3.57628E-4	5.07832E-3	9.38416E-2	2.72986E1	-3.2639E1	-3.25352E1	2.67433E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.18011E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.40967E-2	-8.79977E1	-1.43051E-4	-8.80009E1	4.52995E-4	5.26905E-3	9.38416E-2	2.7319E1	-3.2633E1	-3.27048E1	2.68522E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.16991E-2
1.6E1	2.2E1	0.0E0	6.47E2	4.41E2	-7.41738E-2	-8.79976E1	-2.14577E-4	-8.80009E1	2.6226E-4	5.14984E-3	9.38892E-2	2.74251E1	-3.26293E1	-3.25384E1	2.6766E1	2.37937E-9	2.51709E-3	2.51709E-3	6.2863E-3	2.16555E-2
1.7E1	6.4E1	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.79976E1	-7.15256E-5	-8.80008E1	2.14577E-4	5.29289E-3	9.3627E-2	2.72499E1	-3.27363E1	-3.27201E1	2.68925E1	2.37538E-9	2.51793E-3	2.51793E-3	6.36687E-3	2.16991E-2
1.8E1	2.95E2	0.0E0	7.27E2	5.0E2	-7.46377E-2	-8.79974E1	-2.38419E-4	-8.8001E1	3.8147E-4	5.29289E-3	9.36031E-2	2.73408E1	-3.27006E1	-3.26293E1	2.67758E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.13958E-2
1.9E1	1.81E2	0.0E0	7.68E2	5.29E2	-7.41738E-2	-8.79977E1	-2.6226E-4	-8.80009E1	5.96046E-4	5.17368E-3	9.36508E-2	2.72438E1	-3.27089E1	-3.25828E1	2.67401E1	2.38096E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.18011E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.79977E1	-2.38419E-4	-8.80007E1	5.96046E-4	5.10216E-3	9.37223E-2	2.72933E1	-3.27558E1	-3.26909E1	2.67952E1	2.37538E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17444E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.79974E1	-3.33786E-4	-8.80011E1	5.72205E-4	4.98295E-3	9.3627E-2	2.72019E1	-3.26467E1	-3.27263E1	2.6846E1	2.37538E-9	2.53246E-3	2.53246E-3	6.28056E-3	2.14781E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.79975E1	-2.86102E-4	-8.80011E1	4.29153E-4	5.24521E-3	9.35316E-2	2.73343E1	-3.26909E1	-3.27104E1	2.6805E1	2.37538E-9	2.53787E-3	2.53787E-3	6.3074E-3	2.15699E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.79975E1	-2.86102E-4	-8.8001E1	6.67572E-4	5.31673E-3	9.37223E-2	2.72207E1	-3.26844E1	-3.26001E1	2.68041E1	2.37538E-9	2.51203E-3	2.51203E-3	6.42689E-3	2.15975E-2