[Scan]
initial_time=2015-12-18T18:59:10
final_time=2015-12-18T18:59:13
ip_count=19
run=1020
dataset=0
scan=4
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.44831E-2
qbias_imon=-3.86784E-6
ql1_vset=
ql1_vmon=-8.79976E1
ql1_imon=-1.54831E-9
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.50903E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-4.85853E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=1.62443E-8
mult1=-7.47194E-9
mult2=-2.85554E-9
rf_tmon=-1.0612E-2
rf_agc=2.66019E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=6.60455E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61519E0
bslens_imon=2.68483E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19344E1
lens5a_imon=1.91148E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04983E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53483E1
cs_ef1b_imon=2.85894E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.0216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.06026E1
cs_ea1_imon=2.56751E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02682E0
lens1_imon=1.18589E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65062E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02814E1
cs_ea2_imon=1.55524E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.91149E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.27926E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10604E1
os_restr1_imon=4.27379E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16305E1
os_ea1_imon=2.39231E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64414E1
os_ef1bup_imon=3.12556E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26832E0
cs_ionrep_imon=1.20483E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01945E1
cs_anode1_imon=2.929E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2062E0
olens4_imon=3.9542E-8
tplens_vset=1.4E-1
tplens_vmon=1.64468E0
tplens_imon=-2.93578E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24735E1
iondef3_imon=1.56302E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26293E1
iondef2_imon=1.55524E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98424E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=9.93788E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=1.75964E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34301E1
lens5b_imon=2.13729E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74177E1
cs_ef2b_imon=3.15086E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40459E0
os_ea2_imon=-8.97047E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=1.99883E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71906E1
cs_ef2a_imon=3.20535E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06105E0
os_ef2alow_imon=-2.89917E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43364E-1
os_ef2bup_imon=-5.48754E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10507E1
os_restr2_imon=3.34742E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.29539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02204E1
cs_anode2_imon=2.2245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.05494E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67758E1
iondef4_imon=1.08406E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.28915E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.64777E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.06527E0
cs_ionaccel_imon=-2.06233E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55302E1
einzel_imon=7.357E-6
window_vset=0.0E0
window_vmon=4.20697E-2
window_imon=-8.94645E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.38598E-4
mask2_vset=0.0E0
mask2_vmon=-1.85922E1
mask2_imon=-7.58415E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=5.33231E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93676E3
defgrida_imon=6.24725E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50076E3
multb_neg_imon=7.37632E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.03645E0
defgridb_imon=5.79951E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.3723E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08432E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62323E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30754E1
cs_fil1_imon=9.93604E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63507E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64128E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.92668E-2
os_fil2_imon=-2.95068E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8498E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.26761E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38042E-1
cs_fil2_imon=-2.3344E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=-3.2339E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22351E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33706E-3
inlet_lpb_pmon=2.12957E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.51793E-3
foreline_cvt_pmon=2.51793E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.47709E-1
res40_imon=-2.23748E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.43E2	1.0E0	1.47E2	4.1E1	-7.58741E-2	-8.79977E1	-1.66893E-4	-8.80013E1	3.57628E-4	5.26905E-3	9.38177E-2	2.72467E1	-3.27298E1	-3.26682E1	2.6805E1	2.37538E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.19036E-2
2.0E0	2.7E2	0.0E0	3.16E2	1.6E2	-7.59516E-2	-8.79977E1	-2.14577E-4	-8.80012E1	4.29153E-4	5.17368E-3	9.36985E-2	2.73144E1	-3.27326E1	-3.24174E1	2.6792E1	2.37538E-9	2.52977E-3	2.52977E-3	6.33706E-3	2.18011E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.53334E-2	-8.79978E1	0.0E0	-8.80012E1	5.00679E-4	5.29289E-3	9.38654E-2	2.73375E1	-3.26422E1	-3.26877E1	2.67887E1	2.37538E-9	2.51709E-3	2.51709E-3	6.3074E-3	2.15831E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.55652E-2	-8.79977E1	-9.53674E-5	-8.80014E1	2.6226E-4	5.24521E-3	9.40323E-2	2.72889E1	-3.26552E1	-3.26325E1	2.67304E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.19036E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.54105E-2	-8.79975E1	-1.66893E-4	-8.80014E1	4.52995E-4	5.53131E-3	9.39846E-2	2.73473E1	-3.26163E1	-3.25157E1	2.6899E1	2.37538E-9	2.53571E-3	2.53571E-3	6.3074E-3	2.15975E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.48695E-2	-8.79973E1	-1.66893E-4	-8.80013E1	3.57628E-4	5.43594E-3	9.39369E-2	2.73375E1	-3.2688E1	-3.27853E1	2.68179E1	2.37538E-9	2.53571E-3	2.53571E-3	6.3074E-3	2.14964E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.51013E-2	-8.79973E1	-7.15256E-5	-8.80012E1	3.57628E-4	5.17368E-3	9.38416E-2	2.73228E1	-3.27204E1	-3.26585E1	2.68109E1	2.37538E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.15699E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.45602E-2	-8.79974E1	-2.14577E-4	-8.80013E1	3.33786E-4	4.81606E-3	9.40561E-2	2.73949E1	-3.26485E1	-3.26185E1	2.67943E1	2.37538E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.18477E-2
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.46377E-2	-8.79976E1	-9.53674E-5	-8.80013E1	1.66893E-4	5.03063E-3	9.41277E-2	2.7078E1	-3.2652E1	-3.25514E1	2.69152E1	2.37538E-9	2.52293E-3	2.52293E-3	6.3074E-3	2.13727E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.44059E-2	-8.79979E1	-1.90735E-4	-8.80012E1	4.52995E-4	5.14984E-3	9.41038E-2	2.74349E1	-3.27558E1	-3.25125E1	2.68147E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.16991E-2
1.4E1	1.3E1	0.0E0	5.66E2	3.82E2	-7.41738E-2	-8.79978E1	-1.90735E-4	-8.80013E1	3.09944E-4	4.72069E-3	9.40084E-2	2.72662E1	-3.27525E1	-3.28012E1	2.67725E1	2.37538E-9	2.52977E-3	2.52977E-3	6.3074E-3	2.15975E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.40967E-2	-8.79975E1	0.0E0	-8.80012E1	1.19209E-4	4.98295E-3	9.38654E-2	2.74295E1	-3.27152E1	-3.25314E1	2.68406E1	2.38096E-9	2.51203E-3	2.51203E-3	6.33706E-3	2.16991E-2
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.42513E-2	-8.79974E1	1.43051E-4	-8.80014E1	4.29153E-4	4.98295E-3	9.38416E-2	2.72402E1	-3.26033E1	-3.26909E1	2.68118E1	2.37538E-9	2.51498E-3	2.51498E-3	6.33211E-3	2.16313E-2
1.7E1	6.2E1	0.0E0	6.87E2	4.7E2	-7.43285E-2	-8.79974E1	-9.53674E-5	-8.80013E1	2.38419E-4	5.126E-3	9.38892E-2	2.72759E1	-3.26909E1	-3.25709E1	2.67822E1	2.37538E-9	2.50615E-3	2.50615E-3	6.3074E-3	2.18011E-2
1.8E1	2.8E2	0.0E0	7.27E2	5.0E2	-7.46377E-2	-8.79975E1	7.15256E-5	-8.8001E1	4.05312E-4	4.79221E-3	9.39608E-2	2.73736E1	-3.2763E1	-3.27414E1	2.67563E1	2.37538E-9	2.5068E-3	2.5068E-3	6.34037E-3	2.16313E-2
1.9E1	1.59E2	0.0E0	7.68E2	5.29E2	-7.47149E-2	-8.79976E1	-2.14577E-4	-8.80012E1	4.29153E-4	5.126E-3	9.37939E-2	2.72672E1	-3.26909E1	-3.25828E1	2.68514E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.13958E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.44059E-2	-8.79977E1	-1.66893E-4	-8.80011E1	5.72205E-4	5.29289E-3	9.3627E-2	2.73226E1	-3.27084E1	-3.27258E1	2.68476E1	2.37538E-9	2.52483E-3	2.52483E-3	6.3074E-3	2.18011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.44059E-2	-8.79976E1	-3.09944E-4	-8.80011E1	5.24521E-4	5.31673E-3	9.37939E-2	2.72402E1	-3.26779E1	-3.25417E1	2.67076E1	2.37538E-9	2.51838E-3	2.51838E-3	6.3074E-3	2.14499E-2
2.2E1	4.0E0	0.0E0	8.89E2	6.17E2	-7.45602E-2	-8.79974E1	-1.66893E-4	-8.80012E1	5.48363E-4	5.36442E-3	9.38654E-2	2.74251E1	-3.26163E1	-3.25806E1	2.68893E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.18011E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.44831E-2	-8.79976E1	-2.14577E-4	-8.80012E1	7.15256E-4	5.38826E-3	9.37462E-2	2.73213E1	-3.26293E1	-3.24735E1	2.67758E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.12957E-2