[Scan]
initial_time=2015-12-18T18:59:19
final_time=2015-12-18T18:59:23
ip_count=19
run=1020
dataset=0
scan=5
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.87238E-6
ql1_vset=
ql1_vmon=-8.79979E1
ql1_imon=-1.47452E-9
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.48342E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-4.59625E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.62232E-8
mult1=-1.17632E-8
mult2=-2.931E-9
rf_tmon=-1.97296E-4
rf_agc=3.90282E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=6.50334E-10
bslens_vset=-6.2E0
bslens_vmon=-6.50451E0
bslens_imon=3.27316E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19016E1
lens5a_imon=1.96685E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.04797E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.87062E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02013E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05997E1
cs_ea1_imon=2.59411E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01132E0
lens1_imon=1.39138E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6473E1
os_ef1alow_imon=2.96306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.49965E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=2.93873E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.28407E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11326E1
os_restr1_imon=4.28644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15552E1
os_ea1_imon=2.45784E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=1.18602E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91828E2
cs_nozzle_imon=1.93117E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01775E1
cs_anode1_imon=2.91927E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2062E0
olens4_imon=3.95186E-8
tplens_vset=1.4E-1
tplens_vmon=1.52607E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26325E1
iondef3_imon=1.53209E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.54074E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98194E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=1.04105E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29536E0
ionrepsh_imon=1.80463E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33183E1
lens5b_imon=2.16368E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74785E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3242E0
os_ea2_imon=-1.1393E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00839E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71582E1
cs_ef2a_imon=3.18443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.15997E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04181E-1
os_ef2bup_imon=-5.59458E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10191E1
os_restr2_imon=3.39608E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23157E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01572E1
cs_anode2_imon=2.19677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74089E1
iondef1_imon=1.04542E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68374E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.29366E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=7.64859E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17069E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47202E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55392E1
einzel_imon=7.29861E-6
window_vset=0.0E0
window_vmon=1.17483E-1
window_imon=-1.38605E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.38841E-4
mask2_vset=0.0E0
mask2_vmon=-1.86222E1
mask2_imon=-5.10282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=6.56088E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.40947E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50164E3
multb_neg_imon=6.79881E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=5.39288E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.4242E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.04734E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6195E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30808E1
cs_fil1_imon=9.97034E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62007E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63668E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.5128E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.70384E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.48957E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.39265E-1
cs_fil2_imon=-2.75607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.74038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22532E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.16991E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.54763E-3
foreline_cvt_pmon=2.54763E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.06904E-1
res40_imon=-2.84565E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.51E2	0.0E0	1.47E2	4.1E1	-7.55652E-2	-8.79976E1	-9.53674E-5	-8.80011E1	1.43051E-4	5.36442E-3	9.37462E-2	2.73198E1	-3.26408E1	-3.24992E1	2.67985E1	2.37538E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.15189E-2
2.0E0	2.84E2	0.0E0	3.16E2	1.6E2	-7.57198E-2	-8.79977E1	-1.43051E-4	-8.80011E1	1.90735E-4	5.14984E-3	9.37223E-2	2.73132E1	-3.26044E1	-3.27206E1	2.6741E1	2.37538E-9	2.52977E-3	2.52977E-3	6.3074E-3	2.20066E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.56423E-2	-8.79977E1	0.0E0	-8.8001E1	2.14577E-4	5.48363E-3	9.36747E-2	2.72954E1	-3.27104E1	-3.25254E1	2.68439E1	2.37538E-9	2.51384E-3	2.51384E-3	6.3074E-3	2.15275E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.59516E-2	-8.79979E1	-2.38419E-4	-8.80008E1	1.66893E-4	5.74589E-3	9.38177E-2	2.73675E1	-3.25961E1	-3.27258E1	2.68136E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.16991E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.54105E-2	-8.79977E1	-9.53674E-5	-8.80008E1	2.6226E-4	5.57899E-3	9.37939E-2	2.73231E1	-3.27269E1	-3.26368E1	2.67822E1	2.37538E-9	2.53662E-3	2.53662E-3	6.3074E-3	2.16834E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.53334E-2	-8.79978E1	-2.38419E-5	-8.80008E1	4.05312E-4	5.4121E-3	9.35555E-2	2.72986E1	-3.26033E1	-3.26552E1	2.68001E1	2.37538E-9	2.5068E-3	2.5068E-3	6.34037E-3	2.1858E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.57198E-2	-8.79979E1	1.43051E-4	-8.80007E1	3.57628E-4	5.67436E-3	9.32217E-2	2.73808E1	-3.26873E1	-3.25936E1	2.68828E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.14964E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.53334E-2	-8.79978E1	2.6226E-4	-8.80006E1	2.86102E-4	5.55515E-3	9.35078E-2	2.73278E1	-3.26357E1	-3.27525E1	2.67304E1	2.37538E-9	2.5068E-3	2.5068E-3	6.34037E-3	2.15189E-2
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.57198E-2	-8.79977E1	-4.76837E-5	-8.80004E1	3.57628E-4	5.26905E-3	9.36508E-2	2.73326E1	-3.26759E1	-3.25362E1	2.68325E1	2.37538E-9	2.52384E-3	2.52384E-3	6.24849E-3	2.18011E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.52559E-2	-8.79978E1	-1.43051E-4	-8.80006E1	4.05312E-4	5.36442E-3	9.34839E-2	2.73015E1	-3.26404E1	-3.2644E1	2.68666E1	2.37538E-9	2.52293E-3	2.52293E-3	6.3531E-3	2.16834E-2
1.4E1	9.0E0	0.0E0	5.66E2	3.82E2	-7.51788E-2	-8.79978E1	-2.6226E-4	-8.80006E1	5.24521E-4	5.48363E-3	9.3627E-2	2.73603E1	-3.25676E1	-3.25287E1	2.6779E1	2.37538E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.16313E-2
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.47923E-2	-8.79977E1	-3.09944E-4	-8.80007E1	4.05312E-4	5.45979E-3	9.33647E-2	2.71786E1	-3.26195E1	-3.2772E1	2.68309E1	2.37538E-9	2.54166E-3	2.54166E-3	6.3074E-3	2.14964E-2
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.54105E-2	-8.79977E1	-2.14577E-4	-8.80007E1	5.24521E-4	5.48363E-3	9.3317E-2	2.74172E1	-3.27174E1	-3.25139E1	2.68244E1	2.37538E-9	2.54166E-3	2.54166E-3	6.24849E-3	2.19036E-2
1.7E1	7.4E1	0.0E0	6.87E2	4.7E2	-7.52559E-2	-8.79978E1	-1.90735E-4	-8.80008E1	1.19209E-4	5.60284E-3	9.36985E-2	2.72842E1	-3.26585E1	-3.26886E1	2.68352E1	2.37538E-9	2.51096E-3	2.51096E-3	6.33436E-3	2.13867E-2
1.8E1	2.86E2	0.0E0	7.27E2	5.0E2	-7.55652E-2	-8.79977E1	-1.90735E-4	-8.80004E1	3.57628E-4	5.29289E-3	9.37939E-2	2.72791E1	-3.2613E1	-3.26422E1	2.67401E1	2.37538E-9	2.5199E-3	2.5199E-3	6.3445E-3	2.15048E-2
1.9E1	1.75E2	0.0E0	7.68E2	5.29E2	-7.46377E-2	-8.79976E1	-4.29153E-4	-8.80007E1	2.14577E-4	5.50747E-3	9.38654E-2	2.73326E1	-3.27733E1	-3.25337E1	2.68476E1					
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-7.49466E-2	-8.79979E1	-1.90735E-4	-8.80008E1	2.6226E-4	5.6982E-3	9.38654E-2	2.72824E1	-3.27201E1	-3.27136E1	2.69347E1	2.37538E-9	2.50479E-3	2.50479E-3	6.3531E-3	2.16053E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.48695E-2	-8.79978E1	4.76837E-5	-8.80008E1	5.24521E-4	5.45979E-3	9.38654E-2	2.73538E1	-3.27169E1	-3.25027E1	2.67174E1	2.37538E-9	2.51793E-3	2.51793E-3	6.27788E-3	2.20066E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.47923E-2	-8.79979E1	9.53674E-5	-8.8001E1	3.09944E-4	5.6982E-3	9.35078E-2	2.71786E1	-3.26001E1	-3.28401E1	2.67531E1	2.37538E-9	2.52977E-3	2.52977E-3	6.3074E-3	2.14964E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.79979E1	-1.43051E-4	-8.80007E1	2.6226E-4	5.55515E-3	9.37462E-2	2.74089E1	-3.26585E1	-3.26325E1	2.68374E1	2.37538E-9	2.54763E-3	2.54763E-3	6.3074E-3	2.16991E-2