[Scan]
initial_time=2015-12-18T18:59:30
final_time=2015-12-18T18:59:34
ip_count=19
run=1020
dataset=0
scan=6
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.48695E-2
qbias_imon=-3.82625E-6
ql1_vset=
ql1_vmon=-8.79981E1
ql1_imon=-1.36623E-9
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.52605E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-4.25042E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.61981E-8
mult1=-7.27688E-9
mult2=-2.25192E-9
rf_tmon=-9.11956E-3
rf_agc=3.04628E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=6.86336E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61357E0
bslens_imon=2.67835E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19944E1
lens5a_imon=1.97118E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12539E2
lens4a_imon=2.04403E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=2.85278E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05177E1
cs_ea1_imon=2.61358E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01222E0
lens1_imon=8.45227E-7
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.95819E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03663E1
cs_ea2_imon=1.50397E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84637E1
cs_ef1a_imon=2.95495E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.28774E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11367E1
os_restr1_imon=4.2913E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16327E1
os_ea1_imon=2.41404E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6396E1
os_ef1bup_imon=3.0555E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29536E0
cs_ionrep_imon=1.15682E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93079E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.96144E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20597E0
olens4_imon=3.94182E-8
tplens_vset=1.4E-1
tplens_vmon=1.5441E0
tplens_imon=-2.57889E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25125E1
iondef3_imon=1.49262E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26552E1
iondef2_imon=1.5348E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98492E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=1.00526E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34132E0
ionrepsh_imon=1.77002E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33435E1
lens5b_imon=2.15935E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74393E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29536E0
os_ea2_imon=-8.58114E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00688E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7169E1
cs_ef2a_imon=3.15119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01131E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00127E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10988E1
os_restr2_imon=3.39445E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.30739E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01383E1
cs_anode2_imon=2.26407E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74057E1
iondef1_imon=1.03353E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67368E1
iondef4_imon=1.07044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.39877E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.66505E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.19501E0
cs_ionaccel_imon=-2.12396E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02039E2
cs_ionfocb_imon=1.4734E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56702E1
einzel_imon=7.44457E-6
window_vset=0.0E0
window_vmon=9.99134E-2
window_imon=-1.39415E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82712E2
mask1_imon=2.38987E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9258E3
multa_neg_imon=7.17192E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.39325E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5021E3
multb_neg_imon=6.84747E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.17449E0
defgridb_imon=5.79302E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33275E1
os_fil1_imon=9.39014E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06275E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62646E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=9.90993E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62642E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64353E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22848E-2
os_fil2_imon=-2.72904E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.92886E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38391E-1
cs_fil2_imon=-2.75607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.4876E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22497E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3531E-3
inlet_lpb_pmon=2.17618E-2
chamber_ion_pmon=2.37967E-9
chamber_cvt_pmon=2.51838E-3
foreline_cvt_pmon=2.51838E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.4879E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=135
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.33E2	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.79982E1	-4.05312E-4	-8.80005E1	3.33786E-4	5.24521E-3	9.34839E-2	2.74835E1	-3.2841E1	-3.2476E1	2.67393E1	2.37538E-9	2.52483E-3	2.52483E-3	6.3074E-3	2.16313E-2
2.0E0	2.82E2	0.0E0	3.16E2	1.6E2	-7.37874E-2	-8.7998E1	-3.09944E-4	-8.80007E1	2.38419E-4	4.95911E-3	9.3174E-2	2.73311E1	-3.26747E1	-3.26779E1	2.67628E1	2.37538E-9	2.54464E-3	2.54464E-3	6.3445E-3	2.19293E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.79982E1	-3.8147E-4	-8.80006E1	3.8147E-4	5.17368E-3	9.33886E-2	2.73375E1	-3.26714E1	-3.2652E1	2.6899E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.14964E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.79981E1	-1.90735E-4	-8.80006E1	3.8147E-4	5.22137E-3	9.34362E-2	2.72697E1	-3.26319E1	-3.27174E1	2.68433E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.19036E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.79982E1	-1.66893E-4	-8.80007E1	2.14577E-4	4.93526E-3	9.3317E-2	2.72986E1	-3.27525E1	-3.25384E1	2.67393E1	2.37538E-9	2.53246E-3	2.53246E-3	6.33436E-3	2.17547E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.79982E1	-7.15256E-5	-8.80008E1	1.66893E-4	4.93526E-3	9.35078E-2	2.73051E1	-3.26649E1	-3.27655E1	2.68163E1	2.37538E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.19036E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.79981E1	-3.57628E-4	-8.80007E1	2.86102E-4	4.93526E-3	9.35078E-2	2.72694E1	-3.26293E1	-3.26001E1	2.67141E1	2.37538E-9	2.51203E-3	2.51203E-3	6.33706E-3	2.18011E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.7998E1	-1.43051E-4	-8.80007E1	3.09944E-4	4.88758E-3	9.34601E-2	2.73139E1	-3.26968E1	-3.27558E1	2.68244E1	2.37538E-9	2.53571E-3	2.53571E-3	6.33706E-3	2.14964E-2
1.2E1	1.0E1	0.0E0	4.85E2	3.23E2	-7.41738E-2	-8.7998E1	-9.53674E-5	-8.80008E1	2.86102E-4	4.673E-3	9.36985E-2	2.72499E1	-3.26747E1	-3.25936E1	2.68309E1	2.37538E-9	2.51096E-3	2.51096E-3	6.28056E-3	2.15699E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.79982E1	-2.38419E-4	-8.80007E1	3.09944E-4	4.95911E-3	9.36508E-2	2.73493E1	-3.26585E1	-3.27086E1	2.67563E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.13958E-2
1.4E1	1.1E1	0.0E0	5.66E2	3.82E2	-7.41738E-2	-8.79981E1	-1.43051E-4	-8.80008E1	3.57628E-4	4.93526E-3	9.35316E-2	2.73628E1	-3.26801E1	-3.25359E1	2.68439E1	2.37538E-9	2.50561E-3	2.50561E-3	6.38863E-3	2.16621E-2
1.5E1	1.2E1	0.0E0	6.06E2	4.11E2	-7.44831E-2	-8.79979E1	-3.57628E-4	-8.80008E1	4.52995E-4	4.91142E-3	9.34362E-2	2.73635E1	-3.26422E1	-3.26585E1	2.68666E1	2.37538E-9	2.53967E-3	2.53967E-3	6.34037E-3	2.16313E-2
1.6E1	3.7E1	0.0E0	6.47E2	4.41E2	-7.44831E-2	-8.79981E1	-9.53674E-5	-8.80007E1	5.96046E-4	4.79221E-3	9.35078E-2	2.73076E1	-3.26035E1	-3.2656E1	2.68175E1	2.37538E-9	2.51793E-3	2.51793E-3	6.27788E-3	2.15975E-2
1.7E1	7.0E1	0.0E0	6.87E2	4.7E2	-7.46377E-2	-8.79981E1	4.76837E-5	-8.80007E1	5.24521E-4	4.95911E-3	9.3627E-2	2.72597E1	-3.27233E1	-3.25773E1	2.68041E1	2.3711E-9	2.53205E-3	2.53205E-3	6.33021E-3	2.15275E-2
1.8E1	2.92E2	0.0E0	7.27E2	5.0E2	-7.44831E-2	-8.79983E1	1.90735E-4	-8.80008E1	2.86102E-4	5.00679E-3	9.3627E-2	2.72629E1	-3.26001E1	-3.27428E1	2.68352E1	2.38096E-9	2.50615E-3	2.50615E-3	6.33706E-3	2.14964E-2
1.9E1	1.72E2	0.0E0	7.68E2	5.29E2	-7.46377E-2	-8.79983E1	1.19209E-4	-8.8001E1	3.57628E-4	5.03063E-3	9.377E-2	2.71789E1	-3.26332E1	-3.27414E1	2.68406E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.18011E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.47923E-2	-8.79982E1	-1.43051E-4	-8.80008E1	3.57628E-4	5.24521E-3	9.38654E-2	2.73434E1	-3.27292E1	-3.26378E1	2.67136E1	2.37538E-9	2.5068E-3	2.5068E-3	6.34037E-3	2.16313E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.50241E-2	-8.79981E1	-2.86102E-4	-8.80008E1	3.8147E-4	5.29289E-3	9.377E-2	2.71915E1	-3.26617E1	-3.26487E1	2.6886E1	2.37538E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.16621E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.53334E-2	-8.79982E1	-9.53674E-5	-8.80009E1	-1.66893E-4	5.31673E-3	9.37939E-2	2.73051E1	-3.25961E1	-3.26909E1	2.67406E1	2.37538E-9	2.51203E-3	2.51203E-3	6.36687E-3	2.13958E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.48695E-2	-8.79981E1	-7.15256E-5	-8.80011E1	1.43051E-4	5.43594E-3	9.38416E-2	2.74057E1	-3.26552E1	-3.25125E1	2.67368E1	2.37967E-9	2.51838E-3	2.51838E-3	6.3531E-3	2.17618E-2