[Scan]
initial_time=2015-12-18T18:59:40
final_time=2015-12-18T18:59:44
ip_count=19
run=1020
dataset=0
scan=7
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40967E-2
qbias_imon=-3.86786E-6
ql1_vset=
ql1_vmon=-8.79979E1
ql1_imon=-1.35548E-9
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.4709E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-4.1242E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.61482E-8
mult1=-1.08529E-8
mult2=-2.43517E-9
rf_tmon=-1.04085E-3
rf_agc=3.59784E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=6.35076E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71721E0
bslens_imon=2.21331E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18403E1
lens5a_imon=1.96469E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12567E2
lens4a_imon=2.05836E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53418E1
cs_ef1b_imon=2.84921E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04655E2
lens23_imon=1.01494E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04555E1
cs_ea1_imon=2.53787E-5
lens1_vset=-2.7E0
lens1_vmon=-2.91038E0
lens1_imon=1.6293E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65387E1
os_ef1alow_imon=2.96987E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05349E1
cs_ea2_imon=1.57319E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84264E1
cs_ef1a_imon=2.93289E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.27613E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11221E1
os_restr1_imon=4.33606E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14543E1
os_ea1_imon=2.26967E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6357E1
os_ef1bup_imon=3.06523E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17639E0
cs_ionrep_imon=1.19683E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91958E2
cs_nozzle_imon=1.94112E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02172E1
cs_anode1_imon=2.95041E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20647E0
olens4_imon=3.95634E-8
tplens_vset=1.4E-1
tplens_vmon=1.62701E0
tplens_imon=-6.20187E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27785E1
iondef3_imon=1.46288E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25287E1
iondef2_imon=1.65538E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03083E2
lens6_imon=2.98043E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=9.44793E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.15476E0
ionrepsh_imon=1.69648E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.21775E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74696E1
cs_ef2b_imon=3.10999E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5441E0
os_ea2_imon=-1.31234E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.0606E2
lens4b_imon=1.99822E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71323E1
cs_ef2a_imon=3.20925E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-3.99293E0
os_ef2alow_imon=-2.87971E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95262E-1
os_ef2bup_imon=-5.56539E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10734E1
os_restr2_imon=3.39413E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.28198E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02334E1
cs_anode2_imon=2.23034E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.0995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6912E1
iondef4_imon=1.04708E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.29191E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.64457E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09122E0
cs_ionaccel_imon=-1.80933E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.46895E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56438E1
einzel_imon=7.74622E-6
window_vset=0.0E0
window_vmon=3.04799E-1
window_imon=-8.36261E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.38967E-4
mask2_vset=0.0E0
mask2_vmon=-1.8709E1
mask2_imon=-1.05034E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92755E3
multa_neg_imon=6.66903E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93686E3
defgrida_imon=5.80384E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.72889E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31434E0
defgridb_imon=6.82044E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.42745E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07102E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62528E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30754E1
cs_fil1_imon=9.97107E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62599E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65093E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-3.17773E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88224E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.11834E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38042E-1
cs_fil2_imon=-2.72363E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.82116E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22337E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.15975E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.51793E-3
foreline_cvt_pmon=2.51793E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.60684E-1
res40_imon=-2.39317E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.14E2	0.0E0	1.47E2	4.1E1	-7.48695E-2	-8.79986E1	3.8147E-4	-8.80013E1	7.15256E-5	4.91142E-3	9.3627E-2	2.71721E1	-3.26747E1	-3.27493E1	2.68374E1	2.37538E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.17444E-2
2.0E0	3.06E2	0.0E0	3.16E2	1.6E2	-7.41738E-2	-8.79985E1	2.14577E-4	-8.8001E1	-1.90735E-4	4.91142E-3	9.33886E-2	2.73375E1	-3.2608E1	-3.25107E1	2.68666E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.16991E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.43285E-2	-8.79985E1	2.6226E-4	-8.80011E1	-4.76837E-5	4.98295E-3	9.34839E-2	2.72402E1	-3.26791E1	-3.26673E1	2.67368E1	2.37538E-9	2.51334E-3	2.51334E-3	6.34037E-3	2.16313E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.79983E1	2.14577E-4	-8.80012E1	-1.19209E-4	5.07832E-3	9.36985E-2	2.73375E1	-3.27733E1	-3.2621E1	2.68453E1	2.38045E-9	2.52707E-3	2.52707E-3	6.36144E-3	2.13867E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.79986E1	2.86102E-4	-8.80011E1	-1.19209E-4	5.24521E-3	9.35316E-2	2.73484E1	-3.26585E1	-3.25503E1	2.68244E1	2.37538E-9	2.53205E-3	2.53205E-3	6.33021E-3	2.16834E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44059E-2	-8.79985E1	4.76837E-5	-8.80012E1	-1.90735E-4	5.126E-3	9.37462E-2	2.72694E1	-3.26098E1	-3.27396E1	2.67693E1	2.37538E-9	2.5199E-3	2.5199E-3	6.35692E-3	2.17161E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.47923E-2	-8.79983E1	1.19209E-4	-8.80012E1	-2.6226E-4	5.26905E-3	9.39369E-2	2.74057E1	-3.26909E1	-3.25546E1	2.67174E1	2.37538E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.15975E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44831E-2	-8.79982E1	-7.15256E-5	-8.80011E1	-4.76837E-5	5.10216E-3	9.36985E-2	2.72759E1	-3.26844E1	-3.27298E1	2.6886E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.20066E-2
1.2E1	1.0E1	0.0E0	4.85E2	3.23E2	-7.45602E-2	-8.79983E1	-7.15256E-5	-8.80012E1	-4.76837E-5	5.29289E-3	9.36985E-2	2.72933E1	-3.26231E1	-3.26408E1	2.68147E1	2.37538E-9	2.50615E-3	2.50615E-3	6.27788E-3	2.12957E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.79984E1	-4.76837E-5	-8.8001E1	2.38419E-5	5.43594E-3	9.36508E-2	2.72871E1	-3.26152E1	-3.27197E1	2.6779E1	2.37538E-9	2.52707E-3	2.52707E-3	6.36144E-3	2.16621E-2
1.4E1	1.3E1	0.0E0	5.66E2	3.82E2	-7.44059E-2	-8.79981E1	-9.53674E-5	-8.80013E1	-7.15256E-5	5.22137E-3	9.35793E-2	2.73019E1	-3.26585E1	-3.26065E1	2.69217E1	2.37538E-9	2.52647E-3	2.52647E-3	6.34037E-3	2.1858E-2
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.47923E-2	-8.7998E1	-9.53674E-5	-8.8001E1	-4.76837E-5	5.17368E-3	9.36985E-2	2.73408E1	-3.27104E1	-3.26422E1	2.6792E1	2.37538E-9	2.51793E-3	2.51793E-3	6.39681E-3	2.18011E-2
1.6E1	3.5E1	0.0E0	6.47E2	4.41E2	-7.46377E-2	-8.79982E1	-9.53674E-5	-8.80012E1	1.66893E-4	5.36442E-3	9.36985E-2	2.72314E1	-3.26496E1	-3.25611E1	2.66947E1	2.37538E-9	2.51793E-3	2.51793E-3	6.36687E-3	2.14964E-2
1.7E1	7.6E1	0.0E0	6.87E2	4.7E2	-7.41738E-2	-8.7998E1	-2.38419E-5	-8.8001E1	1.66893E-4	5.07832E-3	9.3317E-2	2.7388E1	-3.26512E1	-3.26621E1	2.68471E1	2.38045E-9	2.51096E-3	2.51096E-3	6.33436E-3	2.18477E-2
1.8E1	3.17E2	0.0E0	7.27E2	5.0E2	-7.43285E-2	-8.79983E1	-1.90735E-4	-8.80013E1	2.38419E-5	5.53131E-3	9.35078E-2	2.73278E1	-3.27266E1	-3.25936E1	2.6805E1	2.37538E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.15189E-2
1.9E1	1.57E2	0.0E0	7.68E2	5.29E2	-7.47923E-2	-8.7998E1	-1.43051E-4	-8.80013E1	9.53674E-5	5.38826E-3	9.35316E-2	2.73375E1	-3.28171E1	-3.26585E1	2.67798E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.18011E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.43285E-2	-8.79982E1	2.38419E-5	-8.80013E1	2.86102E-4	5.29289E-3	9.35793E-2	2.74074E1	-3.27807E1	-3.25387E1	2.68731E1	2.37538E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.16313E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.79981E1	-2.38419E-5	-8.80012E1	1.19209E-4	5.4121E-3	9.35316E-2	2.71883E1	-3.2639E1	-3.2759E1	2.6805E1	2.37967E-9	2.50479E-3	2.50479E-3	6.3074E-3	2.14499E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.7998E1	-4.76837E-5	-8.80012E1	2.38419E-5	5.48363E-3	9.36747E-2	2.73862E1	-3.26585E1	-3.25579E1	2.67947E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.16991E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40967E-2	-8.79979E1	-7.15256E-5	-8.80011E1	-9.53674E-5	5.03063E-3	9.38177E-2	2.73213E1	-3.25287E1	-3.27785E1	2.6912E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.15975E-2