[Scan]
initial_time=2015-12-18T18:59:50
final_time=2015-12-18T18:59:54
ip_count=19
run=1020
dataset=0
scan=8
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.46377E-2
qbias_imon=-3.81234E-6
ql1_vset=
ql1_vmon=-8.79982E1
ql1_imon=-1.21732E-9
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.47572E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-3.93689E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.61425E-8
mult1=-7.68145E-9
mult2=-3.03399E-9
rf_tmon=-7.45046E-3
rf_agc=2.87072E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=6.30665E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60545E0
bslens_imon=1.41301E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19124E1
lens5a_imon=2.00795E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12722E2
lens4a_imon=2.06398E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53296E1
cs_ef1b_imon=2.83413E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.01537E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04123E1
cs_ea1_imon=2.49678E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96806E0
lens1_imon=2.88383E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64811E1
os_ef1alow_imon=2.95819E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05312E1
cs_ea2_imon=1.491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84354E1
cs_ef1a_imon=2.91197E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.28568E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11894E1
os_restr1_imon=4.29617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.13028E1
os_ea1_imon=2.32158E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63514E1
os_ef1bup_imon=3.09929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.18721E0
cs_ionrep_imon=1.23576E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92152E2
cs_nozzle_imon=1.93853E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.95576E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2062E0
olens4_imon=3.94347E-8
tplens_vset=1.4E-1
tplens_vmon=1.44677E0
tplens_imon=-1.68004E-6
iondef3_vset=-3.249E1
iondef3_vmon=-3.2507E1
iondef3_imon=1.49316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27342E1
iondef2_imon=1.65754E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.97351E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=9.85026E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.11871E0
ionrepsh_imon=1.70513E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34913E1
lens5b_imon=2.26967E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74217E1
cs_ef2b_imon=3.12605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58375E0
os_ea2_imon=-1.20419E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.05977E2
lens4b_imon=1.99606E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71704E1
cs_ef2a_imon=3.14794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01807E0
os_ef2alow_imon=-2.55373E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71746E-1
os_ef2bup_imon=-5.6189E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10677E1
os_restr2_imon=3.43743E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.3447E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02139E1
cs_anode2_imon=2.22109E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72618E1
iondef1_imon=1.08436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67466E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.29054E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.61696E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08554E0
cs_ionaccel_imon=-1.89691E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02046E2
cs_ionfocb_imon=1.47007E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55959E1
einzel_imon=7.42025E-6
window_vset=0.0E0
window_vmon=1.17483E-1
window_imon=-7.5355E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82587E2
mask1_imon=2.39425E-4
mask2_vset=0.0E0
mask2_vmon=-1.85857E1
mask2_imon=-8.50857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92831E3
multa_neg_imon=6.45273E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93671E3
defgrida_imon=6.30132E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50076E3
multb_neg_imon=5.17658E-5
defgridb_vset=0.0E0
defgridb_vmon=-2.2888E0
defgridb_imon=6.88533E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.34554E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06032E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63075E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3073E1
cs_fil1_imon=9.95331E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.60993E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64359E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.58221E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.36583E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38391E-1
cs_fil2_imon=-2.22899E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62275E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22027E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.27788E-3
inlet_lpb_pmon=2.16991E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.69053E-1
res40_imon=-2.72402E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.36E2	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.79983E1	-4.52995E-4	-8.80009E1	6.91414E-4	5.05447E-3	9.39369E-2	2.72694E1	-3.27947E1	-3.26065E1	2.6792E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.20066E-2
2.0E0	2.86E2	0.0E0	3.16E2	1.6E2	-7.35556E-2	-8.79985E1	-5.00679E-4	-8.80009E1	5.72205E-4	4.62532E-3	9.37939E-2	2.736E1	-3.26535E1	-3.26609E1	2.6785E1	2.38158E-9	2.51334E-3	2.51334E-3	6.34037E-3	2.19723E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.79984E1	-4.76837E-4	-8.80008E1	6.19888E-4	4.91142E-3	9.38177E-2	2.73473E1	-3.26455E1	-3.25968E1	2.68731E1	2.37538E-9	2.50931E-3	2.50931E-3	6.3531E-3	2.16053E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.79984E1	-6.91414E-4	-8.80009E1	5.72205E-4	5.14984E-3	9.37462E-2	2.72889E1	-3.26848E1	-3.27213E1	2.68082E1	2.37538E-9	2.52384E-3	2.52384E-3	6.39681E-3	2.13958E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.79984E1	-5.24521E-4	-8.80008E1	8.82149E-4	5.03063E-3	9.39131E-2	2.72903E1	-3.26938E1	-3.25228E1	2.66785E1	2.37538E-9	2.52606E-3	2.52606E-3	6.32592E-3	2.17373E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.79981E1	-3.8147E-4	-8.80008E1	6.19888E-4	5.05447E-3	9.38416E-2	2.72006E1	-3.25647E1	-3.27017E1	2.69152E1	2.37538E-9	2.51096E-3	2.51096E-3	6.28056E-3	2.13867E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.44059E-2	-8.79982E1	-2.6226E-4	-8.80007E1	6.19888E-4	5.05447E-3	9.36508E-2	2.74414E1	-3.26552E1	-3.2639E1	2.68471E1	2.37538E-9	2.52509E-3	2.52509E-3	6.3543E-3	2.17205E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.47923E-2	-8.79982E1	-4.05312E-4	-8.80007E1	7.15256E-4	5.03063E-3	9.37939E-2	2.72255E1	-3.26909E1	-3.2511E1	2.67758E1					
1.2E1	7.0E0	0.0E0	4.85E2	3.23E2	-7.40967E-2	-8.7998E1	-2.6226E-4	-8.80008E1	5.72205E-4	5.07832E-3	9.37223E-2	2.71364E1	-3.26455E1	-3.27623E1	2.68244E1	2.38045E-9	2.52169E-3	2.52169E-3	6.28056E-3	2.13867E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.43285E-2	-8.79979E1	-3.09944E-4	-8.80007E1	6.4373E-4	5.03063E-3	9.38177E-2	2.73448E1	-3.25395E1	-3.26332E1	2.68277E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.15975E-2
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.47149E-2	-8.79981E1	-4.76837E-4	-8.80006E1	6.91414E-4	5.24521E-3	9.37939E-2	2.73862E1	-3.26195E1	-3.25514E1	2.68893E1	2.37538E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.16313E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.48695E-2	-8.79982E1	-5.48363E-4	-8.80009E1	5.24521E-4	5.03063E-3	9.36985E-2	2.72078E1	-3.26455E1	-3.27558E1	2.67947E1	2.37538E-9	2.52977E-3	2.52977E-3	6.3074E-3	2.19036E-2
1.6E1	3.7E1	0.0E0	6.47E2	4.41E2	-7.43285E-2	-8.79981E1	-4.05312E-4	-8.80008E1	4.05312E-4	5.14984E-3	9.36031E-2	2.73603E1	-3.27396E1	-3.25514E1	2.68341E1	2.37538E-9	2.50615E-3	2.50615E-3	6.24849E-3	2.12957E-2
1.7E1	5.6E1	0.0E0	6.87E2	4.7E2	-7.51788E-2	-8.79981E1	-4.52995E-4	-8.80011E1	3.8147E-4	5.05447E-3	9.36747E-2	2.73101E1	-3.26335E1	-3.26759E1	2.68298E1	2.38096E-9	2.54166E-3	2.54166E-3	6.36687E-3	2.18011E-2
1.8E1	3.0E2	0.0E0	7.27E2	5.0E2	-7.44059E-2	-8.7998E1	-2.86102E-4	-8.80011E1	3.57628E-4	5.36442E-3	9.38416E-2	2.72799E1	-3.26224E1	-3.25143E1	2.67401E1	2.37538E-9	2.51384E-3	2.51384E-3	6.3531E-3	2.15275E-2
1.9E1	1.7E2	0.0E0	7.68E2	5.29E2	-7.52559E-2	-8.79981E1	-2.38419E-4	-8.80009E1	4.29153E-4	5.17368E-3	9.35555E-2	2.74122E1	-3.25838E1	-3.26909E1	2.6899E1	2.37538E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.15189E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.54877E-2	-8.79982E1	-3.33786E-4	-8.80009E1	2.38419E-4	5.31673E-3	9.35555E-2	2.72255E1	-3.26349E1	-3.26555E1	2.68244E1	2.37538E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.15699E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.47149E-2	-8.79982E1	-1.43051E-4	-8.80009E1	6.91414E-4	5.4121E-3	9.35316E-2	2.73051E1	-3.26714E1	-3.25773E1	2.68277E1	2.37538E-9	2.53571E-3	2.53571E-3	6.21924E-3	2.16991E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.49466E-2	-8.7998E1	-2.14577E-4	-8.80009E1	5.24521E-4	5.24521E-3	9.35316E-2	2.74122E1	-3.26455E1	-3.26844E1	2.69509E1	2.38655E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.14964E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.46377E-2	-8.79982E1	-7.15256E-5	-8.80011E1	4.05312E-4	5.48363E-3	9.34362E-2	2.72618E1	-3.27342E1	-3.2507E1	2.67466E1	2.37538E-9	2.51203E-3	2.51203E-3	6.27788E-3	2.16991E-2