[Scan]
initial_time=2015-12-18T19:00:01
final_time=2015-12-18T19:00:05
ip_count=19
run=1020
dataset=0
scan=9
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.83257E-6
ql1_vset=
ql1_vmon=-8.79985E1
ql1_imon=-1.16483E-9
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.48292E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-3.7585E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.61109E-8
mult1=-9.73761E-9
mult2=-2.60929E-9
rf_tmon=-4.84935E-3
rf_agc=3.23371E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=6.46877E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61843E0
bslens_imon=2.04243E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20804E1
lens5a_imon=2.03606E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.05197E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53126E1
cs_ef1b_imon=2.84921E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04527E2
lens23_imon=1.01109E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04793E1
cs_ea1_imon=2.60449E-5
lens1_vset=-2.7E0
lens1_vmon=-3.15335E0
lens1_imon=1.9451E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64479E1
os_ef1alow_imon=2.97182E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03625E1
cs_ea2_imon=1.491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84783E1
cs_ef1a_imon=2.93095E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.28659E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11059E1
os_restr1_imon=4.28546E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14618E1
os_ea1_imon=2.39231E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63992E1
os_ef1bup_imon=3.10805E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.31699E0
cs_ionrep_imon=1.24182E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.92894E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0201E1
cs_anode1_imon=2.93484E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20587E0
olens4_imon=3.95564E-8
tplens_vset=1.4E-1
tplens_vmon=1.50517E0
tplens_imon=-7.41313E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27558E1
iondef3_imon=1.55524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2636E1
iondef2_imon=1.58638E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.9747E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=9.14609E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.19045E0
ionrepsh_imon=1.81025E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.35988E1
lens5b_imon=2.221E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74371E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4565E0
os_ea2_imon=-9.55447E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.05931E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71323E1
cs_ef2a_imon=3.14892E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02537E0
os_ef2alow_imon=-3.05486E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14723E-1
os_ef2bup_imon=-5.48754E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10767E1
os_restr2_imon=3.39802E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23104E2
cs_ionfoca_imon=6.33822E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01685E1
cs_anode2_imon=2.23423E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73026E1
iondef1_imon=1.08414E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67514E1
iondef4_imon=1.05487E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.30972E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.67104E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09771E0
cs_ionaccel_imon=-1.86772E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02152E2
cs_ionfocb_imon=1.47032E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55951E1
einzel_imon=7.4543E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-5.05417E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82696E2
mask1_imon=2.38889E-4
mask2_vset=0.0E0
mask2_vmon=-1.8602E1
mask2_imon=-6.41647E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.24005E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.85072E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=6.85072E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44247E0
defgridb_imon=5.99418E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33258E1
os_fil1_imon=9.39306E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05934E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63183E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30754E1
cs_fil1_imon=9.93831E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6389E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.27491E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.59032E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.52979E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33847E-1
cs_fil2_imon=-2.3344E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.52374E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21996E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.27461E-3
inlet_lpb_pmon=2.15189E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.53306E-3
foreline_cvt_pmon=2.53306E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.80145E-1
res40_imon=-2.19856E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=134
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.34E2	1.0E0	1.47E2	4.1E1	-7.40192E-2	-8.79982E1	-2.38419E-5	-8.80008E1	4.05312E-4	4.91142E-3	9.34362E-2	2.73497E1	-3.25895E1	-3.25206E1	2.69461E1	2.37538E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.17444E-2
2.0E0	2.59E2	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.79981E1	-3.09944E-4	-8.80005E1	3.8147E-4	5.03063E-3	9.34124E-2	2.74251E1	-3.26001E1	-3.25773E1	2.67563E1	2.37538E-9	2.52236E-3	2.52236E-3	6.3074E-3	2.19293E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.79982E1	0.0E0	-8.80004E1	4.05312E-4	5.14984E-3	9.35316E-2	2.72979E1	-3.27125E1	-3.27666E1	2.67044E1	2.38096E-9	2.50615E-3	2.50615E-3	6.3074E-3	2.14964E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.41738E-2	-8.79981E1	0.0E0	-8.80008E1	3.57628E-4	5.07832E-3	9.34601E-2	2.73667E1	-3.26293E1	-3.25546E1	2.69379E1	2.37538E-9	2.51334E-3	2.51334E-3	6.27461E-3	2.17444E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.79982E1	-4.76837E-5	-8.80004E1	6.19888E-4	5.07832E-3	9.3317E-2	2.737E1	-3.27292E1	-3.27145E1	2.68277E1	2.37538E-9	2.52977E-3	2.52977E-3	6.33706E-3	2.18011E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44831E-2	-8.79985E1	-1.43051E-4	-8.80006E1	4.76837E-4	5.29289E-3	9.35316E-2	2.72808E1	-3.2626E1	-3.25882E1	2.67271E1	2.37538E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.13867E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.79984E1	-2.38419E-4	-8.80006E1	5.00679E-4	5.36442E-3	9.36985E-2	2.73231E1	-3.26188E1	-3.27269E1	2.69055E1	2.37538E-9	2.52977E-3	2.52977E-3	6.33211E-3	2.16313E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.43285E-2	-8.79982E1	4.76837E-5	-8.80006E1	2.38419E-4	5.29289E-3	9.3627E-2	2.73473E1	-3.26844E1	-3.25514E1	2.68179E1	2.38096E-9	2.52384E-3	2.52384E-3	6.33706E-3	2.16991E-2
1.2E1	7.0E0	0.0E0	4.85E2	3.23E2	-7.44059E-2	-8.79984E1	2.38419E-5	-8.80007E1	5.72205E-4	5.17368E-3	9.34362E-2	2.72499E1	-3.26877E1	-3.25903E1	2.6792E1	2.37538E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.15189E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.79983E1	-4.76837E-5	-8.80007E1	2.86102E-4	5.00679E-3	9.36985E-2	2.73732E1	-3.26909E1	-3.24346E1	2.69055E1	2.37538E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.16991E-2
1.4E1	9.0E0	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.79982E1	-3.09944E-4	-8.80004E1	1.90735E-4	5.14984E-3	9.37939E-2	2.72824E1	-3.26487E1	-3.27039E1	2.66663E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.16991E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.42513E-2	-8.79982E1	-7.15256E-5	-8.80005E1	-2.38419E-5	4.91142E-3	9.37939E-2	2.72791E1	-3.2652E1	-3.2613E1	2.68569E1	2.37538E-9	2.52384E-3	2.52384E-3	6.36687E-3	2.15975E-2
1.6E1	3.2E1	0.0E0	6.47E2	4.41E2	-7.40192E-2	-8.79983E1	-1.43051E-4	-8.80005E1	4.29153E-4	4.72069E-3	9.36747E-2	2.73464E1	-3.26231E1	-3.26703E1	2.68271E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.18011E-2
1.7E1	6.4E1	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.79982E1	0.0E0	-8.80007E1	3.33786E-4	4.93526E-3	9.36985E-2	2.71465E1	-3.2644E1	-3.259E1	2.67952E1	2.37538E-9	2.51632E-3	2.51632E-3	6.28056E-3	2.16621E-2
1.8E1	2.75E2	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.79984E1	7.15256E-5	-8.80007E1	3.57628E-4	5.19753E-3	9.36985E-2	2.72402E1	-3.27136E1	-3.25254E1	2.67433E1	2.37538E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.17444E-2
1.9E1	1.87E2	0.0E0	7.68E2	5.29E2	-7.41738E-2	-8.79984E1	-2.38419E-4	-8.80006E1	2.86102E-4	4.8399E-3	9.34601E-2	2.72258E1	-3.27306E1	-3.27306E1	2.69258E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.15975E-2
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-7.40967E-2	-8.79981E1	-4.76837E-5	-8.80007E1	2.38419E-4	4.81606E-3	9.34839E-2	2.73287E1	-3.26703E1	-3.25198E1	2.67758E1	2.37538E-9	2.53571E-3	2.53571E-3	6.36687E-3	2.15975E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.79985E1	-2.14577E-4	-8.80011E1	2.86102E-4	4.86374E-3	9.35316E-2	2.73051E1	-3.27089E1	-3.26909E1	2.67498E1	2.37538E-9	2.52384E-3	2.52384E-3	6.33706E-3	2.18011E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.43285E-2	-8.79985E1	-3.09944E-4	-8.80008E1	2.86102E-4	4.76837E-3	9.38892E-2	2.72618E1	-3.26044E1	-3.26044E1	2.6925E1	2.37538E-9	2.52647E-3	2.52647E-3	6.34037E-3	2.1858E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.79985E1	-4.52995E-4	-8.80006E1	4.29153E-4	5.03063E-3	9.37939E-2	2.73026E1	-3.2636E1	-3.27558E1	2.67514E1	2.37538E-9	2.53306E-3	2.53306E-3	6.27461E-3	2.15189E-2