[Scan]
initial_time=2015-12-18T19:00:11
final_time=2015-12-18T19:00:14
ip_count=19
run=1020
dataset=0
scan=10
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.42513E-2
qbias_imon=-3.82299E-6
ql1_vset=
ql1_vmon=-8.79986E1
ql1_imon=-1.09791E-9
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.47574E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-3.68042E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.60687E-8
mult1=-1.09324E-8
mult2=-2.75853E-9
rf_tmon=-3.19662E-3
rf_agc=3.30332E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=6.46222E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.47286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20494E1
lens5a_imon=1.95171E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.55364E1
cs_ef1b_imon=2.88278E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.01948E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05637E1
cs_ea1_imon=2.55301E-5
lens1_vset=-2.7E0
lens1_vmon=-2.90317E0
lens1_imon=1.19671E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65338E1
os_ef1alow_imon=2.97036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03258E1
cs_ea2_imon=1.51046E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84516E1
cs_ef1a_imon=2.95576E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.2911E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11164E1
os_restr1_imon=4.27914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63838E1
os_ef1bup_imon=3.08956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=1.2163E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93096E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02464E1
cs_anode1_imon=2.91927E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20618E0
olens4_imon=3.93809E-8
tplens_vset=1.4E-1
tplens_vmon=1.59817E0
tplens_imon=4.82929E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26512E1
iondef3_imon=1.47585E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27017E1
iondef2_imon=1.54723E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03008E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=9.64487E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29175E0
ionrepsh_imon=1.73757E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33976E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.472E0
os_ea2_imon=-1.05278E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06172E2
lens4b_imon=2.00882E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71055E1
cs_ef2a_imon=3.1893E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09105E0
os_ef2alow_imon=-2.69969E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16345E-1
os_ef2bup_imon=-5.22968E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10596E1
os_restr2_imon=3.37661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.26467E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02464E1
cs_anode2_imon=2.22596E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67636E1
iondef4_imon=1.07773E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.30918E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.71463E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-2.1645E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02127E2
cs_ionfocb_imon=1.47202E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5677E1
einzel_imon=7.54188E-6
window_vset=0.0E0
window_vmon=8.01223E-3
window_imon=-7.5355E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82701E2
mask1_imon=2.38816E-4
mask2_vset=0.0E0
mask2_vmon=-1.8606E1
mask2_imon=-1.0698E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.75052E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.4311E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50034E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33362E1
os_fil1_imon=9.40028E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.10573E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6128E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30747E1
cs_fil1_imon=9.9456E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61399E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64507E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.03502E-2
os_fil2_imon=-2.8777E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.62275E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.93813E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34022E-1
cs_fil2_imon=-2.5128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=-3.95777E-5
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22314E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.27461E-3
inlet_lpb_pmon=2.1858E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.70414E-1
res40_imon=-2.45642E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.3E2	0.0E0	1.47E2	4.1E1	-7.33239E-2	-8.79986E1	3.09944E-4	-8.80007E1	1.66893E-4	5.29289E-3	9.36985E-2	2.72943E1	-3.26774E1	-3.2653E1	2.67244E1	2.37538E-9	2.51334E-3	2.51334E-3	6.37351E-3	2.16313E-2
2.0E0	2.59E2	0.0E0	3.16E2	1.6E2	-7.30918E-2	-8.79985E1	2.38419E-5	-8.80006E1	2.38419E-4	5.60284E-3	9.37223E-2	2.73646E1	-3.26017E1	-3.26476E1	2.6846E1	2.37538E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.15699E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.79986E1	-2.38419E-5	-8.80004E1	1.90735E-4	5.38826E-3	9.38892E-2	2.73159E1	-3.26512E1	-3.26152E1	2.68731E1	2.37538E-9	2.51838E-3	2.51838E-3	6.37607E-3	2.17618E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.79988E1	1.43051E-4	-8.80007E1	1.90735E-4	5.50747E-3	9.37223E-2	2.73375E1	-3.26812E1	-3.27266E1	2.68017E1	2.37538E-9	2.53306E-3	2.53306E-3	6.34037E-3	2.15189E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.79987E1	4.76837E-5	-8.80006E1	1.90735E-4	5.74589E-3	9.40323E-2	2.73667E1	-3.25773E1	-3.2652E1	2.68536E1	2.37538E-9	2.51793E-3	2.51793E-3	6.27788E-3	2.15975E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.79985E1	2.14577E-4	-8.80005E1	2.14577E-4	5.48363E-3	9.37939E-2	2.73019E1	-3.26357E1	-3.26682E1	2.68309E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.16991E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.7999E1	2.38419E-4	-8.80005E1	2.86102E-4	5.29289E-3	9.38177E-2	2.71989E1	-3.26997E1	-3.24549E1	2.67855E1	2.38096E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.14964E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.79988E1	-2.14577E-4	-8.80008E1	3.33786E-4	5.19753E-3	9.36747E-2	2.72921E1	-3.25773E1	-3.26617E1	2.67887E1	2.37538E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.17547E-2
1.2E1	1.0E1	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.79989E1	-3.33786E-4	-8.80009E1	3.33786E-4	5.36442E-3	9.37462E-2	2.73429E1	-3.27287E1	-3.258E1	2.6819E1	2.37538E-9	2.52707E-3	2.52707E-3	6.32087E-3	2.17083E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.79987E1	-3.09944E-4	-8.80008E1	3.8147E-4	5.24521E-3	9.38177E-2	2.74169E1	-3.27738E1	-3.26476E1	2.67595E1					
1.4E1	1.2E1	0.0E0	5.66E2	3.82E2	-7.41738E-2	-8.79988E1	-4.29153E-4	-8.80005E1	4.05312E-4	5.14984E-3	9.35793E-2	2.72954E1	-3.26357E1	-3.25806E1	2.67798E1	2.38158E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.15189E-2
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.79987E1	-2.38419E-4	-8.80004E1	2.86102E-4	5.36442E-3	9.36031E-2	2.73083E1	-3.26974E1	-3.27136E1	2.67822E1	2.37538E-9	2.53571E-3	2.53571E-3	6.24849E-3	2.16991E-2
1.6E1	3.4E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.79987E1	2.38419E-5	-8.80005E1	2.86102E-4	5.45979E-3	9.35793E-2	2.72791E1	-3.26228E1	-3.25319E1	2.67947E1	2.37538E-9	2.52384E-3	2.52384E-3	6.36687E-3	2.15975E-2
1.7E1	7.3E1	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.79987E1	-1.19209E-4	-8.80005E1	3.57628E-4	5.29289E-3	9.34124E-2	2.73021E1	-3.27204E1	-3.27263E1	2.68471E1	2.37538E-9	2.52384E-3	2.52384E-3	6.33706E-3	2.18011E-2
1.8E1	3.15E2	1.0E0	7.27E2	5.0E2	-7.36328E-2	-8.79988E1	-1.90735E-4	-8.80007E1	4.52995E-4	5.48363E-3	9.32932E-2	2.73181E1	-3.26682E1	-3.25611E1	2.68796E1	2.37538E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.17547E-2
1.9E1	1.77E2	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.79989E1	1.66893E-4	-8.80007E1	5.00679E-4	5.4121E-3	9.34362E-2	2.72662E1	-3.27104E1	-3.27915E1	2.67595E1	2.37538E-9	2.52088E-3	2.52088E-3	6.35195E-3	2.16482E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.79986E1	1.19209E-4	-8.80006E1	2.86102E-4	5.4121E-3	9.34839E-2	2.72791E1	-3.26195E1	-3.25092E1	2.67466E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.79987E1	4.76837E-5	-8.80007E1	3.57628E-4	5.57899E-3	9.33886E-2	2.72889E1	-3.25806E1	-3.27428E1	2.69444E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.13958E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.79988E1	1.19209E-4	-8.80008E1	5.96046E-4	5.48363E-3	9.37462E-2	2.737E1	-3.27017E1	-3.25683E1	2.67952E1	2.37538E-9	2.51793E-3	2.51793E-3	6.36687E-3	2.16991E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.42513E-2	-8.79986E1	0.0E0	-8.80007E1	2.38419E-4	5.57899E-3	9.37223E-2	2.73375E1	-3.27017E1	-3.26512E1	2.67636E1	2.37538E-9	2.51334E-3	2.51334E-3	6.27461E-3	2.1858E-2