[Scan]
initial_time=2015-12-18T19:00:21
final_time=2015-12-18T19:00:25
ip_count=19
run=1020
dataset=0
scan=11
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.81215E-6
ql1_vset=
ql1_vmon=-8.7999E1
ql1_imon=-1.17397E-9
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.49426E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-3.52641E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.61074E-8
mult1=-9.60575E-9
mult2=-2.27838E-9
rf_tmon=-4.08475E-3
rf_agc=3.49372E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=6.29628E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62168E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19928E1
lens5a_imon=1.9582E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.04789E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.55299E1
cs_ef1b_imon=2.85505E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04553E2
lens23_imon=1.02082E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05248E1
cs_ea1_imon=2.56167E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06251E0
lens1_imon=1.84776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.98349E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02944E1
cs_ea2_imon=1.51241E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84491E1
cs_ef1a_imon=2.95625E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.28711E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10961E1
os_restr1_imon=4.30687E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16046E1
os_ea1_imon=2.40009E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63668E1
os_ef1bup_imon=3.05745E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29103E0
cs_ionrep_imon=1.20483E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93245E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0188E1
cs_anode1_imon=2.96014E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=3.94741E-8
tplens_vset=1.4E-1
tplens_vmon=1.57654E0
tplens_imon=-7.6078E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25169E1
iondef3_imon=1.52214E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26732E1
iondef2_imon=1.58638E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98307E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=9.58061E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32023E0
ionrepsh_imon=1.77326E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33457E1
lens5b_imon=2.16065E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75085E1
cs_ef2b_imon=3.12751E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4565E0
os_ea2_imon=-1.03331E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00973E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70058E1
cs_ef2a_imon=3.19368E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10646E0
os_ef2alow_imon=-2.66563E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17966E-1
os_ef2bup_imon=-5.42916E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.41748E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23133E2
cs_ionfoca_imon=6.31096E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01945E1
cs_anode2_imon=2.2498E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.01601E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69542E1
iondef4_imon=1.07627E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.36149E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.66108E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.78987E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02197E2
cs_ionfocb_imon=1.47362E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56048E1
einzel_imon=7.86299E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8267E2
mask1_imon=2.38909E-4
mask2_vset=0.0E0
mask2_vmon=-1.86376E1
mask2_imon=-7.19492E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93816E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=6.90912E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36126E0
defgridb_imon=6.36405E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33279E1
os_fil1_imon=9.47577E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0668E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61339E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30789E1
cs_fil1_imon=1.00003E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64545E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63925E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.13562E-2
os_fil2_imon=-2.7885E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81737E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.89405E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.42936E-1
cs_fil2_imon=-2.36684E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.82116E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22407E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.14964E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.51793E-3
foreline_cvt_pmon=2.51793E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.40121E-1
res40_imon=-2.56833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.4E2	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.79989E1	-1.43051E-4	-8.80004E1	4.29153E-4	5.45979E-3	9.39369E-2	2.73584E1	-3.26585E1	-3.25912E1	2.68198E1	2.37538E-9	2.52075E-3	2.52075E-3	6.29455E-3	2.17789E-2
2.0E0	2.87E2	0.0E0	3.16E2	1.6E2	-7.29374E-2	-8.79987E1	-7.15256E-5	-8.80003E1	3.33786E-4	5.6982E-3	9.39369E-2	2.72255E1	-3.26172E1	-3.26349E1	2.68436E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.79987E1	-7.15256E-5	-8.80004E1	4.05312E-4	5.38826E-3	9.39369E-2	2.73213E1	-3.2613E1	-3.25222E1	2.67902E1	2.37538E-9	2.52977E-3	2.52977E-3	6.3074E-3	2.16313E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.79989E1	-2.6226E-4	-8.80003E1	2.6226E-4	5.34058E-3	9.39131E-2	2.73538E1	-3.26552E1	-3.27298E1	2.67677E1	2.37538E-9	2.51203E-3	2.51203E-3	6.33706E-3	2.19036E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.7999E1	4.76837E-5	-8.80005E1	4.52995E-4	5.43594E-3	9.37223E-2	2.7344E1	-3.26877E1	-3.25287E1	2.68285E1	2.37538E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.16991E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.79988E1	-7.15256E-5	-8.80003E1	2.86102E-4	5.43594E-3	9.377E-2	2.73116E1	-3.26974E1	-3.26293E1	2.67866E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.18011E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.79988E1	-4.76837E-5	-8.80002E1	3.57628E-4	5.26905E-3	9.39369E-2	2.73862E1	-3.26812E1	-3.24995E1	2.67433E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.13958E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.79988E1	4.76837E-5	-8.80004E1	2.86102E-4	5.29289E-3	9.40084E-2	2.72856E1	-3.27006E1	-3.26877E1	2.68082E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.20066E-2
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.79989E1	-1.66893E-4	-8.80003E1	2.38419E-4	5.22137E-3	9.39131E-2	2.72467E1	-3.26455E1	-3.2493E1	2.68666E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.14964E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.79987E1	-1.90735E-4	-8.80006E1	3.8147E-4	5.38826E-3	9.39131E-2	2.72727E1	-3.25719E1	-3.27558E1	2.67352E1	2.37538E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.18011E-2
1.4E1	8.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.79988E1	-3.09944E-4	-8.80006E1	3.33786E-4	5.36442E-3	9.36747E-2	2.73083E1	-3.26455E1	-3.24735E1	2.68082E1	2.37538E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.16313E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.79986E1	-3.09944E-4	-8.80007E1	3.57628E-4	5.19753E-3	9.37939E-2	2.73051E1	-3.2651E1	-3.26734E1	2.68381E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.14964E-2
1.6E1	3.2E1	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.79986E1	-4.52995E-4	-8.80005E1	2.14577E-4	5.10216E-3	9.36508E-2	2.73525E1	-3.2631E1	-3.25961E1	2.68257E1	2.37967E-9	2.51384E-3	2.51384E-3	6.33021E-3	2.16834E-2
1.7E1	6.3E1	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.79985E1	-3.09944E-4	-8.80007E1	2.6226E-4	4.91142E-3	9.37223E-2	2.73123E1	-3.27342E1	-3.25215E1	2.68504E1	2.37538E-9	2.52749E-3	2.52749E-3	6.33021E-3	2.17618E-2
1.8E1	2.89E2	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.79986E1	-3.57628E-4	-8.80006E1	1.19209E-4	5.36442E-3	9.36508E-2	2.72491E1	-3.27204E1	-3.26585E1	2.67725E1	2.37538E-9	2.51334E-3	2.51334E-3	6.27461E-3	2.15189E-2
1.9E1	1.68E2	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.79987E1	-5.48363E-4	-8.80006E1	7.15256E-5	5.07832E-3	9.36031E-2	2.72448E1	-3.27372E1	-3.27025E1	2.67642E1	2.37538E-9	2.52384E-3	2.52384E-3	6.33706E-3	2.15975E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.7999E1	-3.33786E-4	-8.80005E1	2.38419E-5	4.98295E-3	9.34601E-2	2.72759E1	-3.27169E1	-3.27655E1	2.68309E1	2.37937E-9	2.52977E-3	2.52977E-3	6.32858E-3	2.16555E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.79987E1	-5.24521E-4	-8.80004E1	2.14577E-4	5.22137E-3	9.32932E-2	2.73375E1	-3.25755E1	-3.25467E1	2.68601E1	2.37538E-9	2.53273E-3	2.53273E-3	6.33706E-3	2.15469E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.79988E1	-3.33786E-4	-8.80004E1	4.29153E-4	5.19753E-3	9.35555E-2	2.73148E1	-3.26228E1	-3.27104E1	2.67076E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.7999E1	-7.15256E-5	-8.80005E1	2.86102E-4	5.34058E-3	9.35316E-2	2.73051E1	-3.26732E1	-3.25169E1	2.69542E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.14964E-2