[Scan]
initial_time=2015-12-18T19:00:31
final_time=2015-12-18T19:00:34
ip_count=19
run=1020
dataset=0
scan=12
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.83497E-6
ql1_vset=
ql1_vmon=-8.79987E1
ql1_imon=-1.12984E-9
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.50409E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-3.36962E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.60712E-8
mult1=-8.96738E-9
mult2=-2.55373E-9
rf_tmon=-3.44175E-3
rf_agc=3.51997E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=6.25122E-10
bslens_vset=-6.2E0
bslens_vmon=-6.73523E0
bslens_imon=2.36471E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12438E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53215E1
cs_ef1b_imon=2.85359E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.01926E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05312E1
cs_ea1_imon=2.50975E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00771E0
lens1_imon=1.0453E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64892E1
os_ef1alow_imon=2.99468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.59049E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=2.929E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.28176E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11002E1
os_restr1_imon=4.284E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15912E1
os_ea1_imon=2.35835E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.06766E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17639E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91929E2
cs_nozzle_imon=1.93009E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02221E1
cs_anode1_imon=2.96549E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20618E0
olens4_imon=3.95352E-8
tplens_vset=1.4E-1
tplens_vmon=1.59817E0
tplens_imon=7.19642E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25611E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26163E1
iondef2_imon=1.57535E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03029E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=9.76002E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=1.78949E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.35058E1
lens5b_imon=2.20261E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74461E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.33501E0
os_ea2_imon=-2.52482E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.0032E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7146E1
cs_ef2a_imon=3.1966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06672E0
os_ef2alow_imon=-2.57806E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71746E-1
os_ef2bup_imon=-5.57025E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10921E1
os_restr2_imon=3.41797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.30793E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.25515E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72921E1
iondef1_imon=1.08652E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.0972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.3399E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.6795E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17069E0
cs_ionaccel_imon=-1.77527E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02033E2
cs_ionfocb_imon=1.46837E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56446E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.783E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82685E2
mask1_imon=2.38792E-4
mask2_vset=0.0E0
mask2_vmon=-1.85574E1
mask2_imon=-8.2653E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93682E3
defgrida_imon=6.45273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50216E3
multb_neg_imon=6.19317E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31434E0
defgridb_imon=6.2148E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.37068E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06518E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6222E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30773E1
cs_fil1_imon=9.91357E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63345E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64656E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.95763E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74439E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.26528E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.8777E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2241E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.27052E-3
inlet_lpb_pmon=2.14209E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.54464E-3
foreline_cvt_pmon=2.54464E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.16345E-1
res40_imon=-2.60238E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.38E2	2.0E0	1.47E2	4.1E1	-7.30918E-2	-8.7999E1	-9.53674E-5	-8.80007E1	3.09944E-4	5.34058E-3	9.36031E-2	2.73788E1	-3.26437E1	-3.25965E1	2.6819E1	2.37538E-9	2.53306E-3	2.53306E-3	6.27461E-3	2.17444E-2
2.0E0	3.35E2	1.0E0	3.16E2	1.6E2	-7.3401E-2	-8.79989E1	-1.19209E-4	-8.80006E1	2.38419E-4	5.36442E-3	9.37223E-2	2.73916E1	-3.26296E1	-3.27125E1	2.67433E1	2.37538E-9	2.52707E-3	2.52707E-3	6.33436E-3	2.16621E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.79989E1	4.76837E-5	-8.80005E1	2.14577E-4	5.07832E-3	9.377E-2	2.7344E1	-3.26714E1	-3.25709E1	2.68439E1	2.38096E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.15975E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.79989E1	4.76837E-5	-8.80002E1	2.6226E-4	5.45979E-3	9.36747E-2	2.72694E1	-3.26941E1	-3.27396E1	2.68731E1	2.38158E-9	2.51334E-3	2.51334E-3	6.40682E-3	2.17444E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.79986E1	-9.53674E-5	-8.80004E1	3.57628E-4	5.24521E-3	9.35316E-2	2.73148E1	-3.26325E1	-3.24962E1	2.67822E1	2.38096E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.16991E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.79988E1	1.66893E-4	-8.80003E1	2.86102E-4	5.22137E-3	9.36985E-2	2.73736E1	-3.26621E1	-3.26296E1	2.67368E1	2.38655E-9	2.51203E-3	2.51203E-3	6.27788E-3	2.13958E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.79986E1	2.6226E-4	-8.80003E1	9.53674E-5	5.29289E-3	9.37462E-2	2.72815E1	-3.26732E1	-3.25582E1	2.68504E1	2.37538E-9	2.53967E-3	2.53967E-3	6.3074E-3	2.1858E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.79985E1	2.38419E-5	-8.80006E1	-4.76837E-5	5.19753E-3	9.38416E-2	2.73167E1	-3.2677E1	-3.26538E1	2.68105E1	2.38045E-9	2.51632E-3	2.51632E-3	6.25382E-3	2.15699E-2
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.79986E1	-2.6226E-4	-8.80006E1	-1.43051E-4	5.36442E-3	9.36985E-2	2.72597E1	-3.2772E1	-3.2652E1	2.68796E1	2.37538E-9	2.52131E-3	2.52131E-3	6.37114E-3	2.16555E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.79987E1	-9.53674E-5	-8.80004E1	-2.86102E-4	5.45979E-3	9.35555E-2	2.72654E1	-3.26296E1	-3.27017E1	2.6766E1	2.37538E-9	2.53571E-3	2.53571E-3	6.3074E-3	2.16991E-2
1.4E1	9.0E0	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.79987E1	0.0E0	-8.80003E1	-1.43051E-4	5.45979E-3	9.37462E-2	2.74381E1	-3.26682E1	-3.25352E1	2.6719E1	2.37538E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.15189E-2
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.79987E1	-4.76837E-5	-8.80005E1	3.09944E-4	5.31673E-3	9.36031E-2	2.72808E1	-3.27017E1	-3.26233E1	2.68244E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.16991E-2
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.79987E1	-2.14577E-4	-8.80007E1	1.90735E-4	5.126E-3	9.36747E-2	2.73552E1	-3.26938E1	-3.26467E1	2.68633E1	2.37538E-9	2.5199E-3	2.5199E-3	6.33211E-3	2.16313E-2
1.7E1	7.5E1	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.79987E1	-2.38419E-5	-8.80005E1	2.38419E-4	5.17368E-3	9.35078E-2	2.73083E1	-3.27136E1	-3.25806E1	2.67985E1	2.37538E-9	2.51096E-3	2.51096E-3	6.3074E-3	2.16621E-2
1.8E1	2.97E2	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.79987E1	1.43051E-4	-8.80005E1	9.53674E-5	5.03063E-3	9.38177E-2	2.73116E1	-3.27039E1	-3.26779E1	2.67985E1	2.37538E-9	2.52384E-3	2.52384E-3	6.33706E-3	2.15975E-2
1.9E1	1.85E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.79988E1	2.6226E-4	-8.80004E1	2.6226E-4	5.19753E-3	9.36031E-2	2.74205E1	-3.26765E1	-3.2507E1	2.67985E1	2.38096E-9	2.52384E-3	2.52384E-3	6.33706E-3	2.16991E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.79987E1	1.43051E-4	-8.80003E1	9.53674E-5	4.95911E-3	9.36508E-2	2.72756E1	-3.26113E1	-3.2744E1	2.68017E1	2.37538E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.15189E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.79986E1	9.53674E-5	-8.80004E1	4.76837E-5	4.93526E-3	9.34362E-2	2.73408E1	-3.26877E1	-3.25773E1	2.68633E1	2.38045E-9	2.53246E-3	2.53246E-3	6.28056E-3	2.16621E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.79988E1	-4.76837E-5	-8.80004E1	2.38419E-4	5.22137E-3	9.36985E-2	2.72186E1	-3.26765E1	-3.27017E1	2.68666E1	2.37538E-9	2.51096E-3	2.51096E-3	6.3074E-3	2.15699E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.79987E1	-1.66893E-4	-8.80003E1	2.38419E-4	4.88758E-3	9.37939E-2	2.72921E1	-3.26163E1	-3.25611E1	2.68082E1	2.37538E-9	2.54464E-3	2.54464E-3	6.27052E-3	2.14209E-2