[Scan]
initial_time=2015-12-18T19:00:41
final_time=2015-12-18T19:00:44
ip_count=19
run=1020
dataset=0
scan=13
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40967E-2
qbias_imon=-3.81251E-6
ql1_vset=
ql1_vmon=-8.79991E1
ql1_imon=-1.0762E-9
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.39008E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-3.31866E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.60487E-8
mult1=-1.00655E-8
mult2=-2.77051E-9
rf_tmon=-6.83762E-3
rf_agc=3.21319E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=6.08838E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67395E0
bslens_imon=2.55938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=1.97334E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54026E1
cs_ef1b_imon=2.87305E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02489E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=2.61141E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01132E0
lens1_imon=1.17508E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64284E1
os_ef1alow_imon=2.94846E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.51262E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84759E1
cs_ef1a_imon=2.97036E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.28582E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1084E1
os_restr1_imon=4.3059E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14867E1
os_ea1_imon=2.35402E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64041E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25931E0
cs_ionrep_imon=1.20765E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93225E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01937E1
cs_anode1_imon=2.93143E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20601E0
olens4_imon=3.94951E-8
tplens_vset=1.4E-1
tplens_vmon=1.53328E0
tplens_imon=-9.23003E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26512E1
iondef3_imon=1.47153E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.57103E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98476E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=9.59849E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=1.78732E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34769E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74217E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.36746E0
os_ea2_imon=-8.14854E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00666E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7146E1
cs_ef2a_imon=3.17713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02618E0
os_ef2alow_imon=-2.48075E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.49727E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.42527E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.28414E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.24299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73556E1
iondef1_imon=1.05624E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67289E1
iondef4_imon=1.10936E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.32645E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.70612E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15041E0
cs_ionaccel_imon=-2.04287E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0205E2
cs_ionfocb_imon=1.47469E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56527E1
einzel_imon=7.63919E-6
window_vset=0.0E0
window_vmon=1.13428E-1
window_imon=-1.24009E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39206E-4
mask2_vset=0.0E0
mask2_vmon=-1.85979E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92602E3
multa_neg_imon=9.19971E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93808E3
defgrida_imon=6.19317E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50177E3
multb_neg_imon=6.84207E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56698E0
defgridb_imon=5.2631E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.333E1
os_fil1_imon=9.48583E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06397E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62598E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30808E1
cs_fil1_imon=1.00125E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61926E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65066E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.95879E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90656E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.9482E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37517E-1
cs_fil2_imon=-3.6075E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33894E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22375E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.17444E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.89325E-1
res40_imon=-2.72402E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.25E2	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.79988E1	-2.86102E-4	-8.80004E1	2.14577E-4	5.29289E-3	9.36031E-2	2.73246E1	-3.27363E1	-3.26714E1	2.67822E1	2.37538E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.16313E-2
2.0E0	2.98E2	0.0E0	3.16E2	1.6E2	-7.42513E-2	-8.79988E1	-3.09944E-4	-8.80004E1	3.09944E-4	5.26905E-3	9.35793E-2	2.72808E1	-3.26909E1	-3.25692E1	2.68541E1	2.37538E-9	2.51203E-3	2.51203E-3	6.33706E-3	2.16991E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.79991E1	-3.33786E-4	-8.80004E1	3.09944E-4	5.22137E-3	9.35555E-2	2.73278E1	-3.26228E1	-3.27331E1	2.67822E1	2.37538E-9	2.52293E-3	2.52293E-3	6.33021E-3	2.16834E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.41738E-2	-8.79989E1	-2.86102E-4	-8.80005E1	1.43051E-4	5.34058E-3	9.35078E-2	2.72889E1	-3.27104E1	-3.25773E1	2.68147E1	2.37538E-9	2.51203E-3	2.51203E-3	6.33706E-3	2.16991E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.79989E1	-1.66893E-4	-8.80005E1	1.43051E-4	5.17368E-3	9.36985E-2	2.72597E1	-3.26844E1	-3.26617E1	2.68471E1	2.37538E-9	2.5068E-3	2.5068E-3	6.34037E-3	2.16313E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44831E-2	-8.79989E1	-1.66893E-4	-8.80006E1	3.09944E-4	5.19753E-3	9.36747E-2	2.73538E1	-3.27136E1	-3.25092E1	2.67531E1	2.37538E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.14964E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.79989E1	-7.15256E-5	-8.80007E1	3.57628E-4	5.36442E-3	9.37939E-2	2.73808E1	-3.26368E1	-3.26693E1	2.67822E1	2.37538E-9	2.50615E-3	2.50615E-3	6.3074E-3	2.14964E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.43285E-2	-8.79991E1	-2.86102E-4	-8.80006E1	3.09944E-4	5.34058E-3	9.37939E-2	2.73375E1	-3.26968E1	-3.25818E1	2.68082E1	2.37538E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.15189E-2
1.2E1	8.0E0	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.79991E1	-3.33786E-4	-8.80004E1	4.05312E-4	5.17368E-3	9.37462E-2	2.7311E1	-3.25995E1	-3.25847E1	2.67855E1	2.37538E-9	2.52707E-3	2.52707E-3	6.28056E-3	2.15699E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.7999E1	-2.14577E-4	-8.80003E1	4.05312E-4	5.22137E-3	9.36031E-2	2.7233E1	-3.2608E1	-3.27053E1	2.68698E1	2.37538E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.13867E-2
1.4E1	9.0E0	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.7999E1	-2.86102E-4	-8.80003E1	3.33786E-4	5.36442E-3	9.35078E-2	2.72467E1	-3.26357E1	-3.26714E1	2.6779E1	2.37538E-9	2.51203E-3	2.51203E-3	6.27788E-3	2.13958E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.7999E1	-4.05312E-4	-8.80004E1	5.00679E-4	5.38826E-3	9.34839E-2	2.73375E1	-3.26779E1	-3.26422E1	2.67725E1	2.37538E-9	2.5199E-3	2.5199E-3	6.37351E-3	2.15189E-2
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.79992E1	-3.33786E-4	-8.80004E1	4.05312E-4	5.22137E-3	9.36031E-2	2.74057E1	-3.27396E1	-3.25449E1	2.68179E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.16991E-2
1.7E1	8.8E1	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.79991E1	-4.29153E-4	-8.80005E1	4.52995E-4	5.22137E-3	9.35316E-2	2.73151E1	-3.27184E1	-3.2631E1	2.68001E1	2.37792E-9	2.52707E-3	2.52707E-3	6.29396E-3	2.17083E-2
1.8E1	2.93E2	1.0E0	7.27E2	5.0E2	-7.42513E-2	-8.7999E1	-1.66893E-4	-8.80005E1	5.48363E-4	5.26905E-3	9.36031E-2	2.73493E1	-3.26467E1	-3.25906E1	2.67758E1					
1.9E1	1.8E2	0.0E0	7.68E2	5.29E2	-7.43285E-2	-8.79992E1	-3.09944E-4	-8.80005E1	5.00679E-4	5.07832E-3	9.38416E-2	2.73411E1	-3.27233E1	-3.2745E1	2.6779E1	2.38469E-9	2.51498E-3	2.51498E-3	6.28279E-3	2.14628E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.79989E1	2.38419E-5	-8.80006E1	2.6226E-4	5.36442E-3	9.37223E-2	2.7224E1	-3.26163E1	-3.25579E1	2.68082E1	2.37538E-9	2.51334E-3	2.51334E-3	6.27461E-3	2.1407E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.43285E-2	-8.7999E1	-1.43051E-4	-8.80007E1	5.24521E-4	5.48363E-3	9.40084E-2	2.73992E1	-3.26941E1	-3.27006E1	2.6886E1	2.38096E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.16991E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.79989E1	-4.76837E-5	-8.80008E1	4.05312E-4	5.53131E-3	9.38416E-2	2.73603E1	-3.26325E1	-3.26357E1	2.68154E1	2.37538E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.14781E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40967E-2	-8.79991E1	0.0E0	-8.80008E1	2.86102E-4	5.55515E-3	9.37462E-2	2.73556E1	-3.26476E1	-3.26512E1	2.67289E1	2.37538E-9	2.51334E-3	2.51334E-3	6.34037E-3	2.17444E-2