[Scan]
initial_time=2015-12-18T19:00:51
final_time=2015-12-18T19:00:55
ip_count=19
run=1020
dataset=0
scan=14
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.85237E-6
ql1_vset=
ql1_vmon=-8.79989E1
ql1_imon=-1.02156E-9
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=1.47816E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-3.19223E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.60933E-8
mult1=-9.55978E-9
mult2=-2.519E-9
rf_tmon=-3.16057E-3
rf_agc=3.15191E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=6.18339E-10
bslens_vset=-6.2E0
bslens_vmon=-6.75326E0
bslens_imon=3.35968E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20241E1
lens5a_imon=1.96036E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12376E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54424E1
cs_ef1b_imon=2.89786E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04579E2
lens23_imon=1.02272E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=2.54004E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06178E0
lens1_imon=1.2616E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64187E1
os_ef1alow_imon=2.97376E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.59265E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84589E1
cs_ef1a_imon=2.95041E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.2886E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11188E1
os_restr1_imon=4.29714E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.17715E1
os_ea1_imon=2.32807E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64057E1
os_ef1bup_imon=3.06912E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22326E0
cs_ionrep_imon=1.16222E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.9355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01199E1
cs_anode1_imon=2.94846E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20627E0
olens4_imon=3.95366E-8
tplens_vset=1.4E-1
tplens_vmon=1.57294E0
tplens_imon=-5.55298E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25431E1
iondef3_imon=1.49965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27342E1
iondef2_imon=1.55805E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03018E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=9.20701E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27733E0
ionrepsh_imon=1.68999E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34265E1
lens5b_imon=2.23938E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7515E1
cs_ef2b_imon=3.10999E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51886E0
os_ea2_imon=-4.0389E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7142E1
cs_ef2a_imon=3.2073E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11294E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88774E-1
os_ef2bup_imon=-5.37077E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10831E1
os_restr2_imon=3.40581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.25819E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01556E1
cs_anode2_imon=2.23617E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72799E1
iondef1_imon=1.12978E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.0646E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.40644E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=7.67931E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13987E0
cs_ionaccel_imon=-2.10125E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.4709E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56794E1
einzel_imon=7.49323E-6
window_vset=0.0E0
window_vmon=2.39927E-1
window_imon=-7.00031E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.38831E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-4.0811E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=6.23643E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93679E3
defgrida_imon=5.97688E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50048E3
multb_neg_imon=6.84207E-5
defgridb_vset=0.0E0
defgridb_vmon=-8.45165E-1
defgridb_imon=6.2148E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.42258E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07686E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62859E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30782E1
cs_fil1_imon=9.94058E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62015E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63464E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17416E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.0178E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37343E-1
cs_fil2_imon=-3.01555E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3957E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22135E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33211E-3
inlet_lpb_pmon=2.16313E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.53472E-3
foreline_cvt_pmon=2.53472E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.36877E-1
res40_imon=-2.6851E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.54E2	0.0E0	1.47E2	4.1E1	-7.33239E-2	-8.79993E1	-9.53674E-5	-8.80007E1	-1.19209E-4	5.07832E-3	9.38654E-2	2.73294E1	-3.26774E1	-3.27179E1	2.67731E1	2.37538E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.17444E-2
2.0E0	2.57E2	0.0E0	3.16E2	1.6E2	-7.31692E-2	-8.79993E1	-9.53674E-5	-8.8001E1	-1.90735E-4	5.05447E-3	9.38177E-2	2.73251E1	-3.27308E1	-3.2636E1	2.68175E1	2.37538E-9	2.50931E-3	2.50931E-3	6.33021E-3	2.17618E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.79994E1	-9.53674E-5	-8.8001E1	-2.6226E-4	5.10216E-3	9.39608E-2	2.73294E1	-3.27504E1	-3.25719E1	2.68055E1	2.37538E-9	2.50517E-3	2.50517E-3	6.3074E-3	2.16313E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.79994E1	-1.90735E-4	-8.8001E1	-4.76837E-5	5.03063E-3	9.38892E-2	2.72791E1	-3.26974E1	-3.27039E1	2.67628E1	2.37967E-9	2.53205E-3	2.53205E-3	6.33021E-3	2.17618E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.79994E1	2.38419E-5	-8.80012E1	-1.43051E-4	5.05447E-3	9.37939E-2	2.7269E1	-3.26873E1	-3.25755E1	2.68041E1	2.38158E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.17444E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.79993E1	-1.19209E-4	-8.80013E1	9.53674E-5	4.81606E-3	9.38892E-2	2.72889E1	-3.26228E1	-3.26228E1	2.67952E1	2.37538E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17444E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.79992E1	-1.90735E-4	-8.80011E1	-2.38419E-5	4.86374E-3	9.38654E-2	2.72546E1	-3.26585E1	-3.26224E1	2.68471E1	2.37538E-9	2.51793E-3	2.51793E-3	6.3074E-3	2.21101E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.79991E1	-1.19209E-4	-8.80011E1	-4.76837E-5	4.62532E-3	9.35316E-2	2.72272E1	-3.26357E1	-3.27039E1	2.67595E1	2.37538E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.15975E-2
1.2E1	1.4E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.79992E1	-7.15256E-5	-8.80009E1	7.15256E-5	4.79221E-3	9.39131E-2	2.72196E1	-3.26938E1	-3.25936E1	2.67822E1	2.37538E-9	2.5199E-3	2.5199E-3	6.27461E-3	2.16313E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.79991E1	2.14577E-4	-8.80011E1	0.0E0	4.88758E-3	9.38654E-2	2.74205E1	-3.27269E1	-3.2644E1	2.67952E1	2.37538E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.17547E-2
1.4E1	1.8E1	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.79992E1	1.19209E-4	-8.80013E1	-9.53674E-5	5.07832E-3	9.39608E-2	2.73195E1	-3.27702E1	-3.26404E1	2.68569E1	2.37538E-9	2.5068E-3	2.5068E-3	6.3074E-3	2.17444E-2
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.79992E1	2.6226E-4	-8.80012E1	-2.38419E-5	5.07832E-3	9.41515E-2	2.72456E1	-3.26179E1	-3.26476E1	2.68028E1	2.37538E-9	2.53571E-3	2.53571E-3	6.33706E-3	2.19036E-2
1.6E1	2.5E1	0.0E0	6.47E2	4.41E2	-7.41738E-2	-8.79991E1	-9.53674E-5	-8.80011E1	-2.14577E-4	4.8399E-3	9.39846E-2	2.72609E1	-3.26585E1	-3.26526E1	2.67893E1	2.37538E-9	2.51632E-3	2.51632E-3	6.36144E-3	2.17547E-2
1.7E1	7.6E1	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.79991E1	9.53674E-5	-8.80013E1	-1.66893E-4	5.14984E-3	9.377E-2	2.73664E1	-3.27161E1	-3.24746E1	2.67758E1	2.38553E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.14781E-2
1.8E1	2.91E2	0.0E0	7.27E2	5.0E2	-7.37874E-2	-8.79989E1	0.0E0	-8.80011E1	4.76837E-5	5.14984E-3	9.39608E-2	2.72943E1	-3.2644E1	-3.27342E1	2.68698E1	2.37538E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.15189E-2
1.9E1	1.81E2	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.7999E1	9.53674E-5	-8.80013E1	1.66893E-4	4.91142E-3	9.38416E-2	2.73278E1	-3.26098E1	-3.25903E1	2.67985E1	2.37538E-9	2.50615E-3	2.50615E-3	6.33706E-3	2.16991E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.79991E1	9.53674E-5	-8.80009E1	1.19209E-4	4.91142E-3	9.36985E-2	2.73936E1	-3.27145E1	-3.26319E1	2.67368E1	2.37538E-9	2.53306E-3	2.53306E-3	6.34037E-3	2.16313E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.79989E1	-1.66893E-4	-8.80011E1	4.76837E-5	5.19753E-3	9.377E-2	2.72979E1	-3.26296E1	-3.25791E1	2.67239E1	2.37538E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.17547E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.7999E1	-9.53674E-5	-8.80009E1	-2.38419E-5	5.24521E-3	9.38177E-2	2.7324E1	-3.26476E1	-3.27098E1	2.67531E1	2.37538E-9	2.51334E-3	2.51334E-3	6.34037E-3	2.1858E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.79989E1	-2.38419E-4	-8.80011E1	-9.53674E-5	4.88758E-3	9.38177E-2	2.72799E1	-3.27342E1	-3.25431E1	2.68082E1	2.37538E-9	2.53472E-3	2.53472E-3	6.33211E-3	2.16313E-2