[Scan]
initial_time=2015-12-18T19:01:11
final_time=2015-12-18T19:01:15
ip_count=19
run=1020
dataset=0
scan=16
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.76876E-6
ql1_vset=
ql1_vmon=-8.79992E1
ql1_imon=-9.60326E-10
ql2_vset=
ql2_vmon=1.43051E-4
ql2_imon=1.46071E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.97716E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.60881E-8
mult1=-1.01377E-8
mult2=-2.61481E-9
rf_tmon=-4.89094E-3
rf_agc=3.34658E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=6.18279E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66385E0
bslens_imon=2.50963E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2129E1
lens5a_imon=1.96404E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04964E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53645E1
cs_ef1b_imon=2.86672E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.0214E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05767E1
cs_ea1_imon=2.58308E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99113E0
lens1_imon=1.43896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64187E1
os_ef1alow_imon=2.95819E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03788E1
cs_ea2_imon=1.53966E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84718E1
cs_ef1a_imon=2.96403E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.28664E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11221E1
os_restr1_imon=4.28935E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15819E1
os_ea1_imon=2.34364E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64122E1
os_ef1bup_imon=3.09248E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27805E0
cs_ionrep_imon=1.24961E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93206E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02204E1
cs_anode1_imon=2.95041E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20661E0
olens4_imon=3.94973E-8
tplens_vset=1.4E-1
tplens_vmon=1.6025E0
tplens_imon=-3.51978E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26368E1
iondef3_imon=1.50657E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.53577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0305E2
lens6_imon=2.9819E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=9.4583E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29752E0
ionrepsh_imon=1.80636E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33489E1
lens5b_imon=2.1295E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74209E1
cs_ef2b_imon=3.10415E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40459E0
os_ea2_imon=-4.68779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06025E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71452E1
cs_ef2a_imon=3.21508E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05131E0
os_ef2alow_imon=-2.97702E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11479E-1
os_ef2bup_imon=-5.52646E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10734E1
os_restr2_imon=3.37856E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.24088E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01912E1
cs_anode2_imon=2.24201E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73123E1
iondef1_imon=1.10945E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67206E1
iondef4_imon=1.07627E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.38429E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.66357E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09771E0
cs_ionaccel_imon=-2.04287E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02171E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55919E1
einzel_imon=7.60999E-6
window_vset=0.0E0
window_vmon=1.81543E-1
window_imon=-8.55722E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82677E2
mask1_imon=2.38928E-4
mask2_vset=0.0E0
mask2_vmon=-1.85793E1
mask2_imon=-1.01141E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92791E3
multa_neg_imon=6.87019E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93647E3
defgrida_imon=7.62939E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50084E3
multb_neg_imon=7.59045E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36126E0
defgridb_imon=6.30565E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33306E1
os_fil1_imon=9.42647E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06259E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62573E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30859E1
cs_fil1_imon=9.96685E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6221E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64701E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.98312E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.59032E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.77341E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38042E-1
cs_fil2_imon=-3.01555E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.55067E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22351E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33706E-3
inlet_lpb_pmon=2.14964E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52977E-3
foreline_cvt_pmon=2.52977E-3
chamber_tmon=1.39998E0
turbopump=0
drytel=0
rfhighfreq=1
ip=100
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.83389E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=186
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.39E2	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.79987E1	4.76837E-5	-8.80005E1	3.33786E-4	5.34058E-3	9.33409E-2	2.72727E1	-3.26001E1	-3.25579E1	2.68082E1	2.37538E-9	2.51203E-3	2.51203E-3	6.33706E-3	2.19036E-2
2.0E0	3.08E2	0.0E0	3.16E2	1.6E2	-7.30146E-2	-8.79989E1	0.0E0	-8.80005E1	2.86102E-4	5.24521E-3	9.35316E-2	2.73116E1	-3.25903E1	-3.27169E1	2.67595E1	2.37538E-9	2.51096E-3	2.51096E-3	6.3074E-3	2.15699E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.7999E1	-1.19209E-4	-8.80006E1	1.43051E-4	5.34058E-3	9.35078E-2	2.73511E1	-3.26855E1	-3.25936E1	2.68055E1	2.37538E-9	2.52647E-3	2.52647E-3	6.37351E-3	2.17444E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.79988E1	-2.38419E-5	-8.80006E1	1.90735E-4	5.38826E-3	9.35793E-2	2.72727E1	-3.26325E1	-3.27882E1	2.67231E1	2.37538E-9	2.52483E-3	2.52483E-3	6.33211E-3	2.17161E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.79987E1	0.0E0	-8.80007E1	9.53674E-5	5.26905E-3	9.3627E-2	2.72467E1	-3.27396E1	-3.25092E1	2.68217E1	2.37538E-9	2.53571E-3	2.53571E-3	6.36687E-3	2.15975E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.79989E1	7.15256E-5	-8.80008E1	1.43051E-4	5.6982E-3	9.34362E-2	2.73083E1	-3.26844E1	-3.27331E1	2.68082E1	2.37538E-9	2.52384E-3	2.52384E-3	6.33706E-3	2.16991E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.79989E1	-4.76837E-5	-8.80008E1	-4.76837E-5	5.4121E-3	9.32693E-2	2.73116E1	-3.26877E1	-3.25189E1	2.68504E1	2.37538E-9	2.53246E-3	2.53246E-3	6.3074E-3	2.16621E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.79991E1	1.43051E-4	-8.80008E1	1.19209E-4	5.17368E-3	9.33647E-2	2.7251E1	-3.27342E1	-3.27342E1	2.68325E1	2.37538E-9	2.5068E-3	2.5068E-3	6.27461E-3	2.15189E-2
1.2E1	9.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.79992E1	2.38419E-5	-8.80007E1	1.19209E-4	5.38826E-3	9.35793E-2	2.72537E1	-3.26503E1	-3.25503E1	2.68569E1	2.38096E-9	2.52384E-3	2.52384E-3	6.33706E-3	2.15975E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.79993E1	7.15256E-5	-8.80006E1	7.15256E-5	5.24521E-3	9.35555E-2	2.73457E1	-3.26179E1	-3.27233E1	2.67974E1	2.37538E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.14781E-2
1.4E1	1.5E1	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.7999E1	4.76837E-5	-8.80003E1	-1.66893E-4	5.43594E-3	9.35078E-2	2.73181E1	-3.26974E1	-3.248E1	2.67595E1	2.37538E-9	2.51498E-3	2.51498E-3	6.33211E-3	2.15469E-2
1.5E1	1.0E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.79993E1	0.0E0	-8.80003E1	1.66893E-4	5.45979E-3	9.34601E-2	2.73267E1	-3.25936E1	-3.27774E1	2.67725E1	2.38096E-9	2.51793E-3	2.51793E-3	6.27788E-3	2.15975E-2
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.79989E1	2.38419E-5	-8.80004E1	1.90735E-4	5.38826E-3	9.37939E-2	2.73603E1	-3.26487E1	-3.25352E1	2.68536E1	2.37538E-9	2.52977E-3	2.52977E-3	6.3074E-3	2.20066E-2
1.7E1	6.4E1	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.79988E1	1.19209E-4	-8.80005E1	0.0E0	5.31673E-3	9.36747E-2	2.72467E1	-3.27169E1	-3.27039E1	2.67952E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.14964E-2
1.8E1	2.69E2	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.79989E1	-2.38419E-5	-8.80007E1	2.86102E-4	5.38826E-3	9.3627E-2	2.74646E1	-3.25909E1	-3.25719E1	2.67352E1	2.38096E-9	2.51793E-3	2.51793E-3	6.33706E-3	2.20066E-2
1.9E1	1.61E2	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.79991E1	1.66893E-4	-8.80007E1	9.53674E-5	5.48363E-3	9.35316E-2	2.72078E1	-3.26201E1	-3.27027E1	2.68309E1	2.37075E-9	2.5199E-3	2.5199E-3	6.35692E-3	2.14628E-2
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.7999E1	1.66893E-4	-8.80007E1	4.76837E-5	5.38826E-3	9.34601E-2	2.72175E1	-3.25871E1	-3.2639E1	2.67563E1	2.37538E-9	2.53571E-3	2.53571E-3	6.36687E-3	2.18011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.7999E1	2.86102E-4	-8.80008E1	9.53674E-5	5.31673E-3	9.3317E-2	2.72461E1	-3.26231E1	-3.26791E1	2.68001E1	2.37538E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.15699E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.7999E1	3.09944E-4	-8.80007E1	1.43051E-4	5.62668E-3	9.3317E-2	2.73375E1	-3.26163E1	-3.26098E1	2.6796E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.15975E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.79992E1	1.43051E-4	-8.80007E1	1.66893E-4	5.43594E-3	9.36031E-2	2.73123E1	-3.26585E1	-3.26368E1	2.67206E1	2.37538E-9	2.52977E-3	2.52977E-3	6.33706E-3	2.14964E-2