[Scan]
initial_time=2015-12-18T19:13:36
final_time=2015-12-18T19:13:55
ip_count=19
run=1020
dataset=0
scan=17
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.82164E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-7.47776E-10
ql2_vset=
ql2_vmon=3.33786E-4
ql2_imon=1.2084E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.12468E-9
ql4_vset=
ql4_vmon=-1.66893E-4
ql4_imon=1.35257E-8
mult1=-9.36713E-9
mult2=-2.73059E-9
rf_tmon=-5.94239E-3
rf_agc=3.11586E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=6.56271E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19959E1
lens5a_imon=1.96036E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04844E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54175E1
cs_ef1b_imon=2.89296E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02067E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05126E1
cs_ea1_imon=2.53535E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00591E0
lens1_imon=1.12461E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.53786E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.94774E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=1.07896E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.31292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15528E1
os_ea1_imon=2.31869E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6399E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=1.19214E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93092E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.98522E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99989E1
olens4_imon=4.22953E-9
tplens_vset=0.0E0
tplens_vmon=-1.62221E0
tplens_imon=-4.07495E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99756E1
iondef3_imon=8.52918E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98531E1
iondef2_imon=9.16366E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98458E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=8.74305E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30076E0
ionrepsh_imon=1.79561E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.16512E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.1824E0
os_ea2_imon=-8.76138E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71498E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05756E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98625E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.41518E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.29135E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.26011E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57644E1
iondef1_imon=4.9711E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49889E1
iondef4_imon=5.24435E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.53293E-8
olens1_vset=0.0E0
olens1_vmon=7.86781E-4
olens1_imon=1.26585E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.95277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.58332E-6
window_vset=0.0E0
window_vmon=1.65686E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.20617E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.4311E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.15209E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22412E0
defgridb_imon=5.96246E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.44811E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06296E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6394E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30851E1
cs_fil1_imon=9.97591E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63243E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6524E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40904E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.66978E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.3978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22407E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.17255E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.11239E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.292E3	4.0E0	1.47E2	4.1E1	-7.25507E-2	-8.8E1	-2.86102E-4	-8.80007E1	3.8147E-4	5.4121E-3	9.37462E-2	1.58116E1	-1.98822E1	-1.99471E1	1.50028E1	2.37641E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.17822E-2
2.0E0	3.036E3	1.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80002E1	-2.14577E-4	-8.80007E1	1.90735E-4	5.48363E-3	9.3627E-2	1.58239E1	-1.98236E1	-1.99546E1	1.5007E1	2.37638E-9	2.52025E-3	2.52025E-3	6.33919E-3	2.17829E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80003E1	-2.38419E-5	-8.80006E1	1.90735E-4	5.29289E-3	9.37223E-2	1.58012E1	-1.98585E1	-1.99587E1	1.49877E1	2.37641E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.16125E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80003E1	0.0E0	-8.80003E1	2.86102E-4	5.34058E-3	9.37462E-2	1.58125E1	-1.98464E1	-1.99702E1	1.5019E1	2.37638E-9	2.52342E-3	2.52342E-3	6.30212E-3	2.16736E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80003E1	-1.43051E-4	-8.80004E1	1.19209E-4	5.43594E-3	9.39131E-2	1.58065E1	-1.98573E1	-1.99534E1	1.50382E1	2.37538E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.17822E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80001E1	-7.15256E-5	-8.80003E1	2.14577E-4	5.50747E-3	9.39369E-2	1.58089E1	-1.98597E1	-1.99444E1	1.50214E1	2.37741E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.16252E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80002E1	-1.19209E-4	-8.80002E1	3.33786E-4	5.55515E-3	9.37462E-2	1.58011E1	-1.98759E1	-1.9963E1	1.50178E1	2.37538E-9	2.51693E-3	2.51693E-3	6.29624E-3	2.17722E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.80004E1	-3.57628E-4	-8.80006E1	2.38419E-4	5.65052E-3	9.38177E-2	1.57999E1	-1.98338E1	-1.99528E1	1.5001E1	2.37538E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.17633E-2
1.2E1	8.1E1	0.0E0	4.85E2	3.23E2	-7.46377E-2	-8.80002E1	1.43051E-4	-8.80004E1	5.24521E-4	5.57899E-3	9.38177E-2	1.57929E1	-1.98691E1	-1.99502E1	1.50223E1	2.37641E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.16501E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80004E1	1.43051E-4	-8.80004E1	-7.15256E-5	5.55515E-3	9.36508E-2	1.58106E1	-1.98565E1	-1.99642E1	1.5025E1	2.37634E-9	2.52364E-3	2.52364E-3	6.31251E-3	2.15208E-2
1.4E1	1.08E2	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80005E1	1.66893E-4	-8.80002E1	4.76837E-5	5.74589E-3	9.37939E-2	1.57674E1	-1.98254E1	-1.99918E1	1.49818E1	2.3765E-9	2.52029E-3	2.52029E-3	6.32518E-3	2.16178E-2
1.5E1	4.9E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80003E1	2.38419E-5	-8.80001E1	2.38419E-4	5.48363E-3	9.37223E-2	1.57729E1	-1.99216E1	-2.00597E1	1.498E1	2.3764E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.16067E-2
1.6E1	3.06E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80005E1	-9.53674E-5	-8.80003E1	1.66893E-4	5.26905E-3	9.34124E-2	1.5805E1	-1.98989E1	-1.99868E1	1.49906E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.16313E-2
1.7E1	6.44E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80005E1	9.53674E-5	-8.80002E1	2.38419E-4	5.31673E-3	9.38177E-2	1.5782E1	-1.98334E1	-1.99502E1	1.50088E1	2.37741E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.15331E-2
1.8E1	2.878E3	3.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80005E1	-7.15256E-5	-8.80003E1	-4.76837E-5	5.43594E-3	9.38177E-2	1.57819E1	-1.98693E1	-1.99744E1	1.50238E1	2.37745E-9	2.52647E-3	2.52647E-3	6.33486E-3	2.16878E-2
1.9E1	1.812E3	2.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80005E1	-4.76837E-5	-8.80007E1	-2.38419E-5	5.50747E-3	9.35316E-2	1.57825E1	-1.98368E1	-1.99882E1	1.5007E1	2.37538E-9	2.51443E-3	2.51443E-3	6.29098E-3	2.16689E-2
2.0E1	2.3E1	0.0E0	8.08E2	5.58E2	-7.36328E-2	-8.80003E1	-2.38419E-5	-8.80005E1	2.6226E-4	5.57899E-3	9.38654E-2	1.57867E1	-1.98525E1	-1.99774E1	1.50046E1	2.37538E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.17633E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80005E1	-1.66893E-4	-8.80007E1	3.09944E-4	5.43594E-3	9.40561E-2	1.57926E1	-1.98246E1	-1.99944E1	1.50262E1	2.37641E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.17255E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80004E1	9.53674E-5	-8.80007E1	3.33786E-4	5.48363E-3	9.36747E-2	1.58131E1	-1.98543E1	-1.9984E1	1.49878E1	2.37538E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.16436E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80005E1	3.33786E-4	-8.80005E1	-1.66893E-4	5.48363E-3	9.33647E-2	1.57644E1	-1.98531E1	-1.99756E1	1.49889E1	2.37538E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.17255E-2