[Scan]
initial_time=2015-12-18T19:14:02
final_time=2015-12-18T19:14:22
ip_count=19
run=1020
dataset=0
scan=18
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.76007E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-7.13909E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.18428E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.20902E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.3508E-8
mult1=-8.87347E-9
mult2=-2.66472E-9
rf_tmon=-5.30551E-3
rf_agc=3.20899E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=6.51336E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6397E0
bslens_imon=2.53054E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20043E1
lens5a_imon=1.9874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54986E1
cs_ef1b_imon=2.90413E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05144E1
cs_ea1_imon=2.53066E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01252E0
lens1_imon=1.68338E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03786E1
cs_ea2_imon=1.5256E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.93693E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=1.07691E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.31905E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.34897E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.06415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=1.18457E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93175E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02013E1
cs_anode1_imon=2.99063E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99987E1
olens4_imon=4.26199E-9
tplens_vset=0.0E0
tplens_vmon=-1.58976E0
tplens_imon=-3.39E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99696E1
iondef3_imon=8.54721E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98681E1
iondef2_imon=9.39077E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98184E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=8.28683E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=1.7967E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.11208E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22746E0
os_ea2_imon=-7.06706E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00374E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7148E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04134E0
os_ef2alow_imon=-2.82853E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.4306E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11189E1
os_restr2_imon=3.40617E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.31623E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.24209E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57969E1
iondef1_imon=5.1225E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50045E1
iondef4_imon=4.98847E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.53286E-8
olens1_vset=0.0E0
olens1_vmon=9.77516E-4
olens1_imon=1.25861E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14456E0
cs_ionaccel_imon=-1.81942E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47075E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=1.77098E-1
window_imon=-1.17792E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.05836E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.53564E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.04755E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18803E0
defgridb_imon=5.93001E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33291E1
os_fil1_imon=9.41952E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06807E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63804E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30833E1
cs_fil1_imon=9.97915E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62708E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65195E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.85217E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.80899E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.76808E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22268E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.16313E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01338E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.233E3	0.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80005E1	-1.43051E-4	-8.80003E1	2.14577E-4	5.79357E-3	9.31501E-2	1.58077E1	-1.98777E1	-1.99606E1	1.50094E1	2.37745E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.16501E-2
2.0E0	3.054E3	1.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80006E1	2.86102E-4	-8.80002E1	3.33786E-4	5.60284E-3	9.34362E-2	1.58105E1	-1.98606E1	-1.998E1	1.49979E1	2.3764E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.16252E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80005E1	7.15256E-5	-8.79999E1	2.6226E-4	5.55515E-3	9.32455E-2	1.58026E1	-1.98423E1	-1.99962E1	1.5019E1	2.37538E-9	2.51725E-3	2.51725E-3	6.33021E-3	2.1703E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80006E1	-9.53674E-5	-8.80003E1	1.19209E-4	5.48363E-3	9.33647E-2	1.57896E1	-1.98641E1	-1.99891E1	1.50082E1	2.37741E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.17176E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80006E1	-1.19209E-4	-8.80002E1	3.33786E-4	5.53131E-3	9.3627E-2	1.58029E1	-1.98543E1	-1.99786E1	1.5019E1	2.3764E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.17918E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80008E1	-3.57628E-4	-8.79999E1	1.19209E-4	5.38826E-3	9.34124E-2	1.58101E1	-1.9835E1	-1.99672E1	1.49812E1	2.37741E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.17361E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80008E1	-1.43051E-4	-8.80001E1	9.53674E-5	5.55515E-3	9.32217E-2	1.58008E1	-1.986E1	-1.99608E1	1.50232E1	2.37641E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.15938E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80006E1	-4.05312E-4	-8.80001E1	0.0E0	5.36442E-3	9.35793E-2	1.57572E1	-1.98759E1	-1.99726E1	1.5034E1	2.3764E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.16621E-2
1.2E1	9.7E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80004E1	1.66893E-4	-8.80002E1	1.43051E-4	5.55515E-3	9.35316E-2	1.58059E1	-1.98368E1	-1.9972E1	1.50004E1	2.37641E-9	2.52867E-3	2.52867E-3	6.31837E-3	2.17633E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80004E1	-2.14577E-4	-8.80002E1	4.76837E-5	5.65052E-3	9.34839E-2	1.57955E1	-1.98688E1	-1.99585E1	1.5012E1	2.37538E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.18011E-2
1.4E1	1.22E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80004E1	4.76837E-5	-8.80003E1	2.38419E-4	5.67436E-3	9.34362E-2	1.57945E1	-1.98507E1	-1.99816E1	1.50148E1	2.37538E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.16991E-2
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80002E1	1.90735E-4	-8.79999E1	7.15256E-5	5.36442E-3	9.35793E-2	1.5792E1	-1.986E1	-1.9972E1	1.50086E1	2.37538E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.16067E-2
1.6E1	3.2E2	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80003E1	1.66893E-4	-8.8E1	3.09944E-4	5.6982E-3	9.36508E-2	1.57826E1	-1.9867E1	-1.99885E1	1.49938E1	2.37538E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.16067E-2
1.7E1	6.76E2	1.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80003E1	1.19209E-4	-8.80003E1	4.76837E-5	5.126E-3	9.35316E-2	1.58097E1	-1.98405E1	-1.9962E1	1.50422E1	2.37842E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.15883E-2
1.8E1	2.815E3	2.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80004E1	0.0E0	-8.80003E1	-1.19209E-4	5.126E-3	9.36031E-2	1.57777E1	-1.98795E1	-1.99918E1	1.5006E1	2.3764E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.15883E-2
1.9E1	1.844E3	1.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80002E1	-9.53674E-5	-8.80006E1	-3.33786E-4	5.10216E-3	9.36508E-2	1.57843E1	-1.98753E1	-1.99632E1	1.50039E1	2.37641E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.16125E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80004E1	0.0E0	-8.80007E1	-2.38419E-4	5.60284E-3	9.37223E-2	1.5816E1	-1.98698E1	-1.99236E1	1.50196E1	2.37538E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.16313E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80005E1	-2.14577E-4	-8.80006E1	-9.53674E-5	5.43594E-3	9.377E-2	1.58257E1	-1.9829E1	-1.99762E1	1.50041E1	2.37641E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.16689E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80003E1	7.15256E-5	-8.80005E1	-1.19209E-4	5.36442E-3	9.34362E-2	1.57933E1	-1.98555E1	-1.9981E1	1.5001E1	2.37641E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.1575E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80006E1	-2.6226E-4	-8.79999E1	-1.19209E-4	5.43594E-3	9.33409E-2	1.57969E1	-1.98681E1	-1.99696E1	1.50045E1	2.37538E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.16313E-2