[Scan]
initial_time=2015-12-18T19:14:29
final_time=2015-12-18T19:14:48
ip_count=19
run=1020
dataset=0
scan=19
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.82588E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-7.08854E-10
ql2_vset=
ql2_vmon=1.19209E-4
ql2_imon=1.24595E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.15812E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.34899E-8
mult1=-1.03785E-8
mult2=-2.69266E-9
rf_tmon=-4.81284E-3
rf_agc=3.33156E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=6.45089E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67565E0
bslens_imon=2.2778E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=1.96386E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54316E1
cs_ef1b_imon=2.89321E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05053E1
cs_ea1_imon=2.55246E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05248E0
lens1_imon=1.5593E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65141E1
os_ef1alow_imon=2.97383E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.55931E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83994E1
cs_ef1a_imon=2.94151E-5
olens2_vset=0.0E0
olens2_vmon=1.07288E-3
olens2_imon=1.08401E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11343E1
os_restr1_imon=4.30068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=2.33975E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.08747E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25682E0
cs_ionrep_imon=1.19722E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93165E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02157E1
cs_anode1_imon=2.97765E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=4.2086E-9
tplens_vset=0.0E0
tplens_vmon=-1.61253E0
tplens_imon=-4.75891E-8
iondef3_vset=-2.0E1
iondef3_vmon=-2.00255E1
iondef3_imon=8.44699E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98314E1
iondef2_imon=9.44157E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=9.24039E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27274E0
ionrepsh_imon=1.80246E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33292E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74478E1
cs_ef2b_imon=3.10207E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2285E0
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71333E1
cs_ef2a_imon=3.19486E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0395E0
os_ef2alow_imon=-2.82828E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09394E-1
os_ef2bup_imon=-5.59458E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10712E1
os_restr2_imon=3.39886E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.27557E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.23986E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58107E1
iondef1_imon=5.07747E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5016E1
iondef4_imon=5.14048E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.53451E-8
olens1_vset=0.0E0
olens1_vmon=9.53674E-4
olens1_imon=1.26475E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16895E0
cs_ionaccel_imon=-1.72662E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47039E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55971E1
einzel_imon=7.66004E-6
window_vset=0.0E0
window_vmon=1.52235E-1
window_imon=-1.06285E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.38823E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-7.605E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.74265E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.54279E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.03477E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30516E0
defgridb_imon=6.06497E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.44221E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06628E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63876E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30888E1
cs_fil1_imon=9.97074E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61798E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65005E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.87191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97028E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.66584E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37393E-1
cs_fil2_imon=-2.77344E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.71315E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2233E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.1877E-2
chamber_ion_pmon=2.37641E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.66939E-1
res40_imon=-2.55373E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.273E3	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80003E1	-3.09944E-4	-8.80003E1	-1.66893E-4	5.19753E-3	9.35793E-2	1.58246E1	-1.98526E1	-1.99585E1	1.49962E1	2.37538E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.16067E-2
2.0E0	3.195E3	3.0E0	3.16E2	1.6E2	-7.39421E-2	-8.80004E1	-2.38419E-5	-8.80001E1	-7.15256E-5	5.10216E-3	9.34362E-2	1.57943E1	-1.98316E1	-1.99803E1	1.50328E1	2.37538E-9	2.5188E-3	2.5188E-3	6.28552E-3	2.16313E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80002E1	-2.38419E-4	-8.80003E1	-1.43051E-4	5.14984E-3	9.36985E-2	1.58014E1	-1.98558E1	-1.99785E1	1.4992E1	2.37435E-9	2.52867E-3	2.52867E-3	6.31288E-3	2.16501E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80003E1	-1.43051E-4	-8.80003E1	-1.66893E-4	5.19753E-3	9.35316E-2	1.58014E1	-1.9867E1	-1.99673E1	1.50143E1	2.37842E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.15699E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80007E1	-1.19209E-4	-8.80001E1	-7.15256E-5	5.19753E-3	9.39131E-2	1.58038E1	-1.98463E1	-1.99504E1	1.50004E1	2.37538E-9	2.52131E-3	2.52131E-3	6.31798E-3	2.16374E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80003E1	-1.66893E-4	-8.8E1	2.38419E-5	5.24521E-3	9.38892E-2	1.57847E1	-1.98607E1	-1.9958E1	1.49997E1	2.37538E-9	2.52553E-3	2.52553E-3	6.32858E-3	2.16011E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80005E1	-2.14577E-4	-8.80003E1	9.53674E-5	5.38826E-3	9.37223E-2	1.57965E1	-1.98263E1	-1.99873E1	1.49974E1	2.37538E-9	2.5199E-3	2.5199E-3	6.29581E-3	2.16114E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80006E1	-2.14577E-4	-8.80003E1	-9.53674E-5	5.22137E-3	9.3627E-2	1.58011E1	-1.98645E1	-1.996E1	1.50153E1	2.37641E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.17255E-2
1.2E1	1.02E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80004E1	-2.38419E-4	-8.80003E1	0.0E0	5.24521E-3	9.37223E-2	1.57885E1	-1.98585E1	-1.9933E1	1.50262E1	2.37641E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.1575E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80004E1	-1.90735E-4	-8.80003E1	7.15256E-5	5.6982E-3	9.35316E-2	1.57927E1	-1.98476E1	-1.999E1	1.50126E1	2.37745E-9	2.51225E-3	2.51225E-3	6.32386E-3	2.15938E-2
1.4E1	1.0E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80004E1	-4.52995E-4	-8.80001E1	2.86102E-4	5.4121E-3	9.35316E-2	1.57674E1	-1.98783E1	-2.00027E1	1.49866E1	2.37538E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.16878E-2
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80006E1	-2.14577E-4	-8.80001E1	2.38419E-5	5.36442E-3	9.35316E-2	1.58131E1	-1.98711E1	-1.99528E1	1.5034E1	2.37641E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.16501E-2
1.6E1	3.33E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80007E1	-4.76837E-5	-8.80004E1	2.38419E-4	5.4121E-3	9.3627E-2	1.58161E1	-1.98567E1	-1.9975E1	1.4983E1	2.37538E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.16313E-2
1.7E1	6.67E2	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80004E1	-2.38419E-5	-8.80003E1	1.19209E-4	5.29289E-3	9.408E-2	1.57849E1	-1.98861E1	-1.99636E1	1.50157E1	2.37538E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.16689E-2
1.8E1	2.91E3	2.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80002E1	-1.19209E-4	-8.80004E1	2.38419E-4	5.24521E-3	9.38177E-2	1.58245E1	-1.98392E1	-1.9948E1	1.50099E1	2.37641E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.17255E-2
1.9E1	1.884E3	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80006E1	-4.76837E-5	-8.80002E1	-4.76837E-5	5.07832E-3	9.38177E-2	1.57737E1	-1.98541E1	-1.99915E1	1.5001E1	2.37538E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.17822E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80004E1	3.33786E-4	-8.80005E1	1.19209E-4	5.29289E-3	9.35078E-2	1.5772E1	-1.98453E1	-1.99414E1	1.50052E1	2.37538E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.15938E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80002E1	7.15256E-5	-8.8E1	1.90735E-4	5.07832E-3	9.36747E-2	1.58006E1	-1.98898E1	-1.99854E1	1.50097E1	2.37538E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.15938E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.15461E-2	-8.80003E1	-2.14577E-4	-8.80006E1	2.38419E-5	5.03063E-3	9.3627E-2	1.58053E1	-1.99011E1	-1.99522E1	1.50116E1	2.37439E-9	2.52765E-3	2.52765E-3	6.30212E-3	2.16011E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80006E1	1.19209E-4	-8.80006E1	1.66893E-4	5.26905E-3	9.33647E-2	1.58107E1	-1.98314E1	-2.00255E1	1.5016E1	2.37641E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.1877E-2