[Scan]
initial_time=2015-12-18T19:14:56
final_time=2015-12-18T19:15:15
ip_count=19
run=1020
dataset=0
scan=20
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.80788E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-7.26378E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.22591E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.09767E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.35227E-8
mult1=-9.88488E-9
mult2=-2.66871E-9
rf_tmon=-3.21464E-3
rf_agc=3.42048E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=6.11818E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65712E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20157E1
lens5a_imon=1.96541E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53917E1
cs_ef1b_imon=2.8771E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04658E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0518E1
cs_ea1_imon=2.54725E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99269E0
lens1_imon=1.35172E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64849E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.52704E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.94846E-5
olens2_vset=0.0E0
olens2_vmon=1.78814E-3
olens2_imon=1.07952E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.30752E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=2.34753E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63882E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22326E0
cs_ionrep_imon=1.17989E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=2.98414E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99987E1
olens4_imon=4.20966E-9
tplens_vset=0.0E0
tplens_vmon=-1.56573E0
tplens_imon=-2.27247E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99979E1
iondef3_imon=8.9077E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98374E1
iondef2_imon=9.3403E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98422E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=8.41308E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2539E0
ionrepsh_imon=1.78155E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33826E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22626E0
os_ea2_imon=-6.20187E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00479E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.75645E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98625E-1
os_ef2bup_imon=-5.50628E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=3.4195E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23099E2
cs_ionfoca_imon=6.29532E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.25614E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57638E1
iondef1_imon=4.98552E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49818E1
iondef4_imon=5.17227E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.52971E-8
olens1_vset=0.0E0
olens1_vmon=8.10623E-4
olens1_imon=1.2623E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15177E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47169E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.49323E-6
window_vset=0.0E0
window_vmon=1.65085E-1
window_imon=-1.14909E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.38976E-4
mask2_vset=0.0E0
mask2_vmon=-1.86224E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.1593E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.42029E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.06918E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44367E0
defgridb_imon=5.80384E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.45484E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05882E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64453E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.97248E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62324E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65689E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.30629E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.68999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.47899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22515E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31779E-3
inlet_lpb_pmon=2.17563E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52613E-3
foreline_cvt_pmon=2.52613E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.31371E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.336E3	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80007E1	-9.53674E-5	-8.80004E1	2.38419E-4	5.4121E-3	9.35078E-2	1.58262E1	-1.98405E1	-1.99709E1	1.50202E1	2.37538E-9	2.52867E-3	2.52867E-3	6.31837E-3	2.16125E-2
2.0E0	3.137E3	7.0E0	3.16E2	1.6E2	-7.32464E-2	-8.8001E1	-2.14577E-4	-8.80007E1	9.53674E-5	5.22137E-3	9.38892E-2	1.58007E1	-1.98594E1	-1.99885E1	1.4989E1	2.3764E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.16252E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80007E1	-4.05312E-4	-8.80008E1	-4.76837E-5	5.43594E-3	9.38654E-2	1.57826E1	-1.98381E1	-1.99844E1	1.50288E1	2.37538E-9	2.52139E-3	2.52139E-3	6.33538E-3	2.16186E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80005E1	-2.86102E-4	-8.80005E1	1.43051E-4	5.36442E-3	9.34601E-2	1.5825E1	-1.98423E1	-1.99473E1	1.49944E1	2.37741E-9	2.52599E-3	2.52599E-3	6.29665E-3	2.16436E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80012E1	0.0E0	-8.80004E1	-2.38419E-5	5.43594E-3	9.3317E-2	1.57826E1	-1.98753E1	-1.99555E1	1.49962E1	2.37538E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.16252E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.8001E1	-1.43051E-4	-8.80001E1	9.53674E-5	5.31673E-3	9.34839E-2	1.57999E1	-1.98807E1	-1.99786E1	1.50112E1	2.37538E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.17444E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80008E1	-1.19209E-4	-8.79999E1	2.14577E-4	5.17368E-3	9.36508E-2	1.57849E1	-1.98476E1	-1.99624E1	1.50057E1	2.37741E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.16067E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80004E1	-1.90735E-4	-8.80002E1	7.15256E-5	5.22137E-3	9.3627E-2	1.58059E1	-1.98434E1	-1.99606E1	1.50172E1	2.37641E-9	2.52757E-3	2.52757E-3	6.34037E-3	2.16878E-2
1.2E1	7.9E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80003E1	0.0E0	-8.8E1	2.6226E-4	5.36442E-3	9.36031E-2	1.57843E1	-1.98448E1	-1.99826E1	1.5029E1	2.37848E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.17066E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80005E1	-3.09944E-4	-8.80001E1	7.15256E-5	5.24521E-3	9.35316E-2	1.58089E1	-1.98489E1	-1.99949E1	1.50076E1	2.37538E-9	2.51657E-3	2.51657E-3	6.32107E-3	2.16834E-2
1.4E1	1.23E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80005E1	-2.14577E-4	-8.80003E1	2.38419E-4	5.34058E-3	9.32217E-2	1.58061E1	-1.98423E1	-1.99408E1	1.50154E1	2.37641E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.16501E-2
1.5E1	6.4E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80005E1	-1.43051E-4	-8.80004E1	-1.90735E-4	5.29289E-3	9.32932E-2	1.57819E1	-1.98615E1	-1.99354E1	1.50124E1	2.37437E-9	2.51096E-3	2.51096E-3	6.30202E-3	2.16991E-2
1.6E1	3.03E2	0.0E0	6.47E2	4.41E2	-7.44059E-2	-8.80002E1	-7.15256E-5	-8.80001E1	-1.43051E-4	4.76837E-3	9.32217E-2	1.57065E1	-1.97732E1	-2.00528E1	1.50028E1	2.37641E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.15938E-2
1.7E1	6.83E2	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.80005E1	-1.43051E-4	-8.80001E1	4.29153E-4	4.95911E-3	9.32932E-2	1.57997E1	-1.98393E1	-1.99679E1	1.50178E1	2.3764E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.16067E-2
1.8E1	2.848E3	2.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80004E1	-2.6226E-4	-8.80001E1	5.48363E-4	4.86374E-3	9.34362E-2	1.57674E1	-1.98428E1	-1.99714E1	1.50479E1	2.37538E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.16689E-2
1.9E1	1.822E3	2.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80008E1	-2.6226E-4	-8.80004E1	5.00679E-4	5.05447E-3	9.33886E-2	1.58071E1	-1.98537E1	-1.99846E1	1.49812E1	2.37538E-9	2.51701E-3	2.51701E-3	6.32916E-3	2.16189E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80003E1	-3.09944E-4	-8.80004E1	2.38419E-5	5.05447E-3	9.37223E-2	1.5794E1	-1.98643E1	-1.99285E1	1.50041E1					
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80009E1	-1.66893E-4	-8.80002E1	2.86102E-4	5.43594E-3	9.31978E-2	1.57725E1	-1.98535E1	-1.99738E1	1.50097E1	2.37538E-9	2.51804E-3	2.51804E-3	6.29624E-3	2.16569E-2
2.2E1	1.9E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80007E1	-1.90735E-4	-8.79998E1	5.24521E-4	5.126E-3	9.32455E-2	1.58035E1	-1.98417E1	-1.99777E1	1.49906E1	2.3764E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.15515E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80005E1	-3.09944E-4	-8.80001E1	1.66893E-4	5.05447E-3	9.30786E-2	1.57638E1	-1.98374E1	-1.99979E1	1.49818E1	2.37538E-9	2.52613E-3	2.52613E-3	6.31779E-3	2.17563E-2