[Scan]
initial_time=2015-12-18T19:15:22
final_time=2015-12-18T19:15:42
ip_count=19
run=1020
dataset=0
scan=21
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.8518E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-7.70235E-10
ql2_vset=
ql2_vmon=4.76837E-5
ql2_imon=1.21807E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.21387E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.34565E-8
mult1=-8.57245E-9
mult2=-2.54295E-9
rf_tmon=-5.11325E-3
rf_agc=3.2949E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=6.38866E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.45484E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19917E1
lens5a_imon=2.00975E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.04765E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53448E1
cs_ef1b_imon=2.87206E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0512E1
cs_ea1_imon=2.5422E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99569E0
lens1_imon=1.26881E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03744E1
cs_ea2_imon=1.5357E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=2.94162E-5
olens2_vset=0.0E0
olens2_vmon=1.52588E-3
olens2_imon=1.08267E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=4.30139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=2.34321E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=1.2008E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.98018E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99987E1
olens4_imon=4.2171E-9
tplens_vset=0.0E0
tplens_vmon=-1.58015E0
tplens_imon=-4.14704E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9954E1
iondef3_imon=8.9762E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98717E1
iondef2_imon=9.25018E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.69441E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29356E0
ionrepsh_imon=1.79922E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33598E1
lens5b_imon=2.1471E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27012E0
os_ea2_imon=-7.06706E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04915E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.45222E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.41049E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.31587E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.25326E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58053E1
iondef1_imon=4.96749E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50118E1
iondef4_imon=5.14344E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.53386E-8
olens1_vset=0.0E0
olens1_vmon=6.19888E-4
olens1_imon=1.26982E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15237E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47093E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=1.57276E-1
window_imon=-1.14909E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.07999E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.8673E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=7.54864E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38953E0
defgridb_imon=5.93001E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33317E1
os_fil1_imon=9.44841E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06698E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64589E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30882E1
cs_fil1_imon=9.97669E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62059E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65887E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.83415E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.20317E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.67701E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22502E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.17361E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.60493E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.328E3	1.0E0	1.47E2	4.1E1	-7.39421E-2	-8.80004E1	-2.14577E-4	-8.80003E1	2.38419E-5	5.03063E-3	9.31978E-2	1.57808E1	-1.98647E1	-2.00009E1	1.501E1	2.37745E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.16313E-2
2.0E0	3.173E3	3.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80003E1	-3.09944E-4	-8.80006E1	7.15256E-5	5.22137E-3	9.32455E-2	1.57986E1	-1.98677E1	-1.99505E1	1.50142E1	2.37745E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.17633E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80003E1	-2.6226E-4	-8.80003E1	1.66893E-4	5.29289E-3	9.3317E-2	1.58087E1	-1.98588E1	-1.99628E1	1.49966E1	2.3763E-9	2.52636E-3	2.52636E-3	6.29771E-3	2.15925E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.43285E-2	-8.80004E1	-2.86102E-4	-8.80004E1	2.6226E-4	5.05447E-3	9.33886E-2	1.57951E1	-1.98681E1	-1.99582E1	1.50148E1	2.37643E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.16377E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80005E1	-2.38419E-4	-8.80003E1	-9.53674E-5	5.126E-3	9.32455E-2	1.57873E1	-1.98861E1	-1.99522E1	1.50196E1	2.37538E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.16313E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.41738E-2	-8.80003E1	-3.33786E-4	-8.80003E1	-9.53674E-5	4.93526E-3	9.3627E-2	1.57939E1	-1.98657E1	-1.99894E1	1.50082E1	2.37538E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.17722E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80005E1	-2.38419E-5	-8.80002E1	1.90735E-4	5.55515E-3	9.31501E-2	1.58179E1	-1.98525E1	-1.99912E1	1.50112E1	2.37538E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.16252E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80005E1	-1.90735E-4	-8.80005E1	2.38419E-4	5.26905E-3	9.38416E-2	1.58047E1	-1.98879E1	-1.99576E1	1.50292E1	2.37538E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.16313E-2
1.2E1	1.09E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80005E1	-9.53674E-5	-8.80002E1	0.0E0	5.24521E-3	9.36508E-2	1.58007E1	-1.98367E1	-1.99806E1	1.50563E1	2.37641E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.15563E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80005E1	-2.86102E-4	-8.80003E1	7.15256E-5	5.07832E-3	9.34601E-2	1.58174E1	-1.98641E1	-1.99184E1	1.49734E1	2.37643E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.16377E-2
1.4E1	1.05E2	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80005E1	-9.53674E-5	-8.80003E1	2.14577E-4	5.17368E-3	9.33886E-2	1.58069E1	-1.98484E1	-1.99469E1	1.50473E1	2.37641E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.16125E-2
1.5E1	7.0E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80005E1	-1.19209E-4	-8.80002E1	2.6226E-4	5.05447E-3	9.35555E-2	1.58371E1	-1.98813E1	-2.00141E1	1.5013E1	2.37538E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.16878E-2
1.6E1	3.01E2	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80006E1	-4.76837E-5	-8.80005E1	9.53674E-5	5.03063E-3	9.36985E-2	1.57879E1	-1.98759E1	-1.99815E1	1.5028E1	2.37538E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.18011E-2
1.7E1	7.15E2	1.0E0	6.87E2	4.7E2	-7.44831E-2	-8.80007E1	-1.66893E-4	-8.80003E1	-1.66893E-4	5.14984E-3	9.36747E-2	1.58075E1	-1.98575E1	-1.99873E1	1.5025E1	2.37538E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.17255E-2
1.8E1	2.887E3	0.0E0	7.27E2	5.0E2	-7.48695E-2	-8.8001E1	-1.66893E-4	-8.80007E1	2.38419E-5	5.24521E-3	9.33647E-2	1.57891E1	-1.98609E1	-1.99786E1	1.50166E1	2.37538E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.16689E-2
1.9E1	1.825E3	1.0E0	7.68E2	5.29E2	-7.44059E-2	-8.80008E1	-4.76837E-5	-8.80007E1	1.19209E-4	4.93526E-3	9.32693E-2	1.57767E1	-1.98541E1	-1.99862E1	1.50352E1	2.37641E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.16689E-2
2.0E1	2.5E1	0.0E0	8.08E2	5.58E2	-7.40192E-2	-8.80006E1	-3.57628E-4	-8.80003E1	9.53674E-5	5.19753E-3	9.34124E-2	1.57951E1	-1.98825E1	-1.99582E1	1.50058E1	2.37741E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.16436E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80012E1	-5.24521E-4	-8.80001E1	9.53674E-5	4.79221E-3	9.3627E-2	1.58014E1	-1.98747E1	-1.9952E1	1.50166E1	2.37538E-9	2.52099E-3	2.52099E-3	6.3514E-3	2.15563E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80012E1	-9.53674E-5	-8.80002E1	7.15256E-5	5.14984E-3	9.36985E-2	1.57879E1	-1.98635E1	-1.99868E1	1.50028E1	2.37745E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.16689E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.8001E1	4.76837E-5	-8.80001E1	5.00679E-4	5.10216E-3	9.34839E-2	1.58053E1	-1.98717E1	-1.9954E1	1.50118E1	2.37538E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.17361E-2