[Scan]
initial_time=2015-12-18T19:15:49
final_time=2015-12-18T19:16:16
ip_count=19
run=1020
dataset=0
scan=22
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.86518E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-6.81889E-10
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=1.1798E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.10923E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.34446E-8
mult1=-8.87098E-9
mult2=-2.66004E-9
rf_tmon=-4.61871E-3
rf_agc=3.34869E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=6.35362E-10
bslens_vset=-6.2E0
bslens_vmon=-6.59224E0
bslens_imon=1.37696E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18841E1
lens5a_imon=1.97658E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1264E2
lens4a_imon=2.05947E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=2.88107E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04691E2
lens23_imon=1.01461E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03186E1
cs_ea1_imon=2.46505E-5
lens1_vset=-2.7E0
lens1_vmon=-3.11766E0
lens1_imon=2.36832E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0521E1
cs_ea2_imon=1.54579E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=2.94486E-5
olens2_vset=0.0E0
olens2_vmon=1.7643E-3
olens2_imon=1.08302E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.30752E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.13641E1
os_ea1_imon=2.24227E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17699E0
cs_ionrep_imon=1.23613E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92011E2
cs_nozzle_imon=1.94073E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=2.98594E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.19271E-9
tplens_vset=0.0E0
tplens_vmon=-1.56573E0
tplens_imon=-1.44933E-6
iondef3_vset=-2.0E1
iondef3_vmon=-1.99407E1
iondef3_imon=8.83561E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98781E1
iondef2_imon=1.02632E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03023E2
lens6_imon=2.97874E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.65686E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.12412E0
ionrepsh_imon=1.74226E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34811E1
lens5b_imon=2.27435E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35604E0
os_ea2_imon=-8.79743E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0595E2
lens4b_imon=1.99606E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02332E0
os_ef2alow_imon=-2.74564E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02229E-1
os_ef2bup_imon=-5.49547E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10817E1
os_restr2_imon=3.42022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.37427E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.23812E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57884E1
iondef1_imon=5.34962E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50229E1
iondef4_imon=5.18669E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.53238E-8
olens1_vset=0.0E0
olens1_vmon=8.82149E-4
olens1_imon=1.2647E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17819E0
cs_ionaccel_imon=-1.86267E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.56891E-6
window_vset=0.0E0
window_vmon=1.68088E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86068E1
mask2_imon=-7.95896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92689E3
multa_neg_imon=7.80098E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93676E3
defgrida_imon=6.89614E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=5.87954E-5
defgridb_vset=0.0E0
defgridb_vmon=-2.30684E0
defgridb_imon=6.86009E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.45862E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05924E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64228E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=9.97849E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6236E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65683E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.76207E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.44807E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.48577E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.92058E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22457E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.16125E-2
chamber_ion_pmon=2.37435E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.1184E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=146
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.268E3	2.0E0	1.47E2	4.1E1	-7.51013E-2	-8.80007E1	-9.53674E-5	-8.80006E1	3.09944E-4	5.26905E-3	9.38177E-2	1.57763E1	-1.97578E1	-1.99524E1	1.50214E1	2.37641E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.16313E-2
2.0E0	3.099E3	5.0E0	3.16E2	1.6E2	-7.49466E-2	-8.80008E1	-1.43051E-4	-8.80005E1	5.00679E-4	5.22137E-3	9.37939E-2	1.58185E1	-1.98558E1	-1.99703E1	1.5016E1	2.37538E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.18108E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.44831E-2	-8.80007E1	1.66893E-4	-8.80005E1	9.53674E-5	5.22137E-3	9.35078E-2	1.58109E1	-1.98788E1	-1.99838E1	1.50109E1	2.37538E-9	2.52406E-3	2.52406E-3	6.31555E-3	2.16468E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.80007E1	1.43051E-4	-8.80005E1	1.66893E-4	5.22137E-3	9.35555E-2	1.58179E1	-1.98729E1	-1.99726E1	1.50118E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80007E1	-3.09944E-4	-8.80006E1	9.53674E-5	5.10216E-3	9.37462E-2	1.58083E1	-1.98416E1	-1.99828E1	1.50118E1	2.37538E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.16252E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80008E1	-7.15256E-5	-8.80004E1	4.05312E-4	5.29289E-3	9.34839E-2	1.57608E1	-1.98693E1	-1.99768E1	1.50142E1	2.37641E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.16313E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80007E1	0.0E0	-8.80004E1	-4.76837E-5	5.14984E-3	9.34124E-2	1.58191E1	-1.98453E1	-1.99989E1	1.49992E1	2.37538E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.16952E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80005E1	-3.09944E-4	-8.80002E1	1.19209E-4	5.36442E-3	9.37223E-2	1.58029E1	-1.98693E1	-1.996E1	1.49932E1	2.37641E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.17444E-2
1.2E1	9.4E1	0.0E0	4.85E2	3.23E2	-7.44831E-2	-8.80006E1	-1.90735E-4	-8.80001E1	-9.53674E-5	5.43594E-3	9.35078E-2	1.57979E1	-1.98446E1	-1.99632E1	1.50088E1	2.37538E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.17633E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.40967E-2	-8.80006E1	-2.86102E-4	-8.80002E1	2.86102E-4	5.38826E-3	9.37939E-2	1.58327E1	-1.98912E1	-1.99691E1	1.50394E1	2.37741E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.16806E-2
1.4E1	9.4E1	0.0E0	5.66E2	3.82E2	-7.44059E-2	-8.80009E1	-7.15256E-5	-8.80005E1	1.90735E-4	5.22137E-3	9.35316E-2	1.57966E1	-1.98416E1	-1.99851E1	1.5034E1	2.37848E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.1858E-2
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80006E1	-2.14577E-4	-8.80003E1	2.38419E-5	5.45979E-3	9.37223E-2	1.5805E1	-1.98647E1	-1.99785E1	1.50087E1	2.37538E-9	2.52697E-3	2.52697E-3	6.34661E-3	2.16377E-2
1.6E1	3.29E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80005E1	-9.53674E-5	-8.80004E1	1.19209E-4	5.65052E-3	9.34362E-2	1.58197E1	-1.98747E1	-2.00033E1	1.50118E1	2.37741E-9	2.52923E-3	2.52923E-3	6.31278E-3	2.16991E-2
1.7E1	6.98E2	1.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80006E1	-4.76837E-4	-8.80002E1	7.15256E-5	5.48363E-3	9.35793E-2	1.57824E1	-1.98581E1	-1.99518E1	1.49806E1	2.37538E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.16436E-2
1.8E1	2.857E3	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80006E1	-2.38419E-4	-8.80002E1	-1.90735E-4	5.76973E-3	9.36508E-2	1.57897E1	-1.98549E1	-1.99588E1	1.50148E1	2.37643E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.15803E-2
1.9E1	1.785E3	1.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80006E1	-4.52995E-4	-8.80006E1	-2.38419E-4	5.43594E-3	9.377E-2	1.57867E1	-1.98669E1	-1.99624E1	1.5034E1	2.37538E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.15938E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80006E1	-3.57628E-4	-8.80004E1	-1.90735E-4	5.36442E-3	9.36985E-2	1.5756E1	-1.98633E1	-1.99546E1	1.49716E1	2.37641E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.16313E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80007E1	-4.29153E-4	-8.80004E1	-1.19209E-4	5.79357E-3	9.34601E-2	1.58059E1	-1.98615E1	-1.99582E1	1.5016E1	2.37745E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.17255E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80007E1	-2.14577E-4	-8.80002E1	9.53674E-5	5.29289E-3	9.3627E-2	1.57698E1	-1.98543E1	-1.99744E1	1.49824E1	2.37538E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.16125E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80005E1	-2.38419E-4	-8.80003E1	4.76837E-5	5.24521E-3	9.377E-2	1.57884E1	-1.98781E1	-1.99407E1	1.50229E1	2.37435E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.16125E-2