[Scan]
initial_time=2015-12-18T19:17:05
final_time=2015-12-18T19:17:33
ip_count=19
run=1020
dataset=0
scan=24
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.43285E-2
qbias_imon=-3.81348E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.85704E-10
ql2_vset=
ql2_vmon=1.19209E-4
ql2_imon=1.21092E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.14828E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.36663E-8
mult1=-9.41529E-9
mult2=-2.68667E-9
rf_tmon=-4.48238E-3
rf_agc=3.37421E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=6.91128E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65213E0
bslens_imon=2.51954E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20145E1
lens5a_imon=1.98005E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04899E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53178E1
cs_ef1b_imon=2.83371E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02097E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05016E1
cs_ea1_imon=2.58318E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00752E0
lens1_imon=1.19102E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64703E1
os_ef1alow_imon=2.97329E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03912E1
cs_ea2_imon=1.53608E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=2.92766E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.06109E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.32318E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.37212E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63809E1
os_ef1bup_imon=3.0753E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28227E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93256E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02E1
cs_anode1_imon=2.94377E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99989E1
olens4_imon=4.32401E-9
tplens_vset=0.0E0
tplens_vmon=-1.58224E0
tplens_imon=-3.11679E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99708E1
iondef3_imon=8.62936E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98573E1
iondef2_imon=9.45585E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.984E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.86762E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26462E0
ionrepsh_imon=1.75977E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33344E1
lens5b_imon=2.17916E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74876E1
cs_ef2b_imon=3.10919E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23275E0
os_ea2_imon=-5.26837E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71481E1
cs_ef2a_imon=3.18703E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0389E0
os_ef2alow_imon=-2.73744E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71326E-1
os_ef2bup_imon=-5.44526E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11034E1
os_restr2_imon=3.40849E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30714E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01927E1
cs_anode2_imon=2.24953E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57891E1
iondef1_imon=5.04338E-6
iondef4_vset=1.53E1
iondef4_vmon=1.4998E1
iondef4_imon=5.15786E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.53501E-8
olens1_vset=0.0E0
olens1_vmon=7.39098E-4
olens1_imon=1.24338E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1458E0
cs_ionaccel_imon=-1.79121E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47156E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56467E1
einzel_imon=7.71804E-6
window_vset=0.0E0
window_vmon=1.49219E-1
window_imon=-1.17046E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39007E-4
mask2_vset=0.0E0
mask2_vmon=-1.86417E1
mask2_imon=-7.37612E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.69018E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=5.97232E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=6.53584E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23646E0
defgridb_imon=6.10893E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33312E1
os_fil1_imon=9.45278E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05741E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63093E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=9.97499E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62333E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63162E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.60115E-2
os_fil2_imon=-2.81199E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93033E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.1273E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36764E-1
cs_fil2_imon=-2.48763E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23688E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22392E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.17255E-2
chamber_ion_pmon=2.37435E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.59789E-1
res40_imon=-2.53612E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=197
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.317E3	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80007E1	-5.24521E-4	-8.80003E1	0.0E0	5.31673E-3	9.33409E-2	1.58072E1	-1.98435E1	-1.99726E1	1.50053E1	2.37538E-9	2.52301E-3	2.52301E-3	6.31779E-3	2.17205E-2
2.0E0	2.969E3	2.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80007E1	-4.29153E-4	-8.80005E1	9.53674E-5	5.07832E-3	9.34124E-2	1.58041E1	-1.98669E1	-1.99684E1	1.50485E1	2.37645E-9	2.51952E-3	2.51952E-3	6.31879E-3	2.17815E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.42513E-2	-8.8001E1	-5.72205E-4	-8.80004E1	1.66893E-4	5.26905E-3	9.3627E-2	1.58099E1	-1.98793E1	-1.99987E1	1.50155E1	2.37538E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.16501E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.42513E-2	-8.80008E1	-3.33786E-4	-8.80007E1	3.8147E-4	5.29289E-3	9.32217E-2	1.58047E1	-1.98705E1	-1.99552E1	1.49938E1	2.37638E-9	2.51182E-3	2.51182E-3	6.32328E-3	2.171E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80007E1	-2.6226E-4	-8.80007E1	1.19209E-4	5.26905E-3	9.34124E-2	1.58162E1	-1.989E1	-1.99709E1	1.50148E1	2.37745E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.17822E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80008E1	-3.09944E-4	-8.80007E1	1.66893E-4	5.26905E-3	9.32932E-2	1.58065E1	-1.98519E1	-2.00039E1	1.50161E1	2.37538E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.15883E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.39421E-2	-8.80009E1	-5.24521E-4	-8.80003E1	2.14577E-4	5.26905E-3	9.37939E-2	1.57939E1	-1.99023E1	-1.993E1	1.50096E1	2.37641E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.16689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80006E1	-2.14577E-4	-8.80005E1	3.33786E-4	5.10216E-3	9.36747E-2	1.5792E1	-1.98517E1	-1.99673E1	1.50087E1	2.37538E-9	2.5199E-3	2.5199E-3	6.34588E-3	2.16501E-2
1.2E1	7.3E1	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80008E1	-2.38419E-4	-8.8E1	-1.43051E-4	5.53131E-3	9.3174E-2	1.5783E1	-1.98741E1	-1.99622E1	1.50016E1	2.37741E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.16252E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80007E1	-1.43051E-4	-8.80006E1	-4.76837E-5	5.24521E-3	9.33409E-2	1.57668E1	-1.98338E1	-1.99552E1	1.50118E1	2.37643E-9	2.52585E-3	2.52585E-3	6.31858E-3	2.16186E-2
1.4E1	9.8E1	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80011E1	-5.48363E-4	-8.80005E1	-1.43051E-4	5.03063E-3	9.36985E-2	1.58095E1	-1.98458E1	-1.99576E1	1.50262E1	2.37435E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.16501E-2
1.5E1	5.9E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80009E1	-1.90735E-4	-8.80003E1	2.38419E-5	5.19753E-3	9.34601E-2	1.57952E1	-1.98642E1	-1.99402E1	1.50158E1	2.37745E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.17066E-2
1.6E1	3.29E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80007E1	-1.90735E-4	-8.80004E1	0.0E0	4.98295E-3	9.36985E-2	1.58002E1	-1.98475E1	-1.99392E1	1.50196E1	2.37668E-9	2.51852E-3	2.51852E-3	6.33499E-3	2.15999E-2
1.7E1	7.01E2	2.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80012E1	-4.05312E-4	-8.8E1	-2.14577E-4	5.14984E-3	9.34362E-2	1.56952E1	-1.97587E1	-2.00103E1	1.50315E1					
1.8E1	2.936E3	5.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80007E1	-4.52995E-4	-8.80004E1	-2.38419E-4	5.34058E-3	9.36508E-2	1.57938E1	-1.98765E1	-1.99455E1	1.4989E1	2.37689E-9	2.51458E-3	2.51458E-3	6.31541E-3	2.15948E-2
1.9E1	1.75E3	2.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80006E1	-3.09944E-4	-8.80003E1	-3.09944E-4	5.62668E-3	9.34601E-2	1.58257E1	-1.98825E1	-1.99197E1	1.50058E1	2.37538E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.16067E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.44059E-2	-8.80007E1	-3.8147E-4	-8.80007E1	-1.19209E-4	5.38826E-3	9.3627E-2	1.57971E1	-1.98411E1	-2.00004E1	1.49802E1	2.37538E-9	2.52318E-3	2.52318E-3	6.27461E-3	2.15938E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.44831E-2	-8.80008E1	-2.14577E-4	-8.80004E1	3.09944E-4	5.22137E-3	9.34362E-2	1.58209E1	-1.98885E1	-1.99672E1	1.50154E1	2.3764E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.15148E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.45602E-2	-8.80011E1	-4.76837E-5	-8.80002E1	2.38419E-4	5.00679E-3	9.34362E-2	1.58203E1	-1.98729E1	-1.9972E1	1.49511E1	2.37538E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.16436E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.43285E-2	-8.80009E1	1.19209E-4	-8.80004E1	0.0E0	5.03063E-3	9.34839E-2	1.57891E1	-1.98573E1	-1.99708E1	1.4998E1	2.37435E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.17255E-2