[Scan]
initial_time=2015-12-18T19:17:43
final_time=2015-12-18T19:18:11
ip_count=19
run=1020
dataset=0
scan=25
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.80109E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-7.25985E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.22029E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.06226E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.36735E-8
mult1=-9.00591E-9
mult2=-2.6747E-9
rf_tmon=-6.07457E-3
rf_agc=3.20298E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=6.43849E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66975E0
bslens_imon=2.50079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.96386E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.04803E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53226E1
cs_ef1b_imon=2.83061E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04876E1
cs_ea1_imon=2.59281E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98995E0
lens1_imon=1.31508E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.52214E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=2.92684E-5
olens2_vset=0.0E0
olens2_vmon=1.69277E-3
olens2_imon=1.06223E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.31617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.34647E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25859E0
cs_ionrep_imon=1.17599E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02073E1
cs_anode1_imon=2.94954E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99987E1
olens4_imon=4.21216E-9
tplens_vset=0.0E0
tplens_vmon=-1.57241E0
tplens_imon=-3.55518E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9945E1
iondef3_imon=8.64874E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98464E1
iondef2_imon=9.28583E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98424E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.48651E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2639E0
ionrepsh_imon=1.77202E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.16985E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.11425E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22142E0
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00442E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81206E-1
os_ef2bup_imon=-5.45943E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=3.41842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31309E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.24821E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57969E1
iondef1_imon=4.99961E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49715E1
iondef4_imon=5.28039E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.52547E-8
olens1_vset=0.0E0
olens1_vmon=8.34465E-4
olens1_imon=1.24494E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15177E0
cs_ionaccel_imon=-1.97079E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.50069E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-8.06708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.03123E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.57818E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.14803E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22248E0
defgridb_imon=6.1393E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.41153E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06939E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63074E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30843E1
cs_fil1_imon=9.95074E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62324E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62668E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36988E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.98982E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44856E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22262E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.16125E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09147E-1
res40_imon=-2.70239E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.328E3	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80006E1	-2.86102E-4	-8.80004E1	1.66893E-4	5.65052E-3	9.34601E-2	1.57811E1	-1.9811E1	-1.99561E1	1.50208E1	2.3764E-9	2.51954E-3	2.51954E-3	6.29128E-3	2.16621E-2
2.0E0	2.973E3	3.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80006E1	-4.29153E-4	-8.80002E1	5.24521E-4	5.65052E-3	9.36747E-2	1.58001E1	-1.98594E1	-1.99867E1	1.49829E1	2.37538E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.16313E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80008E1	-4.05312E-4	-8.80001E1	2.38419E-5	5.34058E-3	9.34124E-2	1.57985E1	-1.98476E1	-1.99832E1	1.50201E1	2.37538E-9	2.52066E-3	2.52066E-3	6.33021E-3	2.16053E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80005E1	2.38419E-5	-8.80005E1	-4.76837E-5	5.34058E-3	9.34362E-2	1.57963E1	-1.98639E1	-1.99678E1	1.50154E1	2.3764E-9	2.51525E-3	2.51525E-3	6.33436E-3	2.16436E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80006E1	-7.15256E-5	-8.80002E1	2.86102E-4	5.19753E-3	9.35555E-2	1.57902E1	-1.98446E1	-2.00133E1	1.4998E1	2.37538E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.16436E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80005E1	-3.33786E-4	-8.80001E1	2.38419E-5	5.29289E-3	9.34839E-2	1.57951E1	-1.9814E1	-1.99714E1	1.50242E1	2.37641E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.16125E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80003E1	-3.33786E-4	-8.80001E1	9.53674E-5	5.4121E-3	9.34362E-2	1.58119E1	-1.98543E1	-1.99762E1	1.49824E1	2.37538E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.17255E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80003E1	-1.43051E-4	-8.80001E1	-2.14577E-4	5.19753E-3	9.377E-2	1.58085E1	-1.98358E1	-1.9975E1	1.49962E1	2.37538E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.16125E-2
1.2E1	8.1E1	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80005E1	-1.90735E-4	-8.80001E1	-2.38419E-4	5.43594E-3	9.35793E-2	1.57837E1	-1.98422E1	-1.99486E1	1.50184E1	2.3764E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.15883E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80005E1	-1.66893E-4	-8.79997E1	-1.90735E-4	5.10216E-3	9.36508E-2	1.58065E1	-1.98645E1	-1.99882E1	1.50112E1	2.37641E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.16878E-2
1.4E1	1.26E2	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80006E1	4.76837E-5	-8.79998E1	-2.38419E-5	5.17368E-3	9.38654E-2	1.58085E1	-1.98623E1	-1.99756E1	1.4974E1	2.37538E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.16313E-2
1.5E1	5.6E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80003E1	-2.14577E-4	-8.79998E1	-1.19209E-4	5.07832E-3	9.38177E-2	1.58936E1	-1.99306E1	-1.99426E1	1.5019E1	2.37538E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.16067E-2
1.6E1	3.16E2	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80002E1	-1.43051E-4	-8.80001E1	1.19209E-4	5.29289E-3	9.37223E-2	1.58136E1	-1.98392E1	-1.99775E1	1.5001E1	2.37641E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.17066E-2
1.7E1	7.06E2	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.8E1	-1.90735E-4	-8.80001E1	2.86102E-4	5.24521E-3	9.38654E-2	1.58061E1	-1.98305E1	-1.99667E1	1.50262E1	2.37641E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.16125E-2
1.8E1	2.949E3	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80004E1	4.76837E-5	-8.80002E1	2.86102E-4	5.24521E-3	9.39369E-2	1.57909E1	-1.98458E1	-1.9966E1	1.50208E1	2.37641E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.16878E-2
1.9E1	1.719E3	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80006E1	-1.90735E-4	-8.80006E1	4.05312E-4	5.14984E-3	9.35078E-2	1.57885E1	-1.9835E1	-1.99852E1	1.50178E1	2.37641E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.16313E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80004E1	1.19209E-4	-8.80006E1	3.33786E-4	5.29289E-3	9.37462E-2	1.57939E1	-1.98567E1	-2.00003E1	1.50076E1	2.37538E-9	2.51334E-3	2.51334E-3	6.3514E-3	2.18011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80007E1	-4.76837E-5	-8.80005E1	3.33786E-4	5.34058E-3	9.37939E-2	1.58203E1	-1.98675E1	-1.996E1	1.50086E1	2.37538E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.17255E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80008E1	-1.66893E-4	-8.80005E1	7.15256E-5	5.43594E-3	9.38892E-2	1.58125E1	-1.98489E1	-1.9963E1	1.49912E1	2.37641E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.15563E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80007E1	-2.86102E-4	-8.80006E1	-4.76837E-5	5.22137E-3	9.37462E-2	1.57969E1	-1.98464E1	-1.9945E1	1.49715E1	2.37538E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.16125E-2