[Scan]
initial_time=2015-12-18T19:18:22
final_time=2015-12-18T19:18:50
ip_count=19
run=1020
dataset=0
scan=26
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.80105E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-6.75523E-10
ql2_vset=
ql2_vmon=-2.38419E-5
ql2_imon=1.18759E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.07033E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.35944E-8
mult1=-9.13836E-9
mult2=-2.69067E-9
rf_tmon=-5.52782E-3
rf_agc=3.29611E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=6.47497E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66502E0
bslens_imon=2.54697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20014E1
lens5a_imon=1.96586E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.04912E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54202E1
cs_ef1b_imon=2.84045E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04977E1
cs_ea1_imon=2.58241E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04453E0
lens1_imon=1.50981E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.96306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03717E1
cs_ea2_imon=1.52642E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84562E1
cs_ef1a_imon=2.92706E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=1.05879E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11199E1
os_restr1_imon=4.30427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15257E1
os_ea1_imon=2.36923E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.637E1
os_ef1bup_imon=3.08372E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23721E0
cs_ionrep_imon=1.19229E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01788E1
cs_anode1_imon=2.92316E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99986E1
olens4_imon=4.23356E-9
tplens_vset=0.0E0
tplens_vmon=-1.56537E0
tplens_imon=-4.30484E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99924E1
iondef3_imon=8.74761E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98446E1
iondef2_imon=9.42097E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98355E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.60465E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27391E0
ionrepsh_imon=1.75045E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33843E1
lens5b_imon=2.17393E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74907E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2521E0
os_ea2_imon=-7.17698E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.0047E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71128E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05131E0
os_ef2alow_imon=-2.67536E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-5.44862E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11042E1
os_restr2_imon=3.40418E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.30311E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01918E1
cs_anode2_imon=2.23812E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58047E1
iondef1_imon=5.03935E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50334E1
iondef4_imon=5.14488E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.52051E-8
olens1_vset=0.0E0
olens1_vmon=9.29832E-4
olens1_imon=1.23951E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16366E0
cs_ionaccel_imon=-1.8515E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56497E1
einzel_imon=7.64892E-6
window_vset=0.0E0
window_vmon=1.70731E-1
window_imon=-1.21576E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39078E-4
mask2_vset=0.0E0
mask2_vmon=-1.85895E1
mask2_imon=-7.32467E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92709E3
multa_neg_imon=7.38494E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93667E3
defgrida_imon=6.24565E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50083E3
multb_neg_imon=6.92859E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53858E0
defgridb_imon=6.00312E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.44204E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06113E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6297E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30844E1
cs_fil1_imon=9.95977E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62318E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63018E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.59574E-2
os_fil2_imon=-2.65876E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.31017E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38275E-1
cs_fil2_imon=-2.55064E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.68612E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22338E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34698E-3
inlet_lpb_pmon=2.17476E-2
chamber_ion_pmon=2.37591E-9
chamber_cvt_pmon=2.52046E-3
foreline_cvt_pmon=2.52046E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.16355E-1
res40_imon=-2.69807E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=385
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.283E3	1.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80007E1	-4.76837E-5	-8.80003E1	1.19209E-4	5.24521E-3	9.36508E-2	1.58044E1	-1.98306E1	-1.99438E1	1.50118E1	2.37721E-9	2.51861E-3	2.51861E-3	6.33171E-3	2.18095E-2
2.0E0	2.954E3	3.0E0	3.16E2	1.6E2	-7.286E-2	-8.80007E1	-3.57628E-4	-8.80002E1	3.09944E-4	5.26905E-3	9.35793E-2	1.57827E1	-1.98682E1	-1.99661E1	1.49984E1	2.37538E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.16878E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80006E1	-2.14577E-4	-8.80001E1	0.0E0	5.22137E-3	9.32693E-2	1.57792E1	-1.98753E1	-1.99842E1	1.503E1	2.37766E-9	2.5195E-3	2.5195E-3	6.30136E-3	2.15418E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80006E1	-2.38419E-4	-8.80003E1	2.38419E-4	5.60284E-3	9.3627E-2	1.58144E1	-1.98682E1	-1.99744E1	1.49831E1	2.37639E-9	2.52523E-3	2.52523E-3	6.30207E-3	2.1613E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80007E1	-1.90735E-4	-8.80001E1	2.38419E-5	5.67436E-3	9.35078E-2	1.58095E1	-1.98555E1	-1.99834E1	1.5022E1					
6.0E0	2.0E0	1.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80006E1	-9.53674E-5	-8.80004E1	2.14577E-4	5.14984E-3	9.36031E-2	1.57801E1	-1.98513E1	-1.9981E1	1.49974E1	2.37641E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.18011E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80005E1	-2.6226E-4	-8.80001E1	2.38419E-5	5.22137E-3	9.34839E-2	1.57961E1	-1.98399E1	-1.99543E1	1.504E1	2.37538E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.16501E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44831E-2	-8.80003E1	-4.76837E-4	-8.80001E1	4.76837E-5	5.14984E-3	9.36747E-2	1.57767E1	-1.98747E1	-1.99321E1	1.50197E1	2.37638E-9	2.51919E-3	2.51919E-3	6.33388E-3	2.16192E-2
1.2E1	6.4E1	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80005E1	-7.86781E-4	-8.80001E1	1.43051E-4	5.26905E-3	9.34839E-2	1.57921E1	-1.98645E1	-1.99582E1	1.50058E1	2.37538E-9	2.5257E-3	2.5257E-3	6.28423E-3	2.16512E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80008E1	-1.19209E-4	-8.80001E1	-7.15256E-5	5.24521E-3	9.31978E-2	1.5805E1	-1.98458E1	-1.99449E1	1.50106E1	2.37745E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.1839E-2
1.4E1	1.08E2	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80007E1	-1.90735E-4	-8.80005E1	1.43051E-4	5.50747E-3	9.3317E-2	1.57837E1	-1.98392E1	-1.99582E1	1.50161E1	2.37741E-9	2.52923E-3	2.52923E-3	6.32356E-3	2.17176E-2
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.45602E-2	-8.80007E1	-2.6226E-4	-8.80005E1	2.38419E-5	5.50747E-3	9.3317E-2	1.58227E1	-1.98771E1	-1.99602E1	1.49932E1	2.3764E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.16252E-2
1.6E1	3.11E2	0.0E0	6.47E2	4.41E2	-7.46377E-2	-8.80004E1	-9.53674E-5	-8.80004E1	1.19209E-4	5.19753E-3	9.33409E-2	1.57741E1	-1.98663E1	-1.99492E1	1.50731E1	2.37745E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.16125E-2
1.7E1	7.21E2	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.80007E1	-2.38419E-4	-8.80004E1	1.66893E-4	5.19753E-3	9.33886E-2	1.58047E1	-1.98707E1	-1.99552E1	1.50225E1	2.37538E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.15883E-2
1.8E1	2.809E3	1.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80006E1	-1.43051E-4	-8.8E1	-1.19209E-4	5.05447E-3	9.3627E-2	1.5824E1	-1.98477E1	-1.99977E1	1.50047E1	2.37538E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.16991E-2
1.9E1	1.851E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80009E1	-3.57628E-4	-8.80004E1	9.53674E-5	5.26905E-3	9.33647E-2	1.58101E1	-1.98657E1	-1.99492E1	1.50045E1	2.37643E-9	2.52585E-3	2.52585E-3	6.30182E-3	2.16952E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80007E1	-3.8147E-4	-8.80002E1	4.76837E-5	5.26905E-3	9.33647E-2	1.58179E1	-1.98564E1	-1.99195E1	1.49884E1	2.3764E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.16067E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80007E1	-3.33786E-4	-8.80001E1	-9.53674E-5	5.14984E-3	9.36031E-2	1.58227E1	-1.97521E1	-1.99065E1	1.5031E1	2.37538E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.17255E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80005E1	-1.19209E-4	-8.80002E1	9.53674E-5	5.53131E-3	9.34124E-2	1.58133E1	-1.9856E1	-1.99689E1	1.50031E1	2.3764E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.17918E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80005E1	-2.38419E-5	-8.80002E1	9.53674E-5	5.17368E-3	9.34839E-2	1.58047E1	-1.98446E1	-1.99924E1	1.50334E1	2.37591E-9	2.52046E-3	2.52046E-3	6.34698E-3	2.17476E-2