[Scan]
initial_time=2015-12-18T19:19:00
final_time=2015-12-18T19:19:29
ip_count=19
run=1020
dataset=0
scan=27
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.80402E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-7.0169E-10
ql2_vset=
ql2_vmon=-2.38419E-5
ql2_imon=1.21561E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.02445E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.36796E-8
mult1=-9.13177E-9
mult2=-2.74633E-9
rf_tmon=-5.397E-3
rf_agc=3.23367E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=6.30689E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64543E0
bslens_imon=2.57638E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19776E1
lens5a_imon=1.98045E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.85394E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=2.57905E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01801E0
lens1_imon=1.53352E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64452E1
os_ef1alow_imon=2.96306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03887E1
cs_ea2_imon=1.52263E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=2.92344E-5
olens2_vset=0.0E0
olens2_vmon=1.71661E-3
olens2_imon=1.057E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11378E1
os_restr1_imon=4.33439E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15647E1
os_ea1_imon=2.36144E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.08052E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26311E0
cs_ionrep_imon=1.17431E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93264E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02128E1
cs_anode1_imon=2.94047E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99985E1
olens4_imon=4.1612E-9
tplens_vset=0.0E0
tplens_vmon=-1.60493E0
tplens_imon=-3.1235E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99934E1
iondef3_imon=8.48593E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98312E1
iondef2_imon=9.56702E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98196E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=9.05168E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26948E0
ionrepsh_imon=1.75588E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.1699E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74322E1
cs_ef2b_imon=3.1111E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22313E0
os_ea2_imon=-8.09447E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00585E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.712E1
cs_ef2a_imon=3.16914E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07425E0
os_ef2alow_imon=-2.51898E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54949E-1
os_ef2bup_imon=-5.47989E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1117E1
os_restr2_imon=3.40963E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.29476E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.26071E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58075E1
iondef1_imon=4.88458E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49956E1
iondef4_imon=5.15091E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.51826E-8
olens1_vset=0.0E0
olens1_vmon=5.48363E-4
olens1_imon=1.24256E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12725E0
cs_ionaccel_imon=-1.88648E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47216E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56527E1
einzel_imon=7.51755E-6
window_vset=0.0E0
window_vmon=1.7772E-1
window_imon=-9.13411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.38796E-4
mask2_vset=0.0E0
mask2_vmon=-1.86454E1
mask2_imon=-8.09154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92689E3
multa_neg_imon=7.73159E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.21596E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=6.81039E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2876E0
defgridb_imon=5.98306E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33312E1
os_fil1_imon=9.39043E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0635E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62842E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.96344E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61601E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62309E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24506E-2
os_fil2_imon=-2.8024E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77914E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.35561E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38516E-1
cs_fil2_imon=-2.14211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.68592E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22308E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.16878E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.02647E-1
res40_imon=-2.42862E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.205E3	1.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80008E1	-2.6226E-4	-8.80003E1	2.38419E-5	5.24521E-3	9.35078E-2	1.58056E1	-1.98679E1	-2.00026E1	1.501E1	2.37538E-9	2.52236E-3	2.52236E-3	6.3074E-3	2.16918E-2
2.0E0	2.969E3	3.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80009E1	-3.57628E-4	-8.80005E1	0.0E0	5.29289E-3	9.37223E-2	1.58029E1	-1.98993E1	-1.99702E1	1.4998E1	2.37643E-9	2.51581E-3	2.51581E-3	6.33538E-3	2.17529E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80011E1	-1.66893E-4	-8.80001E1	9.53674E-5	5.60284E-3	9.35316E-2	1.57926E1	-1.98523E1	-1.99797E1	1.50248E1	2.37538E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.16878E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.8001E1	-2.86102E-4	-8.80001E1	-2.38419E-5	5.19753E-3	9.33409E-2	1.57531E1	-1.98824E1	-1.99543E1	1.4992E1	2.37638E-9	2.51393E-3	2.51393E-3	6.32328E-3	2.1565E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80009E1	-2.14577E-4	-8.8E1	4.76837E-5	5.45979E-3	9.35793E-2	1.5762E1	-1.98669E1	-1.99444E1	1.50226E1	2.37641E-9	2.52977E-3	2.52977E-3	6.29645E-3	2.15938E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80007E1	-7.15256E-5	-8.80002E1	2.38419E-5	5.74589E-3	9.34839E-2	1.57855E1	-1.98873E1	-1.99552E1	1.50274E1	2.37641E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.16125E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80008E1	-2.6226E-4	-8.80006E1	7.15256E-5	5.45979E-3	9.32217E-2	1.57793E1	-1.98662E1	-1.99588E1	1.49778E1	2.37538E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.16313E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80007E1	2.38419E-5	-8.80006E1	9.53674E-5	5.48363E-3	9.33647E-2	1.58107E1	-1.98741E1	-1.99702E1	1.49932E1	2.37538E-9	2.51861E-3	2.51861E-3	6.32684E-3	2.16424E-2
1.2E1	6.5E1	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80009E1	0.0E0	-8.80004E1	2.38419E-5	5.48363E-3	9.3174E-2	1.57825E1	-1.98434E1	-1.99588E1	1.50226E1	2.37538E-9	2.52647E-3	2.52647E-3	6.29645E-3	2.16689E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80006E1	-9.53674E-5	-8.80006E1	1.90735E-4	5.45979E-3	9.32217E-2	1.57934E1	-1.98535E1	-1.99883E1	1.49951E1	2.37538E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.15189E-2
1.4E1	1.1E2	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80008E1	-1.43051E-4	-8.80003E1	3.8147E-4	5.26905E-3	9.32693E-2	1.58139E1	-1.98714E1	-1.99733E1	1.50113E1	2.37633E-9	2.52224E-3	2.52224E-3	6.3074E-3	2.16715E-2
1.5E1	6.1E1	2.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80008E1	0.0E0	-8.80004E1	3.8147E-4	5.29289E-3	9.3174E-2	1.58186E1	-1.98504E1	-1.99854E1	1.4992E1	2.37538E-9	2.5207E-3	2.5207E-3	6.33161E-3	2.16866E-2
1.6E1	2.81E2	1.0E0	6.47E2	4.41E2	-7.286E-2	-8.80008E1	-4.76837E-5	-8.80004E1	1.90735E-4	5.14984E-3	9.35078E-2	1.57939E1	-1.98489E1	-1.99888E1	1.50076E1	2.37538E-9	2.51814E-3	2.51814E-3	6.30212E-3	2.16374E-2
1.7E1	6.89E2	1.0E0	6.87E2	4.7E2	-7.286E-2	-8.80007E1	-2.14577E-4	-8.80004E1	-7.15256E-5	4.91142E-3	9.3174E-2	1.57987E1	-1.98326E1	-1.99564E1	1.5019E1	2.37538E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.16125E-2
1.8E1	3.001E3	5.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80008E1	-1.19209E-4	-8.80004E1	1.43051E-4	4.86374E-3	9.32693E-2	1.58038E1	-1.98552E1	-1.9972E1	1.50082E1	2.3764E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.15331E-2
1.9E1	1.832E3	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80006E1	0.0E0	-8.80001E1	2.38419E-5	5.26905E-3	9.31978E-2	1.57891E1	-1.98699E1	-1.9969E1	1.50088E1	2.37641E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.16878E-2
2.0E1	2.0E1	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80008E1	-2.6226E-4	-8.80002E1	-2.38419E-5	5.126E-3	9.32217E-2	1.57926E1	-1.98346E1	-1.99891E1	1.50082E1	2.37741E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.16067E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.16233E-2	-8.80009E1	0.0E0	-8.80001E1	-4.76837E-5	5.07832E-3	9.35793E-2	1.57945E1	-1.98603E1	-1.9957E1	1.499E1	2.37745E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.16313E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.8001E1	-9.53674E-5	-8.80001E1	2.86102E-4	5.17368E-3	9.36747E-2	1.57861E1	-1.98957E1	-1.9987E1	1.50053E1	2.37538E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.16689E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80008E1	-2.38419E-5	-8.80005E1	4.05312E-4	5.24521E-3	9.34362E-2	1.58075E1	-1.98312E1	-1.99934E1	1.49956E1	2.37538E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.16878E-2