[Scan]
initial_time=2015-12-18T19:19:39
final_time=2015-12-18T19:20:07
ip_count=19
run=1020
dataset=0
scan=28
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.76462E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-6.64628E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.19157E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.96587E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.36603E-8
mult1=-9.15653E-9
mult2=-2.5312E-9
rf_tmon=-3.94317E-3
rf_agc=3.35982E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=6.19495E-10
bslens_vset=-6.2E0
bslens_vmon=-6.7094E0
bslens_imon=2.4981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20085E1
lens5a_imon=1.98235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53989E1
cs_ef1b_imon=2.84034E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.0206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05096E1
cs_ea1_imon=2.57176E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98187E0
lens1_imon=1.30846E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.52524E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84118E1
cs_ef1a_imon=2.91675E-5
olens2_vset=0.0E0
olens2_vmon=1.28746E-3
olens2_imon=1.05722E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.31941E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15522E1
os_ea1_imon=2.35618E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.07064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25871E0
cs_ionrep_imon=1.18493E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93528E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01605E1
cs_anode1_imon=2.92468E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99991E1
olens4_imon=4.26338E-9
tplens_vset=0.0E0
tplens_vmon=-1.60058E0
tplens_imon=-4.79594E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99726E1
iondef3_imon=8.58326E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98293E1
iondef2_imon=9.4881E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.58939E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=1.74514E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33898E1
lens5b_imon=2.19108E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23347E0
os_ea2_imon=-5.80532E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00479E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04134E0
os_ef2alow_imon=-2.78889E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15444E-1
os_ef2bup_imon=-5.47745E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=3.39391E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29604E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.22334E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57849E1
iondef1_imon=5.18379E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50149E1
iondef4_imon=5.21552E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.52036E-8
olens1_vset=0.0E0
olens1_vmon=1.04904E-3
olens1_imon=1.23641E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15237E0
cs_ionaccel_imon=-2.03566E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47151E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56465E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=1.71692E-1
window_imon=-1.14548E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.38868E-4
mask2_vset=0.0E0
mask2_vmon=-1.86212E1
mask2_imon=-6.91381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.07278E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.62577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=6.91417E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32337E0
defgridb_imon=6.20038E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33312E1
os_fil1_imon=9.4036E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05942E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62867E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30883E1
cs_fil1_imon=9.93362E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62378E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.619E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42194E-2
os_fil2_imon=-2.96029E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.71285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.33747E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38068E-1
cs_fil2_imon=-2.79811E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.71925E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2234E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.16689E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.98645E-1
res40_imon=-2.60509E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.26E3	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80011E1	-4.76837E-4	-8.80005E1	3.8147E-4	5.24521E-3	9.33647E-2	1.58041E1	-1.98452E1	-1.99678E1	1.50118E1	2.37538E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.16313E-2
2.0E0	3.158E3	1.0E0	3.16E2	1.6E2	-7.29374E-2	-8.8001E1	1.19209E-4	-8.80005E1	5.72205E-4	4.76837E-3	9.33886E-2	1.57689E1	-1.98728E1	-1.99769E1	1.50292E1	2.37538E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.17066E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80007E1	-1.66893E-4	-8.80006E1	4.76837E-5	5.22137E-3	9.35078E-2	1.58297E1	-1.98328E1	-1.99956E1	1.50431E1	2.37745E-9	2.52867E-3	2.52867E-3	6.3074E-3	2.16878E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80007E1	2.14577E-4	-8.80003E1	0.0E0	5.126E-3	9.33886E-2	1.57637E1	-1.98682E1	-1.99567E1	1.50178E1	2.37538E-9	2.52815E-3	2.52815E-3	6.3074E-3	2.17732E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80006E1	-2.38419E-4	-8.80003E1	2.86102E-4	4.86374E-3	9.35078E-2	1.58073E1	-1.98605E1	-1.99974E1	1.49974E1	2.37538E-9	2.52923E-3	2.52923E-3	6.31817E-3	2.17732E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80008E1	9.53674E-5	-8.80003E1	1.43051E-4	4.98295E-3	9.39608E-2	1.58071E1	-1.98603E1	-1.99246E1	1.50244E1	2.37538E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.17822E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80007E1	4.76837E-5	-8.80002E1	4.29153E-4	4.93526E-3	9.39369E-2	1.58119E1	-1.98741E1	-1.99834E1	1.5001E1	2.37538E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.15563E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80007E1	1.43051E-4	-8.80005E1	2.38419E-4	5.29289E-3	9.39369E-2	1.5824E1	-1.9863E1	-1.99512E1	1.50443E1	2.37848E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.16501E-2
1.2E1	8.4E1	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80007E1	9.53674E-5	-8.80004E1	1.43051E-4	4.98295E-3	9.36985E-2	1.57826E1	-1.98608E1	-1.99935E1	1.50046E1	2.37848E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.17066E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80008E1	-2.86102E-4	-8.80005E1	0.0E0	5.05447E-3	9.37939E-2	1.58295E1	-1.98661E1	-1.99445E1	1.49932E1	2.37538E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.17918E-2
1.4E1	1.07E2	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80009E1	-1.43051E-4	-8.80003E1	1.43051E-4	5.34058E-3	9.36985E-2	1.58014E1	-1.98558E1	-1.99738E1	1.50334E1	2.37538E-9	2.5225E-3	2.5225E-3	6.32978E-3	2.16952E-2
1.5E1	6.0E1	0.0E0	6.06E2	4.11E2	-7.13915E-2	-8.80008E1	-1.19209E-4	-8.80005E1	2.38419E-4	5.17368E-3	9.37462E-2	1.57987E1	-1.98609E1	-1.99546E1	1.50039E1	2.3764E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.16991E-2
1.6E1	3.55E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80008E1	-3.33786E-4	-8.80001E1	-4.76837E-5	5.24521E-3	9.36747E-2	1.58215E1	-1.987E1	-2.00151E1	1.49932E1	2.3764E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.17918E-2
1.7E1	6.99E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80008E1	-2.86102E-4	-8.80002E1	4.76837E-5	5.17368E-3	9.34601E-2	1.58383E1	-1.98639E1	-1.993E1	1.50112E1	2.37538E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.16689E-2
1.8E1	2.929E3	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80008E1	-1.66893E-4	-8.80005E1	0.0E0	5.05447E-3	9.3317E-2	1.58734E1	-1.98989E1	-1.98853E1	1.49752E1	2.37741E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.16806E-2
1.9E1	1.791E3	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80007E1	-2.86102E-4	-8.80005E1	3.33786E-4	5.38826E-3	9.36031E-2	1.57672E1	-1.98564E1	-1.99897E1	1.50277E1	2.37538E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.15563E-2
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80006E1	-9.53674E-5	-8.80006E1	2.38419E-4	5.43594E-3	9.36031E-2	1.57989E1	-1.98484E1	-1.998E1	1.4977E1	2.37538E-9	2.51603E-3	2.51603E-3	6.32858E-3	2.16011E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80004E1	-3.09944E-4	-8.80006E1	3.33786E-4	5.31673E-3	9.34601E-2	1.58081E1	-1.98869E1	-1.99755E1	1.49914E1	2.37538E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.17337E-2
2.2E1	1.5E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80001E1	0.0E0	-8.80006E1	2.14577E-4	5.34058E-3	9.37223E-2	1.58468E1	-1.98879E1	-1.99576E1	1.49998E1	2.37538E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.17361E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80004E1	-4.05312E-4	-8.80004E1	3.57628E-4	5.07832E-3	9.36031E-2	1.57849E1	-1.98293E1	-1.99726E1	1.50149E1	2.37538E-9	2.52428E-3	2.52428E-3	6.29098E-3	2.16689E-2