[Scan]
initial_time=2015-12-18T19:20:17
final_time=2015-12-18T19:20:46
ip_count=19
run=1020
dataset=0
scan=29
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.80571E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-6.78396E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.2087E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.94898E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.36871E-8
mult1=-8.52429E-9
mult2=-2.65673E-9
rf_tmon=-5.43169E-3
rf_agc=3.27508E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=6.42478E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66503E0
bslens_imon=2.3946E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20196E1
lens5a_imon=1.97165E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05146E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53607E1
cs_ef1b_imon=2.82462E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05537E1
cs_ea1_imon=2.57936E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03242E0
lens1_imon=1.43896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64859E1
os_ef1alow_imon=2.97146E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.51683E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84674E1
cs_ef1a_imon=2.95412E-5
olens2_vset=0.0E0
olens2_vmon=1.33514E-3
olens2_imon=1.0562E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11383E1
os_restr1_imon=4.31359E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15323E1
os_ea1_imon=2.37656E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63615E1
os_ef1bup_imon=3.08222E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26331E0
cs_ionrep_imon=1.19298E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0211E1
cs_anode1_imon=2.91556E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99986E1
olens4_imon=4.20169E-9
tplens_vset=0.0E0
tplens_vmon=-1.56239E0
tplens_imon=-3.20124E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99894E1
iondef3_imon=8.67705E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98398E1
iondef2_imon=9.35662E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.48699E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27038E0
ionrepsh_imon=1.74229E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33433E1
lens5b_imon=2.18047E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74696E1
cs_ef2b_imon=3.11831E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21847E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71181E1
cs_ef2a_imon=3.17952E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02714E0
os_ef2alow_imon=-2.63733E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89364E-1
os_ef2bup_imon=-5.39377E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1087E1
os_restr2_imon=3.40528E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.29079E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.24467E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57831E1
iondef1_imon=5.14472E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49818E1
iondef4_imon=5.13309E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.51852E-8
olens1_vset=0.0E0
olens1_vmon=9.29832E-4
olens1_imon=1.2388E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13899E0
cs_ionaccel_imon=-1.86241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47127E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56045E1
einzel_imon=7.50384E-6
window_vset=0.0E0
window_vmon=1.43505E-1
window_imon=-1.03087E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-8.22107E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.35685E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.59234E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.03831E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30811E0
defgridb_imon=6.34812E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.40368E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08102E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62529E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30865E1
cs_fil1_imon=9.95066E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62861E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62361E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47119E-2
os_fil2_imon=-2.61453E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80262E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.48085E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.39122E-1
cs_fil2_imon=-2.61453E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13032E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22137E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.16689E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18517E-1
res40_imon=-2.5984E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.289E3	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80006E1	-1.43051E-4	-8.80008E1	2.38419E-5	5.126E-3	9.37223E-2	1.5812E1	-1.98387E1	-1.99903E1	1.50112E1	2.37538E-9	2.53246E-3	2.53246E-3	6.31817E-3	2.16621E-2
2.0E0	2.983E3	3.0E0	3.16E2	1.6E2	-7.286E-2	-8.80007E1	-7.15256E-5	-8.80004E1	2.14577E-4	5.45979E-3	9.34601E-2	1.57756E1	-1.9841E1	-1.99714E1	1.50298E1	2.3764E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.16991E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80005E1	-1.43051E-4	-8.80006E1	2.6226E-4	5.29289E-3	9.3627E-2	1.57945E1	-1.98507E1	-1.99588E1	1.50154E1	2.37538E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.17255E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80005E1	9.53674E-5	-8.80002E1	4.05312E-4	5.22137E-3	9.37223E-2	1.58126E1	-1.98747E1	-1.99496E1	1.49865E1	2.37641E-9	2.51552E-3	2.51552E-3	6.29645E-3	2.17066E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80005E1	4.76837E-5	-8.80004E1	4.05312E-4	5.29289E-3	9.36985E-2	1.57933E1	-1.98452E1	-1.99492E1	1.50315E1	2.37538E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.16501E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80008E1	-7.15256E-5	-8.80007E1	4.76837E-4	5.126E-3	9.36031E-2	1.57932E1	-1.98717E1	-1.99703E1	1.50109E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.16313E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80007E1	7.15256E-5	-8.80003E1	3.57628E-4	5.45979E-3	9.33647E-2	1.58122E1	-1.9851E1	-1.99581E1	1.49999E1	2.37538E-9	2.52448E-3	2.52448E-3	6.32858E-3	2.171E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80007E1	-2.6226E-4	-8.80007E1	4.52995E-4	5.14984E-3	9.34124E-2	1.58097E1	-1.9841E1	-1.99764E1	1.50247E1	2.37737E-9	2.51709E-3	2.51709E-3	6.31798E-3	2.171E-2
1.2E1	7.8E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80006E1	1.19209E-4	-8.80006E1	1.90735E-4	5.36442E-3	9.38416E-2	1.57789E1	-1.98591E1	-1.99864E1	1.50046E1	2.37757E-9	2.5199E-3	2.5199E-3	6.31321E-3	2.17111E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80005E1	2.38419E-4	-8.80009E1	2.38419E-5	5.48363E-3	9.33647E-2	1.57789E1	-1.98537E1	-1.99846E1	1.504E1	2.37538E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.16501E-2
1.4E1	1.0E2	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80008E1	-7.15256E-5	-8.80008E1	-4.76837E-5	5.03063E-3	9.36985E-2	1.58209E1	-1.98807E1	-1.99961E1	1.49956E1	2.37848E-9	2.50898E-3	2.50898E-3	6.32386E-3	2.16125E-2
1.5E1	5.0E1	0.0E0	6.06E2	4.11E2	-7.13915E-2	-8.80009E1	-2.14577E-4	-8.80004E1	7.15256E-5	4.98295E-3	9.35555E-2	1.57819E1	-1.98398E1	-1.99708E1	1.50118E1	2.37641E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.17066E-2
1.6E1	3.42E2	1.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80007E1	-4.05312E-4	-8.80007E1	-9.53674E-5	5.24521E-3	9.33647E-2	1.58209E1	-1.98657E1	-1.99756E1	1.50431E1	2.37538E-9	2.51847E-3	2.51847E-3	6.35059E-3	2.15883E-2
1.7E1	6.7E2	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80009E1	-4.76837E-4	-8.80009E1	2.38419E-5	5.43594E-3	9.36031E-2	1.57945E1	-1.98717E1	-1.99816E1	1.50082E1	2.37538E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.16125E-2
1.8E1	2.941E3	0.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80006E1	-1.66893E-4	-8.80006E1	-2.14577E-4	5.05447E-3	9.37223E-2	1.58173E1	-1.98483E1	-1.9969E1	1.49866E1	2.37749E-9	2.52362E-3	2.52362E-3	6.32978E-3	2.16186E-2
1.9E1	1.746E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80006E1	-3.57628E-4	-8.80007E1	7.15256E-5	5.24521E-3	9.36031E-2	1.58191E1	-1.98741E1	-1.9993E1	1.5037E1	2.37538E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.16067E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80005E1	-4.05312E-4	-8.80007E1	2.86102E-4	5.17368E-3	9.35316E-2	1.58104E1	-1.98272E1	-1.99761E1	1.50097E1	2.37641E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.16501E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80006E1	-4.29153E-4	-8.80003E1	2.38419E-5	5.03063E-3	9.37939E-2	1.58014E1	-1.99108E1	-1.99659E1	1.50322E1	2.37538E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.14964E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80007E1	-2.86102E-4	-8.80004E1	7.15256E-5	5.53131E-3	9.36747E-2	1.57795E1	-1.98609E1	-1.99768E1	1.50322E1	2.37538E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.16501E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80007E1	-1.90735E-4	-8.80005E1	2.38419E-5	5.6982E-3	9.35316E-2	1.57831E1	-1.98398E1	-1.99894E1	1.49818E1	2.37538E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.16689E-2