[Scan]
initial_time=2015-12-18T19:20:56
final_time=2015-12-18T19:21:24
ip_count=19
run=1020
dataset=0
scan=30
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.86535E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-6.65343E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.19802E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.08026E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.36784E-8
mult1=-9.81854E-9
mult2=-2.71346E-9
rf_tmon=-4.54487E-3
rf_agc=3.35805E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=6.22523E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61831E0
bslens_imon=2.31533E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19915E1
lens5a_imon=1.98391E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.04883E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54169E1
cs_ef1b_imon=2.82413E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=2.56424E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05553E0
lens1_imon=1.32363E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03929E1
cs_ea2_imon=1.52515E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.94594E-5
olens2_vset=0.0E0
olens2_vmon=1.33514E-3
olens2_imon=1.05255E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.30752E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.36369E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24475E0
cs_ionrep_imon=1.1821E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.93188E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99989E1
olens4_imon=4.20271E-9
tplens_vset=0.0E0
tplens_vmon=-1.61021E0
tplens_imon=-5.7406E-8
iondef3_vset=-2.0E1
iondef3_vmon=-1.99874E1
iondef3_imon=8.44552E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98487E1
iondef2_imon=9.43355E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.98114E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.72827E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29556E0
ionrepsh_imon=1.77822E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.1738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.10596E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22945E0
os_ea2_imon=-7.58944E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00604E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04255E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95021E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.40364E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.30332E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02007E1
cs_anode2_imon=2.24533E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57932E1
iondef1_imon=4.94885E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49986E1
iondef4_imon=5.25877E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.5184E-8
olens1_vset=0.0E0
olens1_vmon=8.82149E-4
olens1_imon=1.23726E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.51871E-1
window_imon=-1.15629E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82666E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.86086E1
mask2_imon=-7.52649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.47953E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.57965E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.01674E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32388E0
defgridb_imon=6.32989E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33283E1
os_fil1_imon=9.41021E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05954E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6245E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30875E1
cs_fil1_imon=9.94972E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62065E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61893E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43654E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.56691E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.90023E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22095E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.16878E-2
chamber_ion_pmon=2.37951E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.65609E-1
res40_imon=-2.65915E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.254E3	0.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80008E1	9.53674E-5	-8.80003E1	2.86102E-4	5.29289E-3	9.35793E-2	1.58005E1	-1.98627E1	-1.99684E1	1.49998E1	2.37643E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.15422E-2
2.0E0	2.94E3	2.0E0	3.16E2	1.6E2	-7.40967E-2	-8.80008E1	-4.76837E-5	-8.80003E1	7.15256E-5	5.126E-3	9.3627E-2	1.57855E1	-1.98507E1	-1.99762E1	1.50292E1	2.37538E-9	2.52395E-3	2.52395E-3	6.32957E-3	2.15966E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80008E1	-1.43051E-4	-8.80005E1	1.19209E-4	4.98295E-3	9.3627E-2	1.58103E1	-1.98482E1	-1.99543E1	1.5004E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80008E1	-2.86102E-4	-8.79999E1	-1.66893E-4	5.31673E-3	9.37939E-2	1.5769E1	-1.9834E1	-1.99933E1	1.50094E1	2.37638E-9	2.52342E-3	2.52342E-3	6.33388E-3	2.15831E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80007E1	-4.05312E-4	-8.80003E1	-7.15256E-5	5.34058E-3	9.35078E-2	1.58269E1	-1.98026E1	-1.99702E1	1.49932E1	2.37538E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.17444E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80009E1	-2.38419E-4	-8.80002E1	-9.53674E-5	4.95911E-3	9.32217E-2	1.58311E1	-1.98567E1	-1.99768E1	1.50292E1	2.37641E-9	2.52538E-3	2.52538E-3	6.34037E-3	2.16878E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80008E1	-2.14577E-4	-8.79998E1	-1.90735E-4	5.10216E-3	9.35793E-2	1.57903E1	-1.98885E1	-1.99816E1	1.50112E1	2.37641E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.16125E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.8001E1	-2.38419E-5	-8.79997E1	-1.43051E-4	5.34058E-3	9.37462E-2	1.57741E1	-1.98585E1	-1.9957E1	1.5013E1	2.37641E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.17066E-2
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80008E1	-7.15256E-5	-8.8E1	-1.19209E-4	5.07832E-3	9.36747E-2	1.58014E1	-1.98282E1	-1.99396E1	1.50142E1	2.37641E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.17255E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.8001E1	-2.38419E-4	-8.79999E1	9.53674E-5	5.14984E-3	9.34124E-2	1.58209E1	-1.98818E1	-1.99732E1	1.50298E1	2.37538E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.17255E-2
1.4E1	1.21E2	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80008E1	2.86102E-4	-8.79999E1	-1.66893E-4	5.126E-3	9.34839E-2	1.57843E1	-1.9867E1	-1.99803E1	1.49877E1	2.37538E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.16125E-2
1.5E1	5.3E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80007E1	-2.38419E-5	-8.8E1	1.19209E-4	5.29289E-3	9.34124E-2	1.57933E1	-1.98368E1	-1.99612E1	1.50455E1	2.3764E-9	2.51847E-3	2.51847E-3	6.34518E-3	2.15699E-2
1.6E1	3.31E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.8001E1	0.0E0	-8.80003E1	2.6226E-4	5.48363E-3	9.3317E-2	1.58185E1	-1.98729E1	-1.99324E1	1.49986E1	2.37848E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.17066E-2
1.7E1	7.24E2	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80008E1	-7.15256E-5	-8.80002E1	2.14577E-4	5.36442E-3	9.37223E-2	1.58109E1	-1.98676E1	-1.99602E1	1.49941E1	2.3764E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.16806E-2
1.8E1	3.014E3	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80005E1	-2.86102E-4	-8.80002E1	2.38419E-5	5.00679E-3	9.35793E-2	1.57903E1	-1.98861E1	-1.99738E1	1.50203E1	2.37842E-9	2.5131E-3	2.5131E-3	6.3074E-3	2.17732E-2
1.9E1	1.757E3	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80007E1	-2.38419E-4	-8.80002E1	-3.57628E-4	5.03063E-3	9.35078E-2	1.57975E1	-1.98476E1	-1.99564E1	1.50143E1	2.37538E-9	2.5225E-3	2.5225E-3	6.32418E-3	2.16377E-2
2.0E1	2.8E1	0.0E0	8.08E2	5.58E2	-7.44059E-2	-8.80009E1	-3.8147E-4	-8.80002E1	-1.90735E-4	4.8399E-3	9.30071E-2	1.57743E1	-1.98499E1	-1.99838E1	1.49764E1	2.37538E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.15515E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80007E1	-3.09944E-4	-8.79999E1	-2.86102E-4	5.26905E-3	9.35078E-2	1.58002E1	-1.98605E1	-1.99425E1	1.50207E1	2.37538E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.15938E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.39421E-2	-8.80004E1	-4.76837E-4	-8.80001E1	-1.19209E-4	5.19753E-3	9.32455E-2	1.58083E1	-1.98176E1	-1.9978E1	1.49992E1	2.37538E-9	2.52871E-3	2.52871E-3	6.29684E-3	2.16736E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80005E1	-4.76837E-4	-8.80001E1	2.38419E-5	5.36442E-3	9.34601E-2	1.57932E1	-1.98487E1	-1.99874E1	1.49986E1	2.37951E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.16878E-2