[Scan]
initial_time=2015-12-18T19:21:34
final_time=2015-12-18T19:22:03
ip_count=19
run=1020
dataset=0
scan=31
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.82819E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-6.33216E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.19153E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.04602E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.3742E-8
mult1=-9.29489E-9
mult2=-2.74855E-9
rf_tmon=-3.77341E-3
rf_agc=3.3646E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=6.21498E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66902E0
bslens_imon=2.38767E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20104E1
lens5a_imon=1.98402E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1253E2
lens4a_imon=2.0485E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53242E1
cs_ef1b_imon=2.81953E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02137E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04736E1
cs_ea1_imon=2.60338E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99947E0
lens1_imon=1.42625E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64527E1
os_ef1alow_imon=2.96225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04147E1
cs_ea2_imon=1.51642E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84529E1
cs_ef1a_imon=2.93427E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.05644E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11272E1
os_restr1_imon=4.3063E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14962E1
os_ea1_imon=2.34674E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63939E1
os_ef1bup_imon=3.08631E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24746E0
cs_ionrep_imon=1.17397E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.92251E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99989E1
olens4_imon=4.20852E-9
tplens_vset=0.0E0
tplens_vmon=-1.60833E0
tplens_imon=-4.68779E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99949E1
iondef3_imon=8.60908E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98458E1
iondef2_imon=9.55064E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98334E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=8.64935E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2468E0
ionrepsh_imon=1.74605E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.18425E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74731E1
cs_ef2b_imon=3.11672E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2276E0
os_ea2_imon=-7.23038E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71224E1
cs_ef2a_imon=3.16659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04713E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11056E1
os_restr2_imon=3.4127E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.28577E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01795E1
cs_anode2_imon=2.24177E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58017E1
iondef1_imon=5.20041E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49788E1
iondef4_imon=5.21056E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.51383E-8
olens1_vset=0.0E0
olens1_vmon=1.04904E-3
olens1_imon=1.23383E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14974E0
cs_ionaccel_imon=-1.81987E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47141E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5625E1
einzel_imon=7.47295E-6
window_vset=0.0E0
window_vmon=1.68163E-1
window_imon=-1.11034E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.38962E-4
mask2_vset=0.0E0
mask2_vmon=-1.86303E1
mask2_imon=-7.65713E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.32984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.33664E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.03585E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3891E0
defgridb_imon=6.24526E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.41907E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06262E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62678E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.94973E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62689E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62109E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58619E-2
os_fil2_imon=-2.69525E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.324E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36789E-1
cs_fil2_imon=-2.5601E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.84829E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22223E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31879E-3
inlet_lpb_pmon=2.17226E-2
chamber_ion_pmon=2.37645E-9
chamber_cvt_pmon=2.52293E-3
foreline_cvt_pmon=2.52293E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.83253E-1
res40_imon=-2.59022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.285E3	2.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80009E1	-4.52995E-4	-8.80004E1	-1.19209E-4	5.43594E-3	9.33886E-2	1.58023E1	-1.98699E1	-1.9978E1	1.50381E1	2.37887E-9	2.51621E-3	2.51621E-3	6.31974E-3	2.15891E-2
2.0E0	3.075E3	4.0E0	3.16E2	1.6E2	-7.42513E-2	-8.80008E1	-6.67572E-4	-8.80001E1	2.6226E-4	5.4121E-3	9.34124E-2	1.57698E1	-1.98705E1	-1.99672E1	1.50112E1	2.3764E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.16806E-2
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80008E1	-3.57628E-4	-8.80003E1	2.6226E-4	5.50747E-3	9.35078E-2	1.57867E1	-1.98535E1	-1.99573E1	1.50154E1	2.37745E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.18011E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.41738E-2	-8.80006E1	-4.29153E-4	-8.80003E1	3.09944E-4	5.29289E-3	9.3317E-2	1.58191E1	-1.98567E1	-1.99784E1	1.49981E1	2.3764E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.17918E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80005E1	-3.57628E-4	-8.80007E1	0.0E0	5.29289E-3	9.32693E-2	1.57933E1	-1.98819E1	-1.99672E1	1.50034E1	2.37538E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.17918E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80007E1	-5.96046E-4	-8.80006E1	1.43051E-4	5.55515E-3	9.36508E-2	1.57934E1	-1.98526E1	-1.99641E1	1.50268E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.16501E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80007E1	-2.14577E-4	-8.80004E1	9.53674E-5	5.126E-3	9.34362E-2	1.58033E1	-1.98574E1	-1.9954E1	1.50035E1	2.37641E-9	2.51334E-3	2.51334E-3	6.33486E-3	2.16689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80008E1	-3.8147E-4	-8.80002E1	-1.19209E-4	5.74589E-3	9.35078E-2	1.57855E1	-1.986E1	-1.9975E1	1.50202E1	2.37538E-9	2.5233E-3	2.5233E-3	6.31421E-3	2.15847E-2
1.2E1	7.5E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.8001E1	-1.43051E-4	-8.80001E1	-7.15256E-5	5.29289E-3	9.34124E-2	1.58269E1	-1.98308E1	-1.99666E1	1.49902E1	2.37641E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.16501E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80007E1	-3.8147E-4	-8.80001E1	-1.90735E-4	5.43594E-3	9.34124E-2	1.57813E1	-1.98296E1	-1.99552E1	1.50219E1	2.37538E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.16501E-2
1.4E1	1.29E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80008E1	-3.09944E-4	-8.8E1	-1.66893E-4	5.17368E-3	9.36031E-2	1.57983E1	-1.98533E1	-1.99726E1	1.49929E1	2.37848E-9	2.52757E-3	2.52757E-3	6.32936E-3	2.15563E-2
1.5E1	6.1E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80008E1	-3.33786E-4	-8.80001E1	0.0E0	5.17368E-3	9.37462E-2	1.57753E1	-1.98483E1	-1.99858E1	1.50058E1	2.37641E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.16125E-2
1.6E1	3.48E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80009E1	-4.05312E-4	-8.80002E1	4.76837E-5	5.05447E-3	9.36747E-2	1.57969E1	-1.98753E1	-1.99924E1	1.50773E1	2.37538E-9	2.52473E-3	2.52473E-3	6.3074E-3	2.16377E-2
1.7E1	6.99E2	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80007E1	-3.57628E-4	-8.8E1	-7.15256E-5	5.07832E-3	9.36747E-2	1.58015E1	-1.98468E1	-1.99629E1	1.50016E1	2.37538E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.17633E-2
1.8E1	3.148E3	1.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80006E1	-5.00679E-4	-8.80002E1	-1.43051E-4	5.38826E-3	9.38177E-2	1.57801E1	-1.98643E1	-1.99441E1	1.49893E1	2.37634E-9	2.52364E-3	2.52364E-3	6.3023E-3	2.1678E-2
1.9E1	1.806E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80006E1	-3.33786E-4	-8.79998E1	-1.43051E-4	5.29289E-3	9.38416E-2	1.57969E1	-1.98645E1	-1.99714E1	1.49902E1	2.37538E-9	2.52266E-3	2.52266E-3	6.31332E-3	2.18011E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80006E1	-2.38419E-4	-8.79997E1	1.19209E-4	5.29289E-3	9.39846E-2	1.58175E1	-1.98814E1	-1.9957E1	1.49854E1	2.37641E-9	2.51771E-3	2.51771E-3	6.29098E-3	2.17822E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80008E1	-5.24521E-4	-8.79999E1	0.0E0	5.29289E-3	9.37939E-2	1.57942E1	-1.98668E1	-1.99806E1	1.50113E1	2.38019E-9	2.51854E-3	2.51854E-3	6.31251E-3	2.17835E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80008E1	-3.57628E-4	-8.80001E1	1.43051E-4	5.48363E-3	9.36508E-2	1.57903E1	-1.98294E1	-1.99812E1	1.49679E1	2.37538E-9	2.52248E-3	2.52248E-3	6.30255E-3	2.18263E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80005E1	-2.86102E-4	-8.80001E1	1.19209E-4	5.07832E-3	9.33647E-2	1.58017E1	-1.98458E1	-1.99949E1	1.49788E1	2.37645E-9	2.52293E-3	2.52293E-3	6.31879E-3	2.17226E-2