[Scan]
initial_time=2015-12-18T19:22:13
final_time=2015-12-18T19:22:41
ip_count=19
run=1020
dataset=0
scan=32
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.87856E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-7.13885E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.20322E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.06759E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.36123E-8
mult1=-1.01496E-8
mult2=-2.75853E-9
rf_tmon=-4.85752E-3
rf_agc=3.3899E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=6.18911E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66794E0
bslens_imon=2.69637E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2044E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52688E1
cs_ef1b_imon=2.85324E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02258E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05144E1
cs_ea1_imon=2.544E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03114E0
lens1_imon=1.6257E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64516E1
os_ef1alow_imon=2.96931E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03468E1
cs_ea2_imon=1.45963E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=2.94707E-5
olens2_vset=0.0E0
olens2_vmon=1.43051E-3
olens2_imon=1.06178E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11222E1
os_restr1_imon=4.30485E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15498E1
os_ea1_imon=2.44991E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.09373E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.30557E0
cs_ionrep_imon=1.16547E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01861E1
cs_anode1_imon=2.95646E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99987E1
olens4_imon=4.25372E-9
tplens_vset=0.0E0
tplens_vmon=-1.62161E0
tplens_imon=-2.05617E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99915E1
iondef3_imon=8.72746E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98192E1
iondef2_imon=9.33669E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98263E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=8.54921E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29416E0
ionrepsh_imon=1.7985E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3358E1
lens5b_imon=2.15467E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74716E1
cs_ef2b_imon=3.1323E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26472E0
os_ea2_imon=-5.22853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00349E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71287E1
cs_ef2a_imon=3.18999E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03313E0
os_ef2alow_imon=-2.70664E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6827E-1
os_ef2bup_imon=-5.47642E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11002E1
os_restr2_imon=3.40963E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23116E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.24472E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57814E1
iondef1_imon=4.92423E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50022E1
iondef4_imon=5.26559E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.53108E-8
olens1_vset=0.0E0
olens1_vmon=9.77516E-4
olens1_imon=1.24807E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14346E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47108E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56208E1
einzel_imon=7.58358E-6
window_vset=0.0E0
window_vmon=1.74245E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39056E-4
mask2_vset=0.0E0
mask2_vmon=-1.86054E1
mask2_imon=-7.88302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92595E3
multa_neg_imon=7.53061E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.39505E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.19535E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29931E0
defgridb_imon=5.91559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33366E1
os_fil1_imon=9.42629E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06472E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63415E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.9821E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6225E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64995E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02212E-2
os_fil2_imon=-2.8082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.72122E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.10932E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36893E-1
cs_fil2_imon=-2.46646E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.92948E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22421E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.16689E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.88167E-1
res40_imon=-2.61629E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.32E3	1.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80004E1	-6.19888E-4	-8.8E1	0.0E0	5.29289E-3	9.31978E-2	1.58474E1	-1.98352E1	-1.99343E1	1.5034E1	2.37538E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.16067E-2
2.0E0	3.059E3	2.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80008E1	-5.00679E-4	-8.80002E1	2.38419E-4	5.29289E-3	9.34362E-2	1.58216E1	-1.98667E1	-1.99659E1	1.5001E1	2.3764E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.16991E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80007E1	-7.86781E-4	-8.80002E1	2.6226E-4	5.31673E-3	9.36508E-2	1.57843E1	-1.98753E1	-1.99496E1	1.50118E1	2.37749E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.16569E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80008E1	-6.67572E-4	-8.80002E1	4.05312E-4	5.24521E-3	9.33647E-2	1.57991E1	-1.98788E1	-1.99779E1	1.50328E1	2.3764E-9	2.52492E-3	2.52492E-3	6.33977E-3	2.16436E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80008E1	-5.48363E-4	-8.80004E1	3.8147E-4	5.55515E-3	9.35555E-2	1.58111E1	-1.98496E1	-1.99506E1	1.50016E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.15563E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80007E1	-2.14577E-4	-8.80003E1	2.6226E-4	5.36442E-3	9.34839E-2	1.58119E1	-1.98735E1	-1.99516E1	1.50166E1	2.37538E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.16313E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80011E1	-1.66893E-4	-8.80005E1	1.90735E-4	5.50747E-3	9.37223E-2	1.58047E1	-1.98585E1	-1.99774E1	1.50022E1	2.37641E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.16501E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80008E1	-4.29153E-4	-8.80002E1	3.8147E-4	5.19753E-3	9.31978E-2	1.57759E1	-1.98549E1	-1.9939E1	1.50004E1	2.37538E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.16125E-2
1.2E1	9.4E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80005E1	-1.90735E-4	-8.80003E1	1.43051E-4	5.24521E-3	9.34839E-2	1.57759E1	-1.98657E1	-1.99462E1	1.50406E1	2.37538E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.16313E-2
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80011E1	-4.29153E-4	-8.80002E1	3.09944E-4	5.17368E-3	9.35316E-2	1.5828E1	-1.99189E1	-1.99703E1	1.49922E1	2.37641E-9	2.52538E-3	2.52538E-3	6.29645E-3	2.15938E-2
1.4E1	8.9E1	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80009E1	-4.52995E-4	-8.80003E1	2.38419E-4	5.07832E-3	9.37223E-2	1.58251E1	-1.98513E1	-1.99684E1	1.50082E1	2.3764E-9	2.52815E-3	2.52815E-3	6.32896E-3	2.16621E-2
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80011E1	-3.09944E-4	-8.80003E1	7.15256E-5	5.34058E-3	9.36031E-2	1.57861E1	-1.98495E1	-1.99991E1	1.5047E1	2.37538E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.16313E-2
1.6E1	3.1E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80007E1	-4.29153E-4	-8.80003E1	2.14577E-4	5.36442E-3	9.34124E-2	1.5796E1	-1.98585E1	-1.99778E1	1.501E1	2.37641E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.16313E-2
1.7E1	7.4E2	1.0E0	6.87E2	4.7E2	-7.39421E-2	-8.80006E1	-1.43051E-4	-8.80002E1	-2.38419E-5	5.43594E-3	9.34124E-2	1.57831E1	-1.98579E1	-1.99786E1	1.49884E1	2.37638E-9	2.52448E-3	2.52448E-3	6.3074E-3	2.15469E-2
1.8E1	3.038E3	4.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80006E1	-1.66893E-4	-8.8E1	2.38419E-4	5.126E-3	9.32455E-2	1.58083E1	-1.98651E1	-1.99792E1	1.4998E1	2.37643E-9	2.52921E-3	2.52921E-3	6.31299E-3	2.17529E-2
1.9E1	1.816E3	1.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80008E1	-1.90735E-4	-8.79999E1	3.8147E-4	5.07832E-3	9.35078E-2	1.57993E1	-1.98555E1	-1.99504E1	1.49956E1	2.37538E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.16991E-2
2.0E1	2.7E1	0.0E0	8.08E2	5.58E2	-7.43285E-2	-8.80007E1	-4.76837E-4	-8.80002E1	4.05312E-4	5.36442E-3	9.32693E-2	1.5812E1	-1.98529E1	-1.99638E1	1.50213E1	2.37641E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.16501E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.43285E-2	-8.80009E1	-5.24521E-4	-8.79999E1	3.09944E-4	4.98295E-3	9.35555E-2	1.58047E1	-1.98645E1	-1.99654E1	1.50286E1	2.37641E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.17066E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80011E1	-4.05312E-4	-8.80001E1	2.38419E-4	5.48363E-3	9.34362E-2	1.58155E1	-1.98897E1	-1.99534E1	1.5007E1	2.3764E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.16806E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80011E1	-3.8147E-4	-8.80002E1	3.33786E-4	5.31673E-3	9.32932E-2	1.57814E1	-1.98192E1	-1.99915E1	1.50022E1	2.37538E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.16689E-2