[Scan]
initial_time=2015-12-18T19:22:52
final_time=2015-12-18T19:23:17
ip_count=19
run=1020
dataset=0
scan=33
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.80283E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-6.5794E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.1771E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.96694E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.35654E-8
mult1=-8.86143E-9
mult2=-2.74855E-9
rf_tmon=-4.90296E-3
rf_agc=3.32915E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=6.29628E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63465E0
bslens_imon=2.23321E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19649E1
lens5a_imon=1.96598E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05384E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53276E1
cs_ef1b_imon=2.85926E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02074E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0443E1
cs_ea1_imon=2.54298E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99178E0
lens1_imon=1.81272E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.96995E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04086E1
cs_ea2_imon=1.55329E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84482E1
cs_ef1a_imon=2.94562E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.06214E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11367E1
os_restr1_imon=4.31482E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14378E1
os_ea1_imon=2.3269E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63669E1
os_ef1bup_imon=3.08064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23523E0
cs_ionrep_imon=1.1986E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93545E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01795E1
cs_anode1_imon=2.96671E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99986E1
olens4_imon=4.18888E-9
tplens_vset=0.0E0
tplens_vmon=-1.61353E0
tplens_imon=-3.71445E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99444E1
iondef3_imon=8.61051E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98885E1
iondef2_imon=9.61889E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02994E2
lens6_imon=2.98311E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.93986E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.219E0
ionrepsh_imon=1.76042E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3382E1
lens5b_imon=2.20387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7465E1
cs_ef2b_imon=3.11834E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.31439E0
os_ea2_imon=-6.59553E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.0044E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71406E1
cs_ef2a_imon=3.18159E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03902E0
os_ef2alow_imon=-2.59833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95397E-1
os_ef2bup_imon=-5.40402E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11049E1
os_restr2_imon=3.40945E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23022E2
cs_ionfoca_imon=6.32693E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01876E1
cs_anode2_imon=2.25231E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58077E1
iondef1_imon=5.34399E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5031E1
iondef4_imon=5.13353E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.51887E-8
olens1_vset=0.0E0
olens1_vmon=8.58307E-4
olens1_imon=1.24692E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16055E0
cs_ionaccel_imon=-1.89691E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56202E1
einzel_imon=7.59864E-6
window_vset=0.0E0
window_vmon=1.52621E-1
window_imon=-1.09412E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86331E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.57488E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.40688E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=6.97141E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50418E0
defgridb_imon=6.19274E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.39258E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0618E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63349E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30919E1
cs_fil1_imon=9.95081E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62419E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64331E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37241E-2
os_fil2_imon=-2.76282E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.70384E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.96552E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36206E-1
cs_fil2_imon=-2.62768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.86191E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22319E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.16501E-2
chamber_ion_pmon=2.37641E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.00137E-1
res40_imon=-2.59022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.337E3	1.0E0	1.47E2	4.1E1	-7.44059E-2	-8.80011E1	-2.6226E-4	-8.8E1	2.86102E-4	5.26905E-3	9.32693E-2	1.58073E1	-1.98387E1	-2.0008E1	1.50138E1	2.37538E-9	2.52384E-3	2.52384E-3	6.31925E-3	2.17807E-2
2.0E0	3.089E3	6.0E0	3.16E2	1.6E2	-7.39421E-2	-8.80008E1	-4.76837E-4	-8.8E1	4.76837E-5	4.81606E-3	9.32932E-2	1.58128E1	-1.9873E1	-1.99773E1	1.49692E1	2.37538E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.17255E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.47149E-2	-8.8001E1	-2.14577E-4	-8.80004E1	3.09944E-4	5.26905E-3	9.34124E-2	1.58247E1	-1.98653E1	-1.99683E1	1.50047E1	2.37538E-9	2.52197E-3	2.52197E-3	6.33341E-3	2.17921E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80007E1	-2.6226E-4	-8.80001E1	3.33786E-4	5.19753E-3	9.3317E-2	1.5825E1	-1.98717E1	-1.9995E1	1.49968E1	2.37538E-9	2.51952E-3	2.51952E-3	6.31879E-3	2.17618E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.8001E1	-2.38419E-4	-8.80002E1	2.38419E-4	5.57899E-3	9.35555E-2	1.58215E1	-1.98795E1	-2.00069E1	1.50142E1	2.37538E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.16991E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.8001E1	-1.19209E-4	-8.80001E1	2.38419E-4	5.65052E-3	9.33886E-2	1.5768E1	-1.98783E1	-1.9984E1	1.49865E1	2.37641E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.16313E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.8001E1	-2.14577E-4	-8.80001E1	5.48363E-4	5.10216E-3	9.36031E-2	1.57861E1	-1.98579E1	-1.99558E1	1.50106E1	2.37538E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.17066E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80008E1	-1.90735E-4	-8.80002E1	2.38419E-4	5.19753E-3	9.3627E-2	1.5815E1	-1.98358E1	-1.99543E1	1.50346E1	2.37538E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.17633E-2
1.2E1	7.3E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80008E1	-7.15256E-5	-8.80005E1	1.66893E-4	5.53131E-3	9.377E-2	1.58053E1	-1.98579E1	-2.00087E1	1.501E1	2.37538E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.16621E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80008E1	-7.15256E-5	-8.80004E1	3.8147E-4	5.17368E-3	9.3627E-2	1.5811E1	-1.98423E1	-1.99697E1	1.49935E1	2.37641E-9	2.52406E-3	2.52406E-3	6.31283E-3	2.15817E-2
1.4E1	1.12E2	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80007E1	-1.43051E-4	-8.80004E1	3.09944E-4	4.98295E-3	9.36985E-2	1.57885E1	-1.98728E1	-1.99494E1	1.50022E1					
1.5E1	6.4E1	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80007E1	-1.90735E-4	-8.80005E1	3.8147E-4	5.14984E-3	9.34362E-2	1.58269E1	-1.98507E1	-1.99588E1	1.50106E1	2.37538E-9	2.52977E-3	2.52977E-3	6.32386E-3	2.1575E-2
1.6E1	3.2E2	1.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80007E1	-9.53674E-5	-8.80005E1	2.6226E-4	5.19753E-3	9.38177E-2	1.58089E1	-1.98549E1	-1.9972E1	1.50046E1	2.37641E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.15938E-2
1.7E1	7.41E2	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.80007E1	-1.66893E-4	-8.80007E1	2.6226E-4	5.55515E-3	9.33409E-2	1.57969E1	-1.98609E1	-1.99618E1	1.50268E1	2.37538E-9	2.5188E-3	2.5188E-3	6.3514E-3	2.16313E-2
1.8E1	3.088E3	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80008E1	-2.6226E-4	-8.80006E1	1.19209E-4	5.29289E-3	9.35316E-2	1.57975E1	-1.98446E1	-1.99672E1	1.50094E1	2.37745E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.16125E-2
1.9E1	1.795E3	0.0E0	7.68E2	5.29E2	-7.42513E-2	-8.80008E1	4.76837E-5	-8.80008E1	1.90735E-4	5.31673E-3	9.34362E-2	1.57926E1	-1.98316E1	-1.99673E1	1.5016E1	2.37538E-9	2.51116E-3	2.51116E-3	6.3514E-3	2.17633E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.47923E-2	-8.80008E1	-1.90735E-4	-8.80006E1	1.19209E-4	5.03063E-3	9.32932E-2	1.57928E1	-1.98251E1	-1.995E1	1.5001E1	2.37538E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.16252E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.47149E-2	-8.80011E1	0.0E0	-8.80008E1	1.66893E-4	5.17368E-3	9.36747E-2	1.5802E1	-1.98246E1	-1.99797E1	1.49869E1	2.37538E-9	2.52863E-3	2.52863E-3	6.29035E-3	2.1703E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80009E1	-2.38419E-4	-8.80002E1	-1.19209E-4	5.53131E-3	9.35793E-2	1.58053E1	-1.98609E1	-1.99522E1	1.49932E1	2.37638E-9	2.53507E-3	2.53507E-3	6.32328E-3	2.16192E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80008E1	-3.8147E-4	-8.80005E1	4.76837E-5	5.31673E-3	9.34124E-2	1.58077E1	-1.98885E1	-1.99444E1	1.5031E1	2.37641E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.16501E-2