[Scan]
initial_time=2015-12-18T19:23:56
final_time=2015-12-18T19:24:19
ip_count=19
run=1020
dataset=0
scan=35
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.78664E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.85871E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.19479E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.97276E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.36678E-8
mult1=-9.40325E-9
mult2=-2.63877E-9
rf_tmon=-5.76815E-3
rf_agc=3.24804E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=6.17826E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.38634E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19989E1
lens5a_imon=1.98992E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.04949E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52379E1
cs_ef1b_imon=2.84539E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04802E1
cs_ea1_imon=2.58438E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03294E0
lens1_imon=1.20392E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.95603E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.52741E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.94342E-5
olens2_vset=0.0E0
olens2_vmon=1.16825E-3
olens2_imon=1.06449E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=4.30968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15522E1
os_ea1_imon=2.34176E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.09514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26231E0
cs_ionrep_imon=1.20188E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91852E2
cs_nozzle_imon=1.93251E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.95207E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99987E1
olens4_imon=4.23596E-9
tplens_vset=0.0E0
tplens_vmon=-1.58075E0
tplens_imon=-2.66901E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9981E1
iondef3_imon=8.76351E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98501E1
iondef2_imon=9.17808E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=8.35443E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=1.76389E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.18026E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74922E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21965E0
os_ea2_imon=-7.64385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00489E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.17191E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02513E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.46664E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10769E1
os_restr2_imon=3.404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.29532E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.24749E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57765E1
iondef1_imon=4.96028E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50082E1
iondef4_imon=5.17227E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.51924E-8
olens1_vset=0.0E0
olens1_vmon=6.67572E-4
olens1_imon=1.23931E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16918E0
cs_ionaccel_imon=-1.90952E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=1.48267E-1
window_imon=-1.14548E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.8602E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.89471E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.51762E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.33955E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30833E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.42258E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06813E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62725E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=9.9505E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62222E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64303E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.17892E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-1.98121E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22319E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29067E-3
inlet_lpb_pmon=2.16186E-2
chamber_ion_pmon=2.37643E-9
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09147E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.344E3	1.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80006E1	-2.86102E-4	-8.80004E1	-1.43051E-4	5.126E-3	9.38654E-2	1.57861E1	-1.98549E1	-1.99774E1	1.50244E1	2.38055E-9	2.52757E-3	2.52757E-3	6.32936E-3	2.16501E-2
2.0E0	3.066E3	1.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80008E1	-4.05312E-4	-8.80004E1	-2.38419E-5	5.34058E-3	9.37223E-2	1.57767E1	-1.98635E1	-1.99856E1	1.50214E1	2.37641E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.1575E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80009E1	-6.19888E-4	-8.80005E1	-1.43051E-4	5.07832E-3	9.36985E-2	1.57698E1	-1.9817E1	-1.99672E1	1.50068E1	2.37641E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.1575E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80007E1	-5.24521E-4	-8.80005E1	-7.15256E-5	5.17368E-3	9.36747E-2	1.57981E1	-1.98585E1	-1.99552E1	1.50058E1	2.37538E-9	2.52492E-3	2.52492E-3	6.28056E-3	2.18104E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80007E1	-2.38419E-4	-8.80006E1	-9.53674E-5	5.22137E-3	9.38177E-2	1.58079E1	-1.98776E1	-1.99685E1	1.49902E1	2.37538E-9	2.52538E-3	2.52538E-3	6.33486E-3	2.18201E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80008E1	-5.48363E-4	-8.80003E1	0.0E0	5.05447E-3	9.37223E-2	1.57855E1	-1.9847E1	-1.9969E1	1.4998E1	2.37538E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.17732E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80007E1	-4.76837E-4	-8.80003E1	-1.43051E-4	5.45979E-3	9.38892E-2	1.58083E1	-1.98723E1	-1.99594E1	1.50184E1	2.37538E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.1575E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80007E1	-2.14577E-4	-8.79999E1	-4.76837E-5	5.43594E-3	9.36508E-2	1.57729E1	-1.98501E1	-1.99654E1	1.50022E1	2.37848E-9	2.52209E-3	2.52209E-3	6.34588E-3	2.16125E-2
1.2E1	1.02E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80008E1	-3.09944E-4	-8.80002E1	-2.38419E-4	5.55515E-3	9.32455E-2	1.57775E1	-1.98667E1	-1.99592E1	1.50136E1	2.37745E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.16689E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80006E1	-3.09944E-4	-8.80003E1	2.86102E-4	5.38826E-3	9.33647E-2	1.58085E1	-1.98399E1	-1.99301E1	1.49872E1	2.37643E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.17145E-2
1.4E1	1.28E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80006E1	-3.33786E-4	-8.80001E1	1.90735E-4	4.98295E-3	9.34362E-2	1.58115E1	-1.98411E1	-1.99891E1	1.5016E1	2.3764E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.16436E-2
1.5E1	7.8E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80002E1	-1.66893E-4	-8.80002E1	-4.76837E-5	5.48363E-3	9.32693E-2	1.58227E1	-1.98555E1	-1.99576E1	1.50004E1	2.37641E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.16689E-2
1.6E1	3.37E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80004E1	-3.8147E-4	-8.80003E1	1.66893E-4	5.22137E-3	9.32217E-2	1.58119E1	-1.98489E1	-1.99612E1	1.49926E1	2.3764E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.15515E-2
1.7E1	7.27E2	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80008E1	-4.05312E-4	-8.80001E1	1.90735E-4	5.126E-3	9.33647E-2	1.58095E1	-1.98723E1	-1.9969E1	1.50268E1	2.37641E-9	2.52099E-3	2.52099E-3	6.34588E-3	2.15938E-2
1.8E1	3.021E3	4.0E0	7.27E2	5.0E2	-7.40192E-2	-8.80008E1	-2.6226E-4	-8.8E1	2.6226E-4	5.22137E-3	9.35078E-2	1.57737E1	-1.98417E1	-1.99826E1	1.49944E1	2.37641E-9	2.52647E-3	2.52647E-3	6.32386E-3	2.16878E-2
1.9E1	1.836E3	0.0E0	7.68E2	5.29E2	-7.43285E-2	-8.80009E1	-1.66893E-4	-8.80003E1	3.33786E-4	5.29289E-3	9.32455E-2	1.58257E1	-1.98615E1	-1.99714E1	1.50196E1	2.3764E-9	2.52276E-3	2.52276E-3	6.29665E-3	2.18104E-2
2.0E1	2.6E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.8001E1	-4.05312E-4	-8.80003E1	3.57628E-4	5.03063E-3	9.33886E-2	1.57164E1	-1.97996E1	-2.00561E1	1.50094E1	2.37848E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.16501E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80009E1	-2.6226E-4	-8.80001E1	1.19209E-4	5.26905E-3	9.36031E-2	1.57816E1	-1.98724E1	-1.99994E1	1.50132E1	2.37641E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.16689E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80011E1	-4.76837E-4	-8.80002E1	1.66893E-4	5.07832E-3	9.34362E-2	1.58099E1	-1.98655E1	-1.99757E1	1.4983E1	2.37636E-9	2.52301E-3	2.52301E-3	6.3074E-3	2.16491E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80009E1	-1.90735E-4	-8.80002E1	2.14577E-4	5.29289E-3	9.38416E-2	1.57765E1	-1.98501E1	-1.9981E1	1.50082E1	2.37643E-9	2.52139E-3	2.52139E-3	6.29067E-3	2.16186E-2