[Scan]
initial_time=2015-12-18T19:24:58
final_time=2015-12-18T19:25:21
ip_count=19
run=1020
dataset=0
scan=37
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.95994E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.74772E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=1.19652E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.96712E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.36789E-8
mult1=-8.69548E-9
mult2=-2.49788E-9
rf_tmon=-5.09348E-3
rf_agc=3.25009E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=6.37591E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65833E0
bslens_imon=2.18807E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05165E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=2.85656E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.01941E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=2.5869E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02934E0
lens1_imon=1.04891E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.96432E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0357E1
cs_ea2_imon=1.54507E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=2.95315E-5
olens2_vset=0.0E0
olens2_vmon=1.35899E-3
olens2_imon=1.05476E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=4.31148E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15588E1
os_ea1_imon=2.37132E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63924E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.17448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.96612E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99986E1
olens4_imon=4.19402E-9
tplens_vset=0.0E0
tplens_vmon=-1.65045E0
tplens_imon=-3.28186E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99785E1
iondef3_imon=8.91131E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98411E1
iondef2_imon=9.36193E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98245E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.5882E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24429E0
ionrepsh_imon=1.77903E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34259E1
lens5b_imon=2.17017E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.10668E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22506E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.0041E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.19245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04375E0
os_ef2alow_imon=-2.77087E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6679E-1
os_ef2bup_imon=-5.40537E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.38923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.29568E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.25362E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57879E1
iondef1_imon=5.13692E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50294E1
iondef4_imon=5.24435E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.51817E-8
olens1_vset=0.0E0
olens1_vmon=9.77516E-4
olens1_imon=1.24131E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15897E0
cs_ionaccel_imon=-1.86627E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.3779E-6
window_vset=0.0E0
window_vmon=1.84306E-1
window_imon=-1.01213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86326E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.81901E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.64379E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=6.84928E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=6.46715E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.41735E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06867E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63144E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=9.95513E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62474E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64078E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.88221E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.3104E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.90623E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17866E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22318E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.15563E-2
chamber_ion_pmon=2.37745E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.55688E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.294E3	1.0E0	1.47E2	4.1E1	-7.51788E-2	-8.80007E1	-6.91414E-4	-8.80005E1	1.43051E-4	5.65052E-3	9.34839E-2	1.58079E1	-1.9857E1	-1.99821E1	1.50236E1	2.37538E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.17633E-2
2.0E0	3.009E3	2.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80009E1	-3.09944E-4	-8.80006E1	-1.90735E-4	5.29289E-3	9.32217E-2	1.58387E1	-1.98453E1	-1.99849E1	1.49922E1	2.37437E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.16621E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80006E1	-7.62939E-4	-8.80007E1	-2.38419E-4	5.19753E-3	9.36031E-2	1.58232E1	-1.9866E1	-1.99587E1	1.50086E1	2.37538E-9	2.52362E-3	2.52362E-3	6.33538E-3	2.16377E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80007E1	-5.24521E-4	-8.80004E1	-1.66893E-4	5.88894E-3	9.34362E-2	1.5783E1	-1.98214E1	-1.99867E1	1.49794E1	2.37538E-9	2.51709E-3	2.51709E-3	6.32328E-3	2.16736E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80007E1	-3.57628E-4	-8.80005E1	-3.57628E-4	5.53131E-3	9.32217E-2	1.57903E1	-1.98681E1	-1.9978E1	1.50473E1	2.37538E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.18108E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80006E1	-3.09944E-4	-8.80003E1	7.15256E-5	5.26905E-3	9.3174E-2	1.57967E1	-1.98706E1	-1.9988E1	1.50106E1	2.37641E-9	2.52538E-3	2.52538E-3	6.34588E-3	2.1839E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80005E1	-3.09944E-4	-8.80002E1	2.38419E-4	5.22137E-3	9.34839E-2	1.58011E1	-1.98603E1	-1.99282E1	1.50076E1	2.37538E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.17361E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80005E1	-3.09944E-4	-8.80001E1	7.15256E-5	5.24521E-3	9.32932E-2	1.57608E1	-1.98873E1	-1.99462E1	1.50082E1	2.37538E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.17822E-2
1.2E1	7.9E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80007E1	-1.90735E-4	-8.80002E1	7.15256E-5	5.48363E-3	9.35316E-2	1.57987E1	-1.98308E1	-1.9972E1	1.4995E1	2.37641E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.17633E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80007E1	-7.15256E-5	-8.80004E1	4.76837E-4	5.00679E-3	9.36031E-2	1.58185E1	-1.98236E1	-1.9975E1	1.49932E1	2.37641E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.17633E-2
1.4E1	1.24E2	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80006E1	-2.86102E-4	-8.80004E1	4.76837E-5	5.34058E-3	9.34362E-2	1.57932E1	-1.98564E1	-1.99591E1	1.50148E1	2.37589E-9	2.52243E-3	2.52243E-3	6.32644E-3	2.17589E-2
1.5E1	5.5E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80009E1	-1.19209E-4	-8.80005E1	3.09944E-4	5.65052E-3	9.35078E-2	1.58239E1	-1.98669E1	-1.99071E1	1.4986E1					
1.6E1	3.23E2	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80007E1	2.14577E-4	-8.80006E1	-9.53674E-5	5.74589E-3	9.3317E-2	1.58099E1	-1.98367E1	-2.00057E1	1.50196E1	2.37745E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.17633E-2
1.7E1	7.74E2	0.0E0	6.87E2	4.7E2	-7.44831E-2	-8.80008E1	0.0E0	-8.80004E1	2.14577E-4	5.07832E-3	9.34839E-2	1.58281E1	-1.98248E1	-1.99576E1	1.50166E1	2.37643E-9	2.52585E-3	2.52585E-3	6.32418E-3	2.17915E-2
1.8E1	2.987E3	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.80011E1	-1.43051E-4	-8.80001E1	2.38419E-5	5.17368E-3	9.34124E-2	1.5812E1	-1.98364E1	-1.9975E1	1.49776E1	2.37538E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.17255E-2
1.9E1	1.782E3	1.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80012E1	-2.14577E-4	-8.80001E1	2.86102E-4	4.88758E-3	9.36508E-2	1.58107E1	-1.98428E1	-1.99582E1	1.50112E1	2.3764E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.17176E-2
2.0E1	2.4E1	0.0E0	8.08E2	5.58E2	-7.45602E-2	-8.80009E1	-3.33786E-4	-8.80005E1	9.53674E-5	4.95911E-3	9.35078E-2	1.57891E1	-1.98575E1	-1.99683E1	1.50136E1	2.37848E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.16501E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.43285E-2	-8.80009E1	-3.8147E-4	-8.80005E1	4.29153E-4	4.81606E-3	9.34362E-2	1.57902E1	-1.98915E1	-1.99332E1	1.49802E1	2.37538E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.17444E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.44831E-2	-8.80009E1	2.38419E-5	-8.80004E1	9.53674E-5	4.8399E-3	9.36985E-2	1.57945E1	-1.98537E1	-1.99486E1	1.5019E1	2.37538E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.17361E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.8001E1	-4.76837E-5	-8.80003E1	7.15256E-5	4.64916E-3	9.35793E-2	1.57879E1	-1.98411E1	-1.99785E1	1.50294E1	2.37745E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.15563E-2