[Scan]
initial_time=2015-12-18T19:27:02
final_time=2015-12-18T19:27:25
ip_count=19
run=1020
dataset=0
scan=41
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.75532E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-6.62184E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.21623E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.03543E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.37102E-8
mult1=-9.66815E-9
mult2=-2.78648E-9
rf_tmon=-3.89958E-3
rf_agc=3.35318E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=6.5347E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64262E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19972E1
lens5a_imon=1.97837E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04867E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5352E1
cs_ef1b_imon=2.85116E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05253E1
cs_ea1_imon=2.57193E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01236E0
lens1_imon=1.2443E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.95927E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04251E1
cs_ea2_imon=1.5225E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.94053E-5
olens2_vset=0.0E0
olens2_vmon=1.5974E-3
olens2_imon=1.05179E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=4.30319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15482E1
os_ea1_imon=2.35496E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63851E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25092E0
cs_ionrep_imon=1.18271E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93363E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=2.94702E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99988E1
olens4_imon=4.17484E-9
tplens_vset=0.0E0
tplens_vmon=-1.58126E0
tplens_imon=-4.617E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99708E1
iondef3_imon=8.85402E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98549E1
iondef2_imon=9.35308E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98279E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=8.58569E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29634E0
ionrepsh_imon=1.7784E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.16171E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.111E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23499E0
os_ea2_imon=-6.13894E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00442E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03594E0
os_ef2alow_imon=-2.76727E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-5.40537E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.3986E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.29787E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01683E1
cs_anode2_imon=2.24136E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58047E1
iondef1_imon=5.12703E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50142E1
iondef4_imon=5.15786E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.52047E-8
olens1_vset=0.0E0
olens1_vmon=1.14441E-3
olens1_imon=1.23287E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15957E0
cs_ionaccel_imon=-1.99241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47089E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.57972E-6
window_vset=0.0E0
window_vmon=1.43461E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86194E1
mask2_imon=-8.49956E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.31438E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.90027E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=6.74808E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.0225E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.41135E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06164E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62139E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30879E1
cs_fil1_imon=9.9544E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62822E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63894E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44586E-2
os_fil2_imon=-2.81013E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.66056E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.39492E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.41892E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22206E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.1575E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.6123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.408E3	1.0E0	1.47E2	4.1E1	-7.18554E-2	-8.80012E1	-2.38419E-4	-8.80004E1	1.90735E-4	5.65052E-3	9.3627E-2	1.57842E1	-1.98526E1	-1.99708E1	1.50304E1	2.37741E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.17176E-2
2.0E0	2.96E3	2.0E0	3.16E2	1.6E2	-7.17779E-2	-8.8001E1	-9.53674E-5	-8.80001E1	1.43051E-4	5.17368E-3	9.36031E-2	1.58167E1	-1.98561E1	-1.99798E1	1.50298E1	2.37538E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.17145E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.8001E1	-1.90735E-4	-8.79998E1	2.38419E-4	5.4121E-3	9.34362E-2	1.57919E1	-1.98411E1	-1.99587E1	1.50103E1	2.37641E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.16689E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.8001E1	-1.66893E-4	-8.80001E1	3.09944E-4	5.53131E-3	9.33647E-2	1.57813E1	-1.98729E1	-1.99648E1	1.50202E1	2.37538E-9	2.52553E-3	2.52553E-3	6.31798E-3	2.16374E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80009E1	-9.53674E-5	-8.80003E1	7.15256E-5	5.38826E-3	9.35078E-2	1.58007E1	-1.9852E1	-1.99934E1	1.50106E1	2.37538E-9	2.52099E-3	2.52099E-3	6.28006E-3	2.16501E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80008E1	-2.6226E-4	-8.80001E1	1.43051E-4	5.6982E-3	9.3317E-2	1.58244E1	-1.98411E1	-1.99549E1	1.49998E1	2.37538E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.17444E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.41738E-2	-8.80009E1	-3.09944E-4	-8.80003E1	2.38419E-4	5.26905E-3	9.36508E-2	1.58101E1	-1.98525E1	-1.99714E1	1.49716E1	2.37641E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.17066E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80011E1	-2.14577E-4	-8.80008E1	1.90735E-4	5.50747E-3	9.3627E-2	1.57909E1	-1.98729E1	-1.9966E1	1.50142E1	2.37641E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.16878E-2
1.2E1	1.06E2	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80013E1	2.38419E-5	-8.80004E1	3.33786E-4	5.19753E-3	9.3174E-2	1.57825E1	-1.98525E1	-1.99624E1	1.49908E1	2.37538E-9	2.52538E-3	2.52538E-3	6.26916E-3	2.16313E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80013E1	-2.14577E-4	-8.80008E1	-9.53674E-5	5.29289E-3	9.34124E-2	1.58126E1	-1.98482E1	-1.99762E1	1.49952E1	2.37745E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17822E-2
1.4E1	1.19E2	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80013E1	-3.09944E-4	-8.80006E1	-9.53674E-5	5.03063E-3	9.3627E-2	1.57867E1	-1.98346E1	-1.99921E1	1.50082E1	2.37737E-9	2.52025E-3	2.52025E-3	6.32328E-3	2.17282E-2
1.5E1	5.9E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.8001E1	-1.43051E-4	-8.80007E1	3.09944E-4	4.8399E-3	9.32932E-2	1.58242E1	-1.98681E1	-1.99643E1	1.49956E1	2.37538E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.17822E-2
1.6E1	3.12E2	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.8001E1	-1.19209E-4	-8.80006E1	2.14577E-4	4.95911E-3	9.33647E-2	1.58072E1	-1.98645E1	-1.99715E1	1.50016E1	2.37538E-9	2.5215E-3	2.5215E-3	6.29365E-3	2.17655E-2
1.7E1	7.59E2	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80008E1	-1.43051E-4	-8.80005E1	2.6226E-4	5.03063E-3	9.33409E-2	1.58397E1	-1.98584E1	-1.99377E1	1.50214E1	2.37636E-9	2.5199E-3	2.5199E-3	6.323E-3	2.16491E-2
1.8E1	2.968E3	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80008E1	-4.76837E-5	-8.80005E1	2.6226E-4	5.126E-3	9.33647E-2	1.57915E1	-1.98398E1	-1.9975E1	1.49723E1	2.37538E-9	2.52293E-3	2.52293E-3	6.33592E-3	2.16443E-2
1.9E1	1.836E3	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.8001E1	0.0E0	-8.80003E1	2.86102E-4	5.17368E-3	9.34362E-2	1.57987E1	-1.98519E1	-2.00135E1	1.50225E1	2.37538E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.18011E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80011E1	-1.19209E-4	-8.80004E1	3.8147E-4	5.126E-3	9.32693E-2	1.58005E1	-1.98765E1	-1.9984E1	1.50004E1	2.37741E-9	2.51096E-3	2.51096E-3	6.32896E-3	2.17361E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.8001E1	-2.86102E-4	-8.80005E1	7.15256E-5	5.36442E-3	9.35316E-2	1.57967E1	-1.98576E1	-1.99573E1	1.50286E1	2.37745E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.16313E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80009E1	-3.57628E-4	-8.8E1	1.19209E-4	5.38826E-3	9.32932E-2	1.57985E1	-1.98369E1	-1.99756E1	1.4975E1	2.37538E-9	2.52492E-3	2.52492E-3	6.30202E-3	2.16436E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80008E1	0.0E0	-8.80004E1	1.90735E-4	5.29289E-3	9.32217E-2	1.58047E1	-1.98549E1	-1.99708E1	1.50142E1	2.37538E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.1575E-2