[Scan]
initial_time=2015-12-18T19:27:33
final_time=2015-12-18T19:27:56
ip_count=19
run=1020
dataset=0
scan=42
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.76614E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.3498E-10
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=1.2048E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.91432E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.36647E-8
mult1=-8.23531E-9
mult2=-2.67669E-9
rf_tmon=-4.09185E-3
rf_agc=3.35739E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=6.27208E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66067E0
bslens_imon=2.43416E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.98996E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.04844E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54072E1
cs_ef1b_imon=2.84881E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02001E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05102E1
cs_ea1_imon=2.58318E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99955E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64295E1
os_ef1alow_imon=2.97732E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03764E1
cs_ea2_imon=1.52549E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84612E1
cs_ef1a_imon=2.93403E-5
olens2_vset=0.0E0
olens2_vmon=1.28746E-3
olens2_imon=1.0485E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11168E1
os_restr1_imon=4.31714E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15243E1
os_ea1_imon=2.36222E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63893E1
os_ef1bup_imon=3.08872E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26462E0
cs_ionrep_imon=1.18226E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93219E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01972E1
cs_anode1_imon=2.93236E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99985E1
olens4_imon=4.20676E-9
tplens_vset=0.0E0
tplens_vmon=-1.57313E0
tplens_imon=-3.86814E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99876E1
iondef3_imon=8.66352E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98525E1
iondef2_imon=9.4456E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02985E2
lens6_imon=2.98366E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=8.38411E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26121E0
ionrepsh_imon=1.7748E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33828E1
lens5b_imon=2.17301E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.12865E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.15135E0
os_ea2_imon=-6.94183E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00356E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.16858E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03666E0
os_ef2alow_imon=-2.57638E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86985E-1
os_ef2bup_imon=-5.37144E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10676E1
os_restr2_imon=3.39004E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.29382E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01921E1
cs_anode2_imon=2.25221E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58059E1
iondef1_imon=5.07071E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50034E1
iondef4_imon=5.24174E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.51304E-8
olens1_vset=0.0E0
olens1_vmon=9.05991E-4
olens1_imon=1.23126E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18383E0
cs_ionaccel_imon=-1.88852E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47142E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56467E1
einzel_imon=7.65429E-6
window_vset=0.0E0
window_vmon=1.57608E-1
window_imon=-1.3181E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86109E1
mask2_imon=-9.18804E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.62187E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.46753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.78581E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27066E0
defgridb_imon=6.19773E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33345E1
os_fil1_imon=9.419E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06625E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62378E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30921E1
cs_fil1_imon=9.94815E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62277E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63086E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39343E-2
os_fil2_imon=-2.68337E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9527E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.55469E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37849E-1
cs_fil2_imon=-2.39816E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02996E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2219E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.16621E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52707E-3
foreline_cvt_pmon=2.52707E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.68737E-1
res40_imon=-2.55289E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.336E3	1.0E0	1.47E2	4.1E1	-7.11597E-2	-8.80008E1	-2.38419E-4	-8.80005E1	9.53674E-5	5.19753E-3	9.31978E-2	1.58156E1	-1.9867E1	-1.99443E1	1.5025E1	2.37636E-9	2.51886E-3	2.51886E-3	6.34907E-3	2.17921E-2
2.0E0	2.987E3	2.0E0	3.16E2	1.6E2	-7.13915E-2	-8.8001E1	-1.90735E-4	-8.80006E1	-9.53674E-5	5.05447E-3	9.32455E-2	1.58091E1	-1.98528E1	-1.99739E1	1.49912E1	2.3764E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.16806E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.8001E1	-1.43051E-4	-8.80002E1	-1.19209E-4	5.38826E-3	9.34124E-2	1.57809E1	-1.9855E1	-1.99744E1	1.50033E1	2.37538E-9	2.52029E-3	2.52029E-3	6.3074E-3	2.16991E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.13143E-2	-8.8001E1	-4.76837E-5	-8.80005E1	0.0E0	5.45979E-3	9.36031E-2	1.57993E1	-1.98458E1	-1.9963E1	1.50094E1	2.3764E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.17176E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80011E1	-2.14577E-4	-8.80002E1	2.38419E-4	5.45979E-3	9.33886E-2	1.5789E1	-1.98393E1	-1.99762E1	1.50286E1	2.3764E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.16806E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13915E-2	-8.80011E1	-3.09944E-4	-8.80001E1	0.0E0	5.05447E-3	9.34601E-2	1.57987E1	-1.98338E1	-1.99474E1	1.49872E1	2.3759E-9	2.52154E-3	2.52154E-3	6.32112E-3	2.16972E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80009E1	-2.14577E-4	-8.80002E1	1.19209E-4	5.03063E-3	9.32932E-2	1.57983E1	-1.98539E1	-1.99855E1	1.50106E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.8001E1	-2.38419E-4	-8.80003E1	-2.14577E-4	5.43594E-3	9.36031E-2	1.57991E1	-1.98417E1	-1.99779E1	1.49914E1	2.37749E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.1676E-2
1.2E1	1.01E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80011E1	-3.33786E-4	-8.80005E1	2.38419E-5	5.38826E-3	9.3317E-2	1.58227E1	-1.98392E1	-1.99474E1	1.50184E1	2.3764E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.16806E-2
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.8001E1	-9.53674E-5	-8.80003E1	-9.53674E-5	5.22137E-3	9.32455E-2	1.58227E1	-1.98813E1	-2.00039E1	1.49932E1	2.37641E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.17633E-2
1.4E1	1.12E2	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.8001E1	-4.29153E-4	-8.80002E1	2.38419E-5	5.45979E-3	9.36031E-2	1.57837E1	-1.9857E1	-2.00068E1	1.50112E1	2.3764E-9	2.52492E-3	2.52492E-3	6.30202E-3	2.15883E-2
1.5E1	5.0E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80011E1	-2.14577E-4	-8.80002E1	7.15256E-5	5.34058E-3	9.34362E-2	1.58245E1	-1.98759E1	-1.9963E1	1.4998E1	2.37538E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.16313E-2
1.6E1	3.33E2	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80012E1	-1.43051E-4	-8.80001E1	2.6226E-4	5.126E-3	9.3174E-2	1.58107E1	-1.98699E1	-1.99828E1	1.50268E1	2.37538E-9	2.51116E-3	2.51116E-3	6.31288E-3	2.16689E-2
1.7E1	7.91E2	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.80014E1	0.0E0	-8.80002E1	4.76837E-5	5.53131E-3	9.34839E-2	1.57668E1	-1.98777E1	-2.00027E1	1.50064E1	2.37538E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.15938E-2
1.8E1	3.174E3	2.0E0	7.27E2	5.0E2	-7.31692E-2	-8.8001E1	-1.90735E-4	-8.80002E1	7.15256E-5	5.26905E-3	9.35555E-2	1.57452E1	-1.98513E1	-2.01084E1	1.4986E1	2.37745E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.16313E-2
1.9E1	1.79E3	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80011E1	4.76837E-5	-8.80001E1	-9.53674E-5	5.10216E-3	9.32932E-2	1.57747E1	-1.98723E1	-1.99894E1	1.49968E1	2.37538E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.16621E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.40192E-2	-8.80008E1	-2.38419E-5	-8.80003E1	2.38419E-5	5.26905E-3	9.31978E-2	1.58005E1	-1.98446E1	-1.99558E1	1.49962E1	2.37538E-9	2.52977E-3	2.52977E-3	6.30192E-3	2.16878E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80011E1	-1.43051E-4	-8.80003E1	9.53674E-5	5.03063E-3	9.3317E-2	1.57843E1	-1.9834E1	-1.99585E1	1.50076E1	2.37538E-9	2.51915E-3	2.51915E-3	6.29624E-3	2.17915E-2
2.2E1	1.9E1	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80012E1	-1.43051E-4	-8.80004E1	-2.38419E-5	5.00679E-3	9.35316E-2	1.58029E1	-1.98537E1	-1.99678E1	1.49993E1	2.3764E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.16806E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80012E1	-9.53674E-5	-8.8E1	-2.38419E-5	4.91142E-3	9.33886E-2	1.58059E1	-1.98525E1	-1.99876E1	1.50034E1	2.37538E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.16621E-2