[Scan]
initial_time=2015-12-18T19:28:04
final_time=2015-12-18T19:28:27
ip_count=19
run=1020
dataset=0
scan=43
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.79981E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.84941E-10
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=1.21514E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.02094E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.37518E-8
mult1=-9.42733E-9
mult2=-2.71861E-9
rf_tmon=-5.20337E-3
rf_agc=3.27748E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=6.13284E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67635E0
bslens_imon=2.38995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=2.84287E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02081E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=2.58221E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9999E0
lens1_imon=1.53918E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.96E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.53822E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=2.93152E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.04567E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.32482E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15348E1
os_ea1_imon=2.39548E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.06199E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19382E0
cs_ionrep_imon=1.18313E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93027E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=2.93801E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99992E1
olens4_imon=4.18524E-9
tplens_vset=0.0E0
tplens_vmon=-1.63122E0
tplens_imon=-2.81321E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99618E1
iondef3_imon=8.81398E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98597E1
iondef2_imon=9.28622E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98458E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=8.24666E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.76389E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34355E1
lens5b_imon=2.16584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23888E0
os_ea2_imon=-6.23792E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.18632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.85016E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09437E-1
os_ef2bup_imon=-5.49186E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.39031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.31442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.23344E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57873E1
iondef1_imon=4.98552E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49999E1
iondef4_imon=5.25877E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.50853E-8
olens1_vset=0.0E0
olens1_vmon=1.07288E-3
olens1_imon=1.22516E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17339E0
cs_ionaccel_imon=-1.99602E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47147E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=1.77098E-1
window_imon=-1.2572E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92596E3
multa_neg_imon=7.5198E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93755E3
defgrida_imon=6.61495E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50097E3
multb_neg_imon=6.58251E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27525E0
defgridb_imon=5.89396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33347E1
os_fil1_imon=9.41429E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06104E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62063E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30922E1
cs_fil1_imon=9.95705E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62144E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62923E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58961E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77292E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.74092E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38068E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22188E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.17444E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56289E-1
res40_imon=-2.68437E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.334E3	0.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80009E1	-2.86102E-4	-8.80002E1	-2.38419E-5	5.38826E-3	9.32932E-2	1.58275E1	-1.98783E1	-1.99564E1	1.50358E1	2.37538E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.16313E-2
2.0E0	2.968E3	3.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80011E1	-2.6226E-4	-8.79999E1	2.14577E-4	5.55515E-3	9.34839E-2	1.58287E1	-1.98705E1	-1.99924E1	1.50292E1	2.37848E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.16501E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.8001E1	-3.09944E-4	-8.79998E1	-4.29153E-4	5.60284E-3	9.33409E-2	1.58162E1	-1.986E1	-1.99638E1	1.49999E1	2.37641E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.17066E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80007E1	-1.43051E-4	-8.79998E1	-1.19209E-4	5.36442E-3	9.33409E-2	1.58085E1	-1.98529E1	-1.99543E1	1.50028E1	2.37538E-9	2.51919E-3	2.51919E-3	6.31798E-3	2.16192E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80012E1	-3.33786E-4	-8.79998E1	2.38419E-4	5.31673E-3	9.34362E-2	1.57808E1	-1.98647E1	-1.99602E1	1.50317E1	2.37745E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.1575E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80008E1	-2.14577E-4	-8.79999E1	1.43051E-4	5.48363E-3	9.33409E-2	1.5802E1	-1.98661E1	-1.99745E1	1.49922E1	2.3764E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.17547E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80008E1	-7.15256E-5	-8.80003E1	2.14577E-4	5.29289E-3	9.34124E-2	1.5789E1	-1.98517E1	-1.9939E1	1.50288E1	2.37641E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.17444E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80009E1	0.0E0	-8.8E1	-9.53674E-5	5.17368E-3	9.35078E-2	1.58197E1	-1.98558E1	-1.99927E1	1.50076E1	2.37538E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.17361E-2
1.2E1	8.7E1	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80011E1	-2.14577E-4	-8.80003E1	2.38419E-5	5.45979E-3	9.30786E-2	1.57614E1	-1.99035E1	-1.99065E1	1.50004E1	2.3764E-9	2.52492E-3	2.52492E-3	6.30202E-3	2.17547E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.8001E1	-3.57628E-4	-8.79998E1	4.05312E-4	5.65052E-3	9.33647E-2	1.57903E1	-1.98711E1	-1.99594E1	1.49782E1	2.37538E-9	2.52362E-3	2.52362E-3	6.31299E-3	2.18494E-2
1.4E1	1.1E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80012E1	-1.43051E-4	-8.80001E1	2.14577E-4	5.10216E-3	9.32693E-2	1.57837E1	-1.98248E1	-2.00333E1	1.50118E1	2.37538E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.16501E-2
1.5E1	6.1E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80009E1	-2.38419E-5	-8.80001E1	3.8147E-4	5.126E-3	9.34362E-2	1.57789E1	-1.98573E1	-1.99846E1	1.5025E1	2.37745E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.16501E-2
1.6E1	3.14E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80009E1	1.66893E-4	-8.80002E1	2.86102E-4	5.26905E-3	9.35555E-2	1.58329E1	-1.98561E1	-1.9984E1	1.50088E1	2.37538E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.16125E-2
1.7E1	7.38E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80009E1	-3.8147E-4	-8.8E1	1.66893E-4	5.36442E-3	9.35555E-2	1.5785E1	-1.98649E1	-1.99634E1	1.49952E1	2.37641E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.16501E-2
1.8E1	3.175E3	4.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80011E1	-3.09944E-4	-8.80002E1	9.53674E-5	5.45979E-3	9.34601E-2	1.58391E1	-1.98466E1	-1.99888E1	1.49954E1	2.37636E-9	2.51886E-3	2.51886E-3	6.29703E-3	2.1578E-2
1.9E1	1.82E3	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.80012E1	-3.57628E-4	-8.80002E1	1.19209E-4	5.50747E-3	9.3627E-2	1.58144E1	-1.98552E1	-1.99561E1	1.49947E1	2.37538E-9	2.51838E-3	2.51838E-3	6.30171E-3	2.16443E-2
2.0E1	2.5E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80011E1	-1.66893E-4	-8.80002E1	1.19209E-4	5.14984E-3	9.34362E-2	1.57831E1	-1.98801E1	-1.99552E1	1.50209E1	2.3764E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.16806E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80011E1	-4.52995E-4	-8.80001E1	1.43051E-4	5.67436E-3	9.35078E-2	1.58026E1	-1.98588E1	-1.99591E1	1.49848E1	2.37589E-9	2.52569E-3	2.52569E-3	6.32099E-3	2.16468E-2
2.2E1	2.3E1	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80009E1	-2.86102E-4	-8.80002E1	2.86102E-4	4.98295E-3	9.34839E-2	1.58073E1	-1.98717E1	-1.99679E1	1.5025E1					
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80009E1	-9.53674E-5	-8.8E1	1.66893E-4	5.14984E-3	9.32217E-2	1.57873E1	-1.98597E1	-1.99618E1	1.49999E1	2.37538E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.17444E-2