[Scan]
initial_time=2015-12-18T19:28:35
final_time=2015-12-18T19:28:57
ip_count=19
run=1020
dataset=0
scan=44
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.38649E-2
qbias_imon=-3.79632E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.7668E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.27383E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.99554E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.38024E-8
mult1=-9.31897E-9
mult2=-2.75454E-9
rf_tmon=-4.62057E-3
rf_agc=3.39344E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=6.2834E-10
bslens_vset=-6.2E0
bslens_vmon=-6.58623E0
bslens_imon=2.45484E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19785E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54121E1
cs_ef1b_imon=2.82052E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=2.58294E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00651E0
lens1_imon=1.33009E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.96432E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.51911E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84604E1
cs_ef1a_imon=2.93693E-5
olens2_vset=0.0E0
olens2_vmon=1.45435E-3
olens2_imon=1.04305E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.31653E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15324E1
os_ea1_imon=2.37601E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=1.18313E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93258E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.93693E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99988E1
olens4_imon=4.32587E-9
tplens_vset=0.0E0
tplens_vmon=-1.60358E0
tplens_imon=-2.95741E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99492E1
iondef3_imon=8.65896E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98537E1
iondef2_imon=9.4845E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98029E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.33797E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=1.76858E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33676E1
lens5b_imon=2.17594E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7485E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2503E0
os_ea2_imon=-6.88681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.16182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03354E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.39788E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.30144E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.2529E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57981E1
iondef1_imon=5.01436E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50106E1
iondef4_imon=5.15786E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.51462E-8
olens1_vset=0.0E0
olens1_vmon=6.91414E-4
olens1_imon=1.21558E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-1.86267E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.56891E-6
window_vset=0.0E0
window_vmon=1.6028E-1
window_imon=-1.15269E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-8.06708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.45491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.42389E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.25303E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62713E0
defgridb_imon=6.03456E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.41063E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06302E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61493E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.94732E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63129E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62905E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.60251E-2
os_fil2_imon=-2.90623E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.03352E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22132E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.1575E-2
chamber_ion_pmon=2.37641E-9
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.25054E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.255E3	1.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80012E1	-3.09944E-4	-8.80004E1	-1.43051E-4	5.43594E-3	9.34839E-2	1.58005E1	-1.98663E1	-1.99468E1	1.50154E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.18011E-2
2.0E0	2.849E3	5.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80013E1	-2.6226E-4	-8.80005E1	7.15256E-5	5.36442E-3	9.34124E-2	1.58972E1	-1.98819E1	-1.99894E1	1.50046E1	2.37538E-9	2.52538E-3	2.52538E-3	6.35692E-3	2.17633E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80013E1	-2.14577E-4	-8.80005E1	-1.19209E-4	5.45979E-3	9.35078E-2	1.57802E1	-1.988E1	-1.99366E1	1.50167E1	2.37749E-9	2.5147E-3	2.5147E-3	6.32978E-3	2.1676E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80012E1	-3.8147E-4	-8.80005E1	-2.38419E-5	5.45979E-3	9.37462E-2	1.58023E1	-1.9808E1	-2.00081E1	1.49836E1	2.37638E-9	2.52553E-3	2.52553E-3	6.32328E-3	2.18194E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80011E1	-5.72205E-4	-8.80001E1	-1.43051E-4	5.55515E-3	9.3627E-2	1.5815E1	-1.98971E1	-1.99596E1	1.50328E1	2.37538E-9	2.52473E-3	2.52473E-3	6.31299E-3	2.17337E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80013E1	-4.52995E-4	-8.80003E1	1.43051E-4	5.57899E-3	9.33886E-2	1.58257E1	-1.98657E1	-1.99654E1	1.50088E1	2.37638E-9	2.52131E-3	2.52131E-3	6.33388E-3	2.16555E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.8001E1	-6.19888E-4	-8.80002E1	4.76837E-5	5.07832E-3	9.34601E-2	1.57777E1	-1.98609E1	-1.9987E1	1.4998E1	2.37749E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.17337E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.14689E-2	-8.80009E1	-3.33786E-4	-8.80003E1	1.19209E-4	5.29289E-3	9.38177E-2	1.58209E1	-1.98428E1	-1.9969E1	1.50094E1	2.37538E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.18104E-2
1.2E1	9.8E1	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80011E1	-9.53674E-5	-8.80003E1	1.90735E-4	5.34058E-3	9.3627E-2	1.58132E1	-1.98328E1	-1.99573E1	1.5022E1	2.37951E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.17444E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80009E1	-2.86102E-4	-8.80001E1	7.15256E-5	5.4121E-3	9.35555E-2	1.58197E1	-1.98537E1	-1.99528E1	1.49929E1	2.37435E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.18011E-2
1.4E1	9.8E1	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80013E1	-7.15256E-5	-8.80004E1	1.90735E-4	5.31673E-3	9.35793E-2	1.57434E1	-1.97756E1	-2.00021E1	1.49941E1	2.37641E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.16313E-2
1.5E1	6.3E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80012E1	-5.48363E-4	-8.80003E1	-4.76837E-5	5.17368E-3	9.34362E-2	1.58323E1	-1.98687E1	-1.99732E1	1.50213E1	2.37641E-9	2.53087E-3	2.53087E-3	6.34037E-3	2.16501E-2
1.6E1	3.34E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80012E1	-3.09944E-4	-8.80003E1	1.43051E-4	5.6982E-3	9.35078E-2	1.57938E1	-1.988E1	-1.99685E1	1.50202E1	2.3764E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.16621E-2
1.7E1	7.28E2	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80013E1	-3.57628E-4	-8.80001E1	-9.53674E-5	5.76973E-3	9.32217E-2	1.58087E1	-1.9882E1	-1.99634E1	1.50034E1	2.37538E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.18201E-2
1.8E1	3.128E3	2.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80011E1	-3.57628E-4	-8.80001E1	1.66893E-4	5.62668E-3	9.35793E-2	1.58041E1	-1.98705E1	-1.99462E1	1.49908E1	2.37641E-9	2.52099E-3	2.52099E-3	6.27461E-3	2.17444E-2
1.9E1	1.861E3	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.8001E1	-2.38419E-4	-8.80003E1	2.38419E-5	5.45979E-3	9.34362E-2	1.58168E1	-1.98688E1	-2.00021E1	1.50268E1	2.37435E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.16501E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80008E1	-5.96046E-4	-8.80003E1	1.19209E-4	5.81741E-3	9.37939E-2	1.57879E1	-1.98519E1	-1.99576E1	1.49914E1	2.37741E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.16436E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.8001E1	-2.38419E-4	-8.8E1	2.14577E-4	5.48363E-3	9.35078E-2	1.58383E1	-1.9841E1	-1.999E1	1.4989E1	2.37538E-9	2.52362E-3	2.52362E-3	6.34099E-3	2.15612E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80012E1	-7.15256E-5	-8.80003E1	2.14577E-4	5.26905E-3	9.35555E-2	1.57819E1	-1.98338E1	-1.99943E1	1.5025E1	2.3764E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.16436E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.38649E-2	-8.80011E1	-1.90735E-4	-8.80002E1	7.15256E-5	5.26905E-3	9.35793E-2	1.57981E1	-1.98537E1	-1.99492E1	1.50106E1	2.37641E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.1575E-2