[Scan]
initial_time=2015-12-18T19:29:05
final_time=2015-12-18T19:29:25
ip_count=19
run=1020
dataset=0
scan=45
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.82859E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.51336E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.17154E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.0213E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.38845E-8
mult1=-9.17448E-9
mult2=-2.6707E-9
rf_tmon=-5.18535E-3
rf_agc=3.21139E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=6.11198E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63489E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.97298E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.83169E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05258E1
cs_ea1_imon=2.57861E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99509E0
lens1_imon=1.25799E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.96576E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04063E1
cs_ea2_imon=1.52849E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.93333E-5
olens2_vset=0.0E0
olens2_vmon=1.66893E-3
olens2_imon=1.0379E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.32229E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15522E1
os_ea1_imon=2.36303E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=1.20188E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=2.92936E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9999E1
olens4_imon=4.24558E-9
tplens_vset=0.0E0
tplens_vmon=-1.57474E0
tplens_imon=-4.18309E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9951E1
iondef3_imon=8.34533E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98525E1
iondef2_imon=9.40158E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98313E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=8.57794E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24849E0
ionrepsh_imon=1.7675E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33435E1
lens5b_imon=2.18567E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.11425E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22025E0
os_ea2_imon=-7.78805E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.17659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03774E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46368E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.39716E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.2863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.24569E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57987E1
iondef1_imon=5.1189E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49908E1
iondef4_imon=5.28039E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.50565E-8
olens1_vset=0.0E0
olens1_vmon=1.04904E-3
olens1_imon=1.21463E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15777E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47147E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=1.65085E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.55224E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.37703E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.0872E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35645E0
defgridb_imon=6.07421E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.41027E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06422E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61895E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30826E1
cs_fil1_imon=9.94125E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62017E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62106E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6541E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.76025E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22013E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.18104E-2
chamber_ion_pmon=2.3764E-9
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7611E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.334E3	4.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80012E1	-5.24521E-4	-8.80003E1	4.76837E-5	5.17368E-3	9.37223E-2	1.57873E1	-1.98502E1	-1.99506E1	1.50148E1	2.37538E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.17822E-2
2.0E0	3.01E3	2.0E0	3.16E2	1.6E2	-7.286E-2	-8.80013E1	-7.15256E-5	-8.80001E1	1.66893E-4	4.86374E-3	9.3627E-2	1.58119E1	-1.98639E1	-1.99852E1	1.50058E1	2.37538E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.16313E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80012E1	-3.57628E-4	-8.8E1	1.90735E-4	5.26905E-3	9.38177E-2	1.58035E1	-1.98817E1	-1.99454E1	1.5001E1	2.37745E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.16878E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80011E1	-1.66893E-4	-8.79998E1	2.38419E-5	4.93526E-3	9.35078E-2	1.5792E1	-1.98859E1	-1.99738E1	1.50103E1	2.3764E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.17732E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.8001E1	-2.38419E-5	-8.80002E1	-1.66893E-4	4.95911E-3	9.37462E-2	1.58044E1	-1.98545E1	-1.99475E1	1.50298E1	2.37538E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.16806E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80009E1	2.38419E-4	-8.80003E1	0.0E0	4.93526E-3	9.38177E-2	1.58203E1	-1.98452E1	-1.99773E1	1.49812E1	2.37641E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.16689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.8001E1	9.53674E-5	-8.80002E1	1.19209E-4	5.29289E-3	9.37462E-2	1.57726E1	-1.98728E1	-1.99659E1	1.50034E1	2.37641E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.16125E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80013E1	-1.43051E-4	-8.80002E1	0.0E0	4.81606E-3	9.35316E-2	1.58286E1	-1.98635E1	-1.99838E1	1.50004E1	2.37538E-9	2.52647E-3	2.52647E-3	6.32386E-3	2.15563E-2
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80013E1	-4.76837E-5	-8.80004E1	7.15256E-5	5.29289E-3	9.36508E-2	1.58474E1	-1.98771E1	-1.996E1	1.49968E1	2.3764E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.17361E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80011E1	-1.43051E-4	-8.8E1	9.53674E-5	4.81606E-3	9.36985E-2	1.5799E1	-1.98384E1	-1.99542E1	1.4996E1	2.37538E-9	2.53196E-3	2.53196E-3	6.32936E-3	2.16313E-2
1.4E1	1.12E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.8001E1	-1.90735E-4	-8.8E1	1.90735E-4	5.05447E-3	9.37939E-2	1.57782E1	-1.98798E1	-1.9983E1	1.50198E1	2.37538E-9	2.52405E-3	2.52405E-3	6.3074E-3	2.15957E-2
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80007E1	2.14577E-4	-8.80003E1	2.38419E-5	5.31673E-3	9.39369E-2	1.58041E1	-1.98182E1	-1.9993E1	1.50166E1	2.37538E-9	2.52106E-3	2.52106E-3	6.31321E-3	2.16114E-2
1.6E1	3.43E2	1.0E0	6.47E2	4.41E2	-7.43285E-2	-8.80007E1	-1.43051E-4	-8.80001E1	1.43051E-4	4.86374E-3	9.33886E-2	1.57789E1	-1.98092E1	-1.99924E1	1.5004E1	2.37538E-9	2.52647E-3	2.52647E-3	6.32386E-3	2.17066E-2
1.7E1	7.49E2	0.0E0	6.87E2	4.7E2	-7.43285E-2	-8.80007E1	-3.8147E-4	-8.80001E1	1.66893E-4	5.55515E-3	9.36985E-2	1.58011E1	-1.97984E1	-1.99588E1	1.49986E1	2.37641E-9	2.52209E-3	2.52209E-3	6.36244E-3	2.18011E-2
1.8E1	3.242E3	3.0E0	7.27E2	5.0E2	-7.37874E-2	-8.8001E1	-7.15256E-4	-8.80001E1	1.66893E-4	5.26905E-3	9.36747E-2	1.58185E1	-1.98635E1	-1.99414E1	1.50184E1	2.37538E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.16501E-2
1.9E1	1.854E3	2.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80011E1	-5.00679E-4	-8.79999E1	9.53674E-5	5.34058E-3	9.36031E-2	1.57965E1	-1.9841E1	-1.99781E1	1.50097E1	2.3764E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.16621E-2
2.0E1	2.7E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80008E1	-5.72205E-4	-8.8E1	2.38419E-5	5.14984E-3	9.37462E-2	1.58073E1	-1.9847E1	-1.99526E1	1.49848E1	2.37643E-9	2.51915E-3	2.51915E-3	6.34661E-3	2.17915E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80008E1	-3.09944E-4	-8.8E1	-4.76837E-5	5.126E-3	9.37462E-2	1.57943E1	-1.98417E1	-1.99986E1	1.49878E1	2.37538E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.1839E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80011E1	-1.66893E-4	-8.80001E1	-1.19209E-4	5.55515E-3	9.35555E-2	1.57908E1	-1.9857E1	-1.99986E1	1.49947E1	2.37538E-9	2.51814E-3	2.51814E-3	6.32328E-3	2.18194E-2
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80009E1	-4.05312E-4	-8.8E1	1.19209E-4	5.19753E-3	9.33409E-2	1.57987E1	-1.98525E1	-1.9951E1	1.49908E1	2.3764E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.18104E-2