[Scan]
initial_time=2015-12-18T19:29:33
final_time=2015-12-18T19:29:54
ip_count=19
run=1020
dataset=0
scan=46
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.76826E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.3951E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.19354E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.00299E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.37782E-8
mult1=-7.21186E-9
mult2=-2.04304E-9
rf_tmon=-1.11915E-2
rf_agc=2.68581E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=6.54185E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64511E0
bslens_imon=2.49089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20103E1
lens5a_imon=1.9719E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52451E1
cs_ef1b_imon=2.82052E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05174E1
cs_ea1_imon=2.58185E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9969E0
lens1_imon=1.31567E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.96108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.5202E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.95423E-5
olens2_vset=0.0E0
olens2_vmon=1.40667E-3
olens2_imon=1.03263E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.31905E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24489E0
cs_ionrep_imon=1.18493E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=2.93837E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99989E1
olens4_imon=4.36077E-9
tplens_vset=0.0E0
tplens_vmon=-1.63062E0
tplens_imon=-4.79594E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99435E1
iondef3_imon=8.55802E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.97981E1
iondef2_imon=9.40879E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98241E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.53884E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=1.7401E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.16692E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74874E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20884E0
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02753E0
os_ef2alow_imon=-2.84655E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.50572E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=3.39031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.29315E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01617E1
cs_anode2_imon=2.26119E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57375E1
iondef1_imon=5.07203E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49862E1
iondef4_imon=5.08578E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.5157E-8
olens1_vset=0.0E0
olens1_vmon=8.10623E-4
olens1_imon=1.22288E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18E0
cs_ionaccel_imon=-1.83744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56675E1
einzel_imon=7.51485E-6
window_vset=0.0E0
window_vmon=1.71692E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.38814E-4
mask2_vset=0.0E0
mask2_vmon=-1.86128E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=7.14488E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93749E3
defgrida_imon=6.38063E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.95742E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46773E0
defgridb_imon=6.32656E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.39417E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61866E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.96359E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62744E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61966E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.76412E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.64194E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21998E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.16991E-2
chamber_ion_pmon=2.3764E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.90526E-1
res40_imon=-2.342E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=189
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.333E3	1.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80008E1	-5.72205E-4	-8.79999E1	0.0E0	5.43594E-3	9.35793E-2	1.58149E1	-1.98513E1	-1.99582E1	1.50046E1	2.37741E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.16252E-2
2.0E0	2.961E3	5.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80009E1	-5.72205E-4	-8.79998E1	-3.57628E-4	5.07832E-3	9.37223E-2	1.58062E1	-1.98594E1	-2.00051E1	1.50004E1	2.37538E-9	2.51359E-3	2.51359E-3	6.31858E-3	2.1676E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.8001E1	-4.76837E-4	-8.80003E1	-4.76837E-5	5.07832E-3	9.36508E-2	1.57792E1	-1.98695E1	-1.99958E1	1.503E1	2.37538E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.16501E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80013E1	-1.66893E-4	-8.8E1	0.0E0	4.95911E-3	9.36508E-2	1.5792E1	-1.98375E1	-1.99744E1	1.50268E1	2.37737E-9	2.52765E-3	2.52765E-3	6.31798E-3	2.16555E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80011E1	1.19209E-4	-8.79999E1	3.09944E-4	5.48363E-3	9.36031E-2	1.58035E1	-1.98561E1	-1.99468E1	1.50004E1	2.37641E-9	2.52867E-3	2.52867E-3	6.30192E-3	2.17255E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80007E1	-2.38419E-4	-8.79998E1	-9.53674E-5	5.53131E-3	9.36508E-2	1.57903E1	-1.98801E1	-1.99606E1	1.50136E1	2.37538E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.17822E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80006E1	-9.53674E-5	-8.8E1	1.90735E-4	5.29289E-3	9.35078E-2	1.58109E1	-1.98771E1	-1.99266E1	1.50276E1	2.37538E-9	2.52169E-3	2.52169E-3	6.29128E-3	2.16436E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80009E1	-1.43051E-4	-8.8E1	2.38419E-4	5.50747E-3	9.377E-2	1.58419E1	-1.98476E1	-1.99666E1	1.50022E1	2.37848E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.16689E-2
1.2E1	8.6E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.8001E1	-3.09944E-4	-8.79999E1	1.43051E-4	5.126E-3	9.34839E-2	1.57927E1	-1.98176E1	-1.99973E1	1.50094E1	2.37538E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.16689E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80006E1	-3.8147E-4	-8.8E1	4.29153E-4	5.36442E-3	9.38416E-2	1.58191E1	-1.98651E1	-1.99612E1	1.49998E1	2.37641E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.15938E-2
1.4E1	1.22E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80007E1	-5.72205E-4	-8.79999E1	3.09944E-4	5.96046E-3	9.377E-2	1.58167E1	-1.98594E1	-1.99861E1	1.50175E1	2.37741E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.16252E-2
1.5E1	6.2E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80009E1	-5.24521E-4	-8.79998E1	3.8147E-4	5.38826E-3	9.37939E-2	1.58209E1	-1.98682E1	-1.99661E1	1.50039E1	2.37538E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.15994E-2
1.6E1	3.42E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80011E1	-6.4373E-4	-8.8E1	1.19209E-4	5.126E-3	9.36747E-2	1.57507E1	-1.98187E1	-2.00104E1	1.50256E1	2.3764E-9	2.5131E-3	2.5131E-3	6.32896E-3	2.16991E-2
1.7E1	7.36E2	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80012E1	-5.96046E-4	-8.80001E1	3.09944E-4	5.19753E-3	9.33886E-2	1.57843E1	-1.98561E1	-1.99594E1	1.49986E1	2.37745E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.17066E-2
1.8E1	3.247E3	1.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80012E1	-3.57628E-4	-8.80002E1	1.90735E-4	5.05447E-3	9.38416E-2	1.57943E1	-1.98582E1	-1.99709E1	1.50004E1	2.37538E-9	2.51954E-3	2.51954E-3	6.33166E-3	2.17547E-2
1.9E1	1.803E3	3.0E0	7.68E2	5.29E2	-7.38649E-2	-8.8001E1	-4.76837E-5	-8.80004E1	2.6226E-4	4.62532E-3	9.37462E-2	1.57849E1	-1.98519E1	-1.99955E1	1.50022E1					
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80009E1	-2.6226E-4	-8.80003E1	5.00679E-4	5.19753E-3	9.377E-2	1.57957E1	-1.98531E1	-1.9954E1	1.49668E1	2.37538E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.17444E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80011E1	-9.53674E-5	-8.80003E1	3.33786E-4	5.03063E-3	9.38892E-2	1.58144E1	-1.9847E1	-1.99532E1	1.50028E1	2.37538E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.16313E-2
2.2E1	2.3E1	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80008E1	-2.14577E-4	-8.80002E1	5.72205E-4	5.24521E-3	9.38177E-2	1.58374E1	-1.9883E1	-1.99573E1	1.50093E1	2.3764E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.16252E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80011E1	-7.15256E-5	-8.80004E1	2.86102E-4	5.03063E-3	9.36985E-2	1.57375E1	-1.97981E1	-1.99435E1	1.49862E1	2.3764E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.16991E-2