[Scan]
initial_time=2015-12-18T19:31:26
final_time=2015-12-18T19:31:46
ip_count=19
run=1020
dataset=0
scan=50
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.82669E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.46341E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.20482E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.90005E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.37517E-8
mult1=-1.09613E-8
mult2=-2.71003E-9
rf_tmon=-4.5665E-3
rf_agc=3.37722E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=6.16813E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.36111E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20109E1
lens5a_imon=1.98415E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12551E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=2.82989E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=2.58762E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01071E0
lens1_imon=1.09938E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64488E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.55084E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84712E1
cs_ef1a_imon=2.93369E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=1.04066E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.31545E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15564E1
os_ea1_imon=2.367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22806E0
cs_ionrep_imon=1.17232E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93582E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.93152E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99991E1
olens4_imon=4.23224E-9
tplens_vset=0.0E0
tplens_vmon=-1.60358E0
tplens_imon=-4.65174E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99867E1
iondef3_imon=8.68059E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98829E1
iondef2_imon=9.47008E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98256E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=8.87752E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24609E0
ionrepsh_imon=1.7693E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34108E1
lens5b_imon=2.17702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22266E0
os_ea2_imon=-7.49965E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00547E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.17119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02753E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23252E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=3.3986E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.29135E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23127E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57992E1
iondef1_imon=5.23426E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50238E1
iondef4_imon=5.24435E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.51094E-8
olens1_vset=0.0E0
olens1_vmon=9.05991E-4
olens1_imon=1.22566E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.90952E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47151E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.52566E-6
window_vset=0.0E0
window_vmon=1.66887E-1
window_imon=-1.14548E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.38987E-4
mask2_vset=0.0E0
mask2_vmon=-1.86128E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.64597E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.359E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=6.89614E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45269E0
defgridb_imon=6.09584E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.39441E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06668E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61554E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.92816E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61447E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62449E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.08894E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37679E-1
cs_fil2_imon=-2.82815E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22098E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.16067E-2
chamber_ion_pmon=2.37437E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.45186E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.369E3	2.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80012E1	0.0E0	-8.79997E1	9.53674E-5	5.14984E-3	9.33886E-2	1.57602E1	-1.98675E1	-1.99684E1	1.5016E1	2.37641E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.16689E-2
2.0E0	2.985E3	1.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80007E1	-2.14577E-4	-8.79999E1	0.0E0	5.4121E-3	9.35078E-2	1.57829E1	-1.98288E1	-1.99872E1	1.49996E1	2.37641E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.16501E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80008E1	9.53674E-5	-8.79999E1	4.76837E-5	5.19753E-3	9.34362E-2	1.57879E1	-1.98517E1	-1.99762E1	1.50364E1	2.37621E-9	2.51872E-3	2.51872E-3	6.30299E-3	2.16566E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80017E1	-1.90735E-4	-8.79998E1	1.19209E-4	5.36442E-3	9.31978E-2	1.57789E1	-1.99089E1	-1.9951E1	1.49974E1	2.37944E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.16621E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80013E1	1.90735E-4	-8.79999E1	9.53674E-5	5.53131E-3	9.36031E-2	1.57896E1	-1.98753E1	-1.99593E1	1.50281E1	2.37641E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.17255E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80015E1	4.76837E-5	-8.80005E1	1.90735E-4	5.57899E-3	9.32217E-2	1.57686E1	-1.98789E1	-1.99107E1	1.4988E1	2.37538E-9	2.52342E-3	2.52342E-3	6.32328E-3	2.15831E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80013E1	-9.53674E-5	-8.80002E1	1.90735E-4	5.24521E-3	9.32217E-2	1.58167E1	-1.98603E1	-1.99684E1	1.5016E1	2.37538E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.16125E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80007E1	-1.19209E-4	-8.79998E1	1.90735E-4	4.95911E-3	9.37223E-2	1.57767E1	-1.99113E1	-1.99083E1	1.498E1	2.37641E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.16125E-2
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80008E1	-3.09944E-4	-8.8E1	3.8147E-4	5.26905E-3	9.36031E-2	1.57763E1	-1.98288E1	-1.99328E1	1.5028E1	2.37741E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.17176E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80012E1	-5.96046E-4	-8.8E1	1.90735E-4	5.50747E-3	9.34601E-2	1.57987E1	-1.98675E1	-1.99876E1	1.50058E1	2.37643E-9	2.51581E-3	2.51581E-3	6.33538E-3	2.1676E-2
1.4E1	1.23E2	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80014E1	-1.90735E-4	-8.8E1	2.6226E-4	5.29289E-3	9.3627E-2	1.58113E1	-1.98579E1	-1.9987E1	1.50088E1	2.37745E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.18201E-2
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80012E1	-4.76837E-4	-8.79998E1	7.15256E-5	5.36442E-3	9.35555E-2	1.58005E1	-1.98549E1	-1.99654E1	1.49944E1	2.37538E-9	2.52977E-3	2.52977E-3	6.31288E-3	2.17444E-2
1.6E1	3.06E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80013E1	-3.57628E-4	-8.8E1	2.86102E-4	5.38826E-3	9.3174E-2	1.57897E1	-1.98655E1	-1.99806E1	1.49947E1					
1.7E1	7.92E2	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80007E1	-1.90735E-4	-8.80001E1	4.29153E-4	5.26905E-3	9.31025E-2	1.58116E1	-1.98573E1	-1.99726E1	1.50282E1	2.37538E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.16501E-2
1.8E1	3.284E3	2.0E0	7.27E2	5.0E2	-7.41738E-2	-8.80009E1	-2.86102E-4	-8.79998E1	2.14577E-4	5.45979E-3	9.36508E-2	1.57903E1	-1.98612E1	-1.99732E1	1.50076E1	2.3764E-9	2.53246E-3	2.53246E-3	6.29665E-3	2.17176E-2
1.9E1	1.878E3	0.0E0	7.68E2	5.29E2	-7.44831E-2	-8.80011E1	4.76837E-5	-8.8E1	2.86102E-4	5.38826E-3	9.35555E-2	1.58059E1	-1.98344E1	-1.99185E1	1.4968E1	2.37538E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.16125E-2
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.8001E1	-2.6226E-4	-8.80004E1	-1.19209E-4	5.24521E-3	9.38892E-2	1.58215E1	-1.98717E1	-1.99591E1	1.50202E1	2.37538E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.17145E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80014E1	-3.8147E-4	-8.80004E1	1.66893E-4	4.88758E-3	9.39131E-2	1.58059E1	-1.98476E1	-2.00123E1	1.50172E1	2.37538E-9	2.52923E-3	2.52923E-3	6.3074E-3	2.16621E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80011E1	-2.14577E-4	-8.80001E1	3.8147E-4	5.31673E-3	9.34839E-2	1.57969E1	-1.98915E1	-1.99384E1	1.50016E1	2.37538E-9	2.51116E-3	2.51116E-3	6.31837E-3	2.15938E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80012E1	-1.66893E-4	-8.80001E1	2.6226E-4	5.14984E-3	9.37223E-2	1.57992E1	-1.98829E1	-1.99867E1	1.50238E1	2.37437E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.16067E-2