[Scan]
initial_time=2015-12-18T19:31:53
final_time=2015-12-18T19:32:14
ip_count=19
run=1020
dataset=0
scan=51
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.82465E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.72996E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.20121E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.95082E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=1.38E-8
mult1=-9.35259E-9
mult2=-2.64668E-9
rf_tmon=-4.6318E-3
rf_agc=3.30223E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=6.42145E-10
bslens_vset=-6.2E0
bslens_vmon=-6.73103E0
bslens_imon=2.36832E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18703E1
lens5a_imon=1.91169E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05522E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=2.83205E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04775E2
lens23_imon=1.02272E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04207E1
cs_ea1_imon=2.52093E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99569E0
lens1_imon=1.80955E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.96252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04988E1
cs_ea2_imon=1.59554E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=2.929E-5
olens2_vset=0.0E0
olens2_vmon=1.4782E-3
olens2_imon=1.04051E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.30932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15354E1
os_ea1_imon=2.29887E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.12893E0
cs_ionrep_imon=1.16114E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91958E2
cs_nozzle_imon=1.94026E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.93657E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99987E1
olens4_imon=4.17088E-9
tplens_vset=0.0E0
tplens_vmon=-1.67027E0
tplens_imon=-4.111E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99812E1
iondef3_imon=8.11822E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9901E1
iondef2_imon=9.92791E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0307E2
lens6_imon=2.98739E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=8.94868E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24128E0
ionrepsh_imon=1.70585E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33081E1
lens5b_imon=2.17485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29536E0
os_ea2_imon=-1.26308E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=1.99988E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71504E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05576E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60784E-1
os_ef2bup_imon=-5.45943E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10703E1
os_restr2_imon=3.39427E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22985E2
cs_ionfoca_imon=6.28486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.24353E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57983E1
iondef1_imon=5.66325E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50136E1
iondef4_imon=5.12902E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.51068E-8
olens1_vset=0.0E0
olens1_vmon=1.21593E-3
olens1_imon=1.22471E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-1.97079E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=1.27243E-1
window_imon=-1.14909E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92685E3
multa_neg_imon=7.98484E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9363E3
defgrida_imon=6.02014E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=6.53564E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59104E0
defgridb_imon=6.73031E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33363E1
os_fil1_imon=9.4006E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07569E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61694E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30865E1
cs_fil1_imon=9.93993E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63093E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62602E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.0232E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22173E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.18104E-2
chamber_ion_pmon=2.3764E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.73107E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.318E3	1.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80008E1	-1.66893E-4	-8.79997E1	3.57628E-4	5.14984E-3	9.31263E-2	1.58787E1	-1.99762E1	-1.99856E1	1.4995E1	2.37641E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.16689E-2
2.0E0	2.939E3	4.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80007E1	-2.38419E-5	-8.80002E1	3.57628E-4	5.48363E-3	9.33886E-2	1.58148E1	-1.9849E1	-1.99977E1	1.49894E1	2.37538E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.17547E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80009E1	-5.96046E-4	-8.8E1	2.6226E-4	5.29289E-3	9.33409E-2	1.57784E1	-1.98322E1	-1.99673E1	1.49992E1	2.37538E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.17915E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.8001E1	-4.05312E-4	-8.80002E1	4.52995E-4	5.4121E-3	9.3627E-2	1.57783E1	-1.98513E1	-1.99588E1	1.49944E1	2.37538E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.16621E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.8001E1	-2.6226E-4	-8.8E1	9.53674E-5	5.48363E-3	9.38177E-2	1.58056E1	-1.98358E1	-1.99797E1	1.49916E1	2.37745E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.16501E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80013E1	-3.33786E-4	-8.79996E1	1.19209E-4	5.126E-3	9.3627E-2	1.58083E1	-1.98669E1	-1.99564E1	1.50116E1	2.37538E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.15883E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80011E1	-5.00679E-4	-8.80001E1	2.14577E-4	5.14984E-3	9.34362E-2	1.57716E1	-1.98398E1	-2.00111E1	1.5004E1	2.37538E-9	2.52209E-3	2.52209E-3	6.34588E-3	2.16125E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80008E1	-5.24521E-4	-8.80001E1	3.09944E-4	5.19753E-3	9.38177E-2	1.58227E1	-1.98855E1	-1.99564E1	1.50238E1	2.37641E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.1575E-2
1.2E1	9.1E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80016E1	-4.52995E-4	-8.79999E1	9.53674E-5	5.10216E-3	9.3627E-2	1.57843E1	-1.9835E1	-1.99582E1	1.5007E1	2.3764E-9	2.52169E-3	2.52169E-3	6.28592E-3	2.16436E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80016E1	-6.91414E-4	-8.79999E1	0.0E0	5.67436E-3	9.36031E-2	1.57985E1	-1.98594E1	-1.9995E1	1.50136E1	2.37643E-9	2.52362E-3	2.52362E-3	6.30182E-3	2.16186E-2
1.4E1	1.15E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80019E1	-5.96046E-4	-8.80004E1	4.76837E-5	5.36442E-3	9.37223E-2	1.58197E1	-1.98452E1	-1.99594E1	1.50064E1	2.37741E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.16436E-2
1.5E1	4.8E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80018E1	-5.24521E-4	-8.80001E1	1.19209E-4	5.48363E-3	9.36985E-2	1.58095E1	-1.98975E1	-1.99594E1	1.50112E1	2.37951E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.17633E-2
1.6E1	3.19E2	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80018E1	-4.29153E-4	-8.79999E1	9.53674E-5	5.07832E-3	9.35078E-2	1.58079E1	-1.98659E1	-1.99832E1	1.50248E1	2.37538E-9	2.52757E-3	2.52757E-3	6.29645E-3	2.17255E-2
1.7E1	7.63E2	1.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80016E1	-3.8147E-4	-8.8E1	7.15256E-5	5.36442E-3	9.37462E-2	1.57567E1	-1.98477E1	-1.99849E1	1.50172E1	2.37538E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.15515E-2
1.8E1	3.272E3	1.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80017E1	-4.29153E-4	-8.80002E1	-1.19209E-4	5.126E-3	9.38416E-2	1.58191E1	-1.98699E1	-1.99696E1	1.50142E1	2.37538E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.18301E-2
1.9E1	1.854E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80018E1	-1.66893E-4	-8.80003E1	1.66893E-4	5.29289E-3	9.39131E-2	1.58067E1	-1.98399E1	-1.99768E1	1.49976E1	2.37538E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.16313E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80018E1	-1.66893E-4	-8.8E1	2.14577E-4	5.17368E-3	9.36508E-2	1.5771E1	-1.98723E1	-1.99564E1	1.50359E1	2.37538E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.15331E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80018E1	-2.6226E-4	-8.80001E1	1.90735E-4	5.31673E-3	9.35316E-2	1.58029E1	-1.9838E1	-1.99858E1	1.49964E1	2.37641E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.16313E-2
2.2E1	7.0E0	0.0E0	8.89E2	6.17E2	-7.39421E-2	-8.80018E1	-2.38419E-5	-8.80002E1	-2.38419E-5	5.48363E-3	9.377E-2	1.57849E1	-1.98381E1	-1.99508E1	1.5016E1	2.37641E-9	2.52977E-3	2.52977E-3	6.32386E-3	2.16878E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80018E1	-2.86102E-4	-8.80001E1	-1.43051E-4	5.29289E-3	9.37223E-2	1.57983E1	-1.9901E1	-1.99812E1	1.50136E1	2.3764E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.18104E-2