[Scan]
initial_time=2015-12-18T19:33:16
final_time=2015-12-18T19:33:36
ip_count=19
run=1020
dataset=0
scan=54
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.82164E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.82271E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.21607E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.95652E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.38869E-8
mult1=-8.60426E-9
mult2=-2.59787E-9
rf_tmon=-3.38299E-3
rf_agc=3.40017E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=6.31058E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67215E0
bslens_imon=2.51612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19749E1
lens5a_imon=1.96216E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.0523E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=2.82052E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05084E1
cs_ea1_imon=2.60493E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01732E0
lens1_imon=1.31207E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03919E1
cs_ea2_imon=1.53714E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84586E1
cs_ef1a_imon=2.91927E-5
olens2_vset=0.0E0
olens2_vmon=1.33514E-3
olens2_imon=1.03156E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=4.32554E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15005E1
os_ea1_imon=2.36988E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.06847E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=1.19034E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93276E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.92612E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99987E1
olens4_imon=4.23238E-9
tplens_vset=0.0E0
tplens_vmon=-1.62341E0
tplens_imon=-3.49815E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99824E1
iondef3_imon=8.67699E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98661E1
iondef2_imon=9.39798E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.35085E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=1.76065E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33916E1
lens5b_imon=2.17449E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.1056E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19983E0
os_ea2_imon=-6.81471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.73123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.44141E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11003E1
os_restr2_imon=3.37842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02049E1
cs_anode2_imon=2.24064E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57689E1
iondef1_imon=4.9711E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50443E1
iondef4_imon=5.11461E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.51093E-8
olens1_vset=0.0E0
olens1_vmon=8.58307E-4
olens1_imon=1.20481E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-1.87348E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47122E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=1.48267E-1
window_imon=-1.14188E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.38947E-4
mask2_vset=0.0E0
mask2_vmon=-1.86128E1
mask2_imon=-8.06708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.5955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.82765E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.27827E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43465E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.39122E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0665E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60873E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30829E1
cs_fil1_imon=9.91284E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62005E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61696E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.26553E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37938E-1
cs_fil2_imon=-2.64194E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21918E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.16806E-2
chamber_ion_pmon=2.3764E-9
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.47279E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.349E3	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80011E1	-3.09944E-4	-8.79997E1	0.0E0	5.34058E-3	9.34362E-2	1.57938E1	-1.9857E1	-1.99826E1	1.50166E1	2.37641E-9	2.52428E-3	2.52428E-3	6.28006E-3	2.16878E-2
2.0E0	2.822E3	4.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80008E1	-6.19888E-4	-8.79998E1	2.38419E-4	5.57899E-3	9.32693E-2	1.58053E1	-1.98633E1	-1.99744E1	1.49908E1	2.37538E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.17732E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80011E1	-3.09944E-4	-8.80005E1	3.33786E-4	5.19753E-3	9.33886E-2	1.57949E1	-1.98535E1	-1.99927E1	1.50033E1	2.37643E-9	2.5225E-3	2.5225E-3	6.34661E-3	2.17529E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80012E1	-3.8147E-4	-8.80005E1	3.57628E-4	5.17368E-3	9.38177E-2	1.5807E1	-1.98585E1	-1.99448E1	1.50178E1	2.37638E-9	2.51709E-3	2.51709E-3	6.33388E-3	2.17464E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80011E1	-5.96046E-4	-8.80003E1	2.6226E-4	5.126E-3	9.34362E-2	1.57548E1	-1.98663E1	-1.9948E1	1.50029E1	2.37741E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.16621E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80011E1	-7.15256E-4	-8.80006E1	9.53674E-5	4.91142E-3	9.35793E-2	1.57787E1	-1.98496E1	-1.99653E1	1.49818E1	2.37745E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.17066E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.42513E-2	-8.80013E1	-8.10623E-4	-8.80003E1	2.38419E-5	5.03063E-3	9.35078E-2	1.5812E1	-1.98529E1	-1.99496E1	1.50508E1	2.37538E-9	2.52977E-3	2.52977E-3	6.3074E-3	2.17066E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80012E1	-6.67572E-4	-8.8E1	4.76837E-5	5.26905E-3	9.35316E-2	1.57837E1	-1.98603E1	-1.99961E1	1.50184E1	2.37538E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.15563E-2
1.2E1	8.6E1	0.0E0	4.85E2	3.23E2	-7.45602E-2	-8.8001E1	-5.48363E-4	-8.8E1	4.76837E-5	5.17368E-3	9.37939E-2	1.57977E1	-1.98457E1	-1.99379E1	1.499E1	2.3764E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.16436E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.44831E-2	-8.8001E1	-9.53674E-5	-8.80001E1	3.33786E-4	5.22137E-3	9.36747E-2	1.58105E1	-1.98753E1	-1.99567E1	1.50203E1	2.37842E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.16621E-2
1.4E1	9.9E1	0.0E0	5.66E2	3.82E2	-7.43285E-2	-8.80009E1	-5.96046E-4	-8.8E1	3.8147E-4	5.38826E-3	9.39369E-2	1.57654E1	-1.98411E1	-2.00098E1	1.5034E1	2.37538E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.17822E-2
1.5E1	8.1E1	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80011E1	-4.05312E-4	-8.80002E1	3.33786E-4	5.45979E-3	9.39369E-2	1.57784E1	-1.98411E1	-1.99585E1	1.4968E1	2.37641E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.15189E-2
1.6E1	3.08E2	0.0E0	6.47E2	4.41E2	-7.42513E-2	-8.80011E1	-4.76837E-4	-8.80003E1	1.66893E-4	5.65052E-3	9.36985E-2	1.58293E1	-1.98693E1	-1.99654E1	1.49902E1	2.37741E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.17547E-2
1.7E1	7.81E2	1.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80011E1	-4.76837E-4	-8.8E1	3.8147E-4	5.50747E-3	9.36985E-2	1.57867E1	-1.98712E1	-1.99496E1	1.50016E1	2.37538E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.18011E-2
1.8E1	3.284E3	1.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80011E1	-5.72205E-4	-8.8E1	3.57628E-4	5.17368E-3	9.36031E-2	1.57916E1	-1.9841E1	-1.99653E1	1.50029E1	2.37538E-9	2.52236E-3	2.52236E-3	6.30212E-3	2.16011E-2
1.9E1	1.883E3	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80012E1	-4.76837E-4	-8.80003E1	-1.43051E-4	5.67436E-3	9.36508E-2	1.57735E1	-1.98657E1	-1.99702E1	1.5016E1	2.37645E-9	2.51952E-3	2.51952E-3	6.3131E-3	2.17618E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80012E1	-4.05312E-4	-8.79999E1	2.14577E-4	5.36442E-3	9.36985E-2	1.58203E1	-1.98712E1	-1.99685E1	1.50116E1	2.37641E-9	2.52867E-3	2.52867E-3	6.31288E-3	2.17444E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80011E1	-2.6226E-4	-8.80001E1	2.38419E-5	5.65052E-3	9.34839E-2	1.58307E1	-1.98735E1	-1.99371E1	1.49869E1	2.37741E-9	2.52923E-3	2.52923E-3	6.30202E-3	2.15883E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80013E1	-1.19209E-4	-8.80001E1	2.14577E-4	5.57899E-3	9.35078E-2	1.57844E1	-1.98527E1	-1.99999E1	1.49976E1	2.37641E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.17444E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80013E1	0.0E0	-8.80002E1	2.38419E-5	5.31673E-3	9.35316E-2	1.57689E1	-1.98661E1	-1.99824E1	1.50443E1	2.3764E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.16806E-2