[Scan]
initial_time=2015-12-18T19:33:44
final_time=2015-12-18T19:34:04
ip_count=19
run=1020
dataset=0
scan=55
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.80789E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-6.51431E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=1.24123E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.02547E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.38773E-8
mult1=-9.59393E-9
mult2=-2.75657E-9
rf_tmon=-5.34714E-3
rf_agc=3.39108E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=5.91481E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64708E0
bslens_imon=2.58346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19939E1
lens5a_imon=1.97215E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05034E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53088E1
cs_ef1b_imon=2.80502E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=2.58444E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99615E0
lens1_imon=1.39342E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03641E1
cs_ea2_imon=1.52038E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.92612E-5
olens2_vset=0.0E0
olens2_vmon=1.40667E-3
olens2_imon=1.02524E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11105E1
os_restr1_imon=4.32374E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15379E1
os_ea1_imon=2.36406E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.06775E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29128E0
cs_ionrep_imon=1.18908E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93266E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.91062E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99988E1
olens4_imon=4.28134E-9
tplens_vset=0.0E0
tplens_vmon=-1.59552E0
tplens_imon=-5.82641E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99815E1
iondef3_imon=8.82017E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98476E1
iondef2_imon=9.45192E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98394E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.69489E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28699E0
ionrepsh_imon=1.74921E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33695E1
lens5b_imon=2.18151E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20435E0
os_ea2_imon=-6.08352E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71546E1
cs_ef2a_imon=3.18272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03654E0
os_ef2alow_imon=-2.68798E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85411E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.38346E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.30369E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23992E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58091E1
iondef1_imon=5.07373E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50057E1
iondef4_imon=5.12182E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.5046E-8
olens1_vset=0.0E0
olens1_vmon=8.10623E-4
olens1_imon=1.20716E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15717E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47075E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.52206E-6
window_vset=0.0E0
window_vmon=1.6929E-1
window_imon=-1.1635E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.60441E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.31887E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=6.87349E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22276E0
defgridb_imon=6.04707E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33369E1
os_fil1_imon=9.39651E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.062E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60858E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.93927E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6275E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61707E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46282E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74288E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.37458E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38456E-1
cs_fil2_imon=-2.80412E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.2176E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22046E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.17732E-2
chamber_ion_pmon=2.37741E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.80005E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.34E3	1.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80007E1	-3.8147E-4	-8.80003E1	4.76837E-4	5.26905E-3	9.37462E-2	1.5796E1	-1.98666E1	-2.00062E1	1.50256E1	2.37643E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.15803E-2
2.0E0	2.985E3	6.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80009E1	-7.15256E-5	-8.80002E1	3.57628E-4	5.24521E-3	9.35078E-2	1.57855E1	-1.98611E1	-1.99738E1	1.49941E1	2.3764E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.17176E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80007E1	-3.8147E-4	-8.79998E1	2.38419E-5	5.19753E-3	9.34124E-2	1.58073E1	-1.9847E1	-1.99826E1	1.49827E1	2.37538E-9	2.52276E-3	2.52276E-3	6.34518E-3	2.16067E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80008E1	-1.90735E-4	-8.80002E1	2.86102E-4	5.126E-3	9.3317E-2	1.57933E1	-1.98753E1	-1.996E1	1.50122E1	2.37538E-9	2.52169E-3	2.52169E-3	6.28056E-3	2.16621E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80011E1	-7.15256E-5	-8.79999E1	1.66893E-4	5.26905E-3	9.37223E-2	1.58138E1	-1.98594E1	-1.99667E1	1.5022E1	2.3764E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.16436E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.42513E-2	-8.80012E1	2.14577E-4	-8.80001E1	1.43051E-4	5.26905E-3	9.3627E-2	1.58053E1	-1.98591E1	-1.99858E1	1.50443E1	2.37641E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.16313E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.42513E-2	-8.80012E1	-1.90735E-4	-8.79997E1	7.15256E-5	5.24521E-3	9.36031E-2	1.58067E1	-1.98417E1	-1.99756E1	1.50022E1	2.37538E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.15938E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.8001E1	-1.90735E-4	-8.80001E1	-1.43051E-4	5.17368E-3	9.36031E-2	1.57891E1	-1.9819E1	-1.99494E1	1.49791E1	2.37538E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.17547E-2
1.2E1	7.3E1	0.0E0	4.85E2	3.23E2	-7.44059E-2	-8.80008E1	2.86102E-4	-8.80002E1	-1.43051E-4	5.50747E-3	9.34124E-2	1.57849E1	-1.98564E1	-1.9952E1	1.50068E1	2.37538E-9	2.52757E-3	2.52757E-3	6.30192E-3	2.16501E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80009E1	-4.76837E-5	-8.80003E1	9.53674E-5	5.38826E-3	9.35555E-2	1.57861E1	-1.98338E1	-1.99949E1	1.50052E1	2.37538E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.16689E-2
1.4E1	9.5E1	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.8001E1	-1.19209E-4	-8.80001E1	-1.90735E-4	5.65052E-3	9.32932E-2	1.58059E1	-1.98897E1	-1.9954E1	1.50034E1	2.37538E-9	2.52384E-3	2.52384E-3	6.29665E-3	2.16436E-2
1.5E1	5.0E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80011E1	1.43051E-4	-8.80001E1	1.90735E-4	5.62668E-3	9.36985E-2	1.57873E1	-1.98458E1	-1.99834E1	1.4989E1	2.37538E-9	2.52027E-3	2.52027E-3	6.29067E-3	2.16377E-2
1.6E1	3.16E2	0.0E0	6.47E2	4.41E2	-7.39421E-2	-8.8001E1	-9.53674E-5	-8.80001E1	7.15256E-5	5.34058E-3	9.37223E-2	1.58215E1	-1.98948E1	-1.99567E1	1.50178E1	2.37538E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.17547E-2
1.7E1	7.5E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80011E1	-2.38419E-5	-8.80001E1	3.57628E-4	5.38826E-3	9.37462E-2	1.58131E1	-1.98735E1	-1.99732E1	1.50028E1	2.37538E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.17066E-2
1.8E1	3.242E3	4.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80012E1	-3.57628E-4	-8.79997E1	3.09944E-4	5.34058E-3	9.40084E-2	1.58227E1	-1.98507E1	-1.99858E1	1.50304E1	2.37538E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.16252E-2
1.9E1	1.865E3	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.8001E1	-4.76837E-4	-8.79998E1	2.14577E-4	5.29289E-3	9.36985E-2	1.58014E1	-1.98659E1	-1.99655E1	1.50086E1	2.37538E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.16125E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.8001E1	-2.6226E-4	-8.79996E1	2.38419E-5	5.29289E-3	9.39131E-2	1.57849E1	-1.98747E1	-1.996E1	1.5022E1	2.37741E-9	2.52707E-3	2.52707E-3	6.34518E-3	2.16621E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.8001E1	0.0E0	-8.79996E1	7.15256E-5	5.36442E-3	9.38416E-2	1.58152E1	-1.98667E1	-2.00187E1	1.49836E1	2.37641E-9	2.52757E-3	2.52757E-3	6.32386E-3	2.15189E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80011E1	7.15256E-5	-8.79998E1	7.15256E-5	4.95911E-3	9.37939E-2	1.57969E1	-1.98314E1	-1.99678E1	1.50376E1	2.38036E-9	2.52659E-3	2.52659E-3	6.3074E-3	2.16736E-2
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80007E1	-4.76837E-5	-8.79997E1	-1.19209E-4	5.29289E-3	9.34839E-2	1.58091E1	-1.98476E1	-1.99815E1	1.50057E1	2.37741E-9	2.51954E-3	2.51954E-3	6.29128E-3	2.17732E-2