[Scan]
initial_time=2015-12-18T19:34:11
final_time=2015-12-18T19:34:31
ip_count=19
run=1020
dataset=0
scan=56
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.84781E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-7.00653E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.21063E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.92622E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.39058E-8
mult1=-9.16244E-9
mult2=-2.63478E-9
rf_tmon=-4.33819E-3
rf_agc=3.32615E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=6.11854E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.44402E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19911E1
lens5a_imon=1.98091E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=2.8234E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0485E1
cs_ea1_imon=2.59591E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02273E0
lens1_imon=1.30486E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.52668E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.93621E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=1.02533E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.32842E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.3706E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27072E0
cs_ionrep_imon=1.17881E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93301E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.91747E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99989E1
olens4_imon=4.24168E-9
tplens_vset=0.0E0
tplens_vmon=-1.58375E0
tplens_imon=-4.39939E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00045E1
iondef3_imon=8.60489E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98693E1
iondef2_imon=9.24657E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.37576E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27493E0
ionrepsh_imon=1.74803E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33724E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7491E1
cs_ef2b_imon=3.11821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20403E0
os_ea2_imon=-7.49965E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00677E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.16758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5778E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=3.39067E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.29135E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.25073E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57897E1
iondef1_imon=4.99633E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5019E1
iondef4_imon=5.17227E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.50824E-8
olens1_vset=0.0E0
olens1_vmon=8.82149E-4
olens1_imon=1.20724E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.183E0
cs_ionaccel_imon=-1.73293E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47161E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.62657E-6
window_vset=0.0E0
window_vmon=1.24841E-1
window_imon=-1.17431E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-7.70669E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.67121E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.66182E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=6.94301E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42562E0
defgridb_imon=5.94443E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.41045E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05635E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30895E1
cs_fil1_imon=9.9544E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6287E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61437E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28007E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31709E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21781E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.18201E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.22361E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.327E3	1.0E0	1.47E2	4.1E1	-7.44059E-2	-8.80012E1	4.76837E-5	-8.8E1	1.43051E-4	5.07832E-3	9.36508E-2	1.58161E1	-1.98422E1	-1.99762E1	1.50352E1	2.37435E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.18011E-2
2.0E0	2.882E3	4.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80009E1	-1.90735E-4	-8.79998E1	4.76837E-5	5.14984E-3	9.32932E-2	1.58329E1	-1.98633E1	-1.99618E1	1.50358E1	2.37741E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.18104E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80006E1	-2.38419E-5	-8.79997E1	2.38419E-5	5.17368E-3	9.34601E-2	1.58274E1	-1.9844E1	-1.99756E1	1.49877E1	2.37643E-9	2.5225E-3	2.5225E-3	6.35223E-3	2.17722E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.39421E-2	-8.8001E1	-3.57628E-4	-8.79997E1	0.0E0	5.19753E-3	9.35078E-2	1.57796E1	-1.98576E1	-1.99425E1	1.49944E1	2.37737E-9	2.51498E-3	2.51498E-3	6.30212E-3	2.16736E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80007E1	-3.09944E-4	-8.79999E1	3.09944E-4	5.34058E-3	9.35078E-2	1.58013E1	-1.98473E1	-1.9986E1	1.49977E1	2.37848E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.17066E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80011E1	-2.86102E-4	-8.8E1	-2.38419E-5	5.45979E-3	9.35555E-2	1.58165E1	-1.98231E1	-2.00082E1	1.49979E1	2.37538E-9	2.51956E-3	2.51956E-3	6.3023E-3	2.18188E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80008E1	-5.72205E-4	-8.79998E1	3.57628E-4	5.53131E-3	9.36031E-2	1.58271E1	-1.9882E1	-1.99787E1	1.50116E1	2.37538E-9	2.52106E-3	2.52106E-3	6.32483E-3	2.16114E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.8001E1	-4.52995E-4	-8.79998E1	2.86102E-4	5.19753E-3	9.35316E-2	1.58125E1	-1.98765E1	-1.99624E1	1.50322E1	2.37641E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.15938E-2
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.8001E1	-2.38419E-5	-8.8E1	2.38419E-4	5.53131E-3	9.33886E-2	1.58067E1	-1.98629E1	-1.99768E1	1.49993E1	2.37641E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.15938E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80011E1	-3.57628E-4	-8.8E1	5.00679E-4	5.24521E-3	9.37223E-2	1.57969E1	-1.98741E1	-1.99738E1	1.50088E1	2.37641E-9	2.53087E-3	2.53087E-3	6.34037E-3	2.16878E-2
1.4E1	9.8E1	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80008E1	-1.90735E-4	-8.80001E1	5.00679E-4	5.38826E-3	9.36985E-2	1.57997E1	-1.98735E1	-1.99874E1	1.50028E1	2.3764E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.16621E-2
1.5E1	6.1E1	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.8001E1	-2.38419E-4	-8.8E1	3.33786E-4	5.29289E-3	9.35316E-2	1.58101E1	-1.98807E1	-1.99654E1	1.49956E1	2.37538E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.17361E-2
1.6E1	3.14E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.8001E1	-3.33786E-4	-8.79999E1	3.09944E-4	5.36442E-3	9.3627E-2	1.58155E1	-1.98416E1	-1.99702E1	1.50178E1	2.37643E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.15994E-2
1.7E1	7.24E2	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80009E1	-5.24521E-4	-8.80003E1	2.14577E-4	5.60284E-3	9.36985E-2	1.58056E1	-1.9892E1	-1.99773E1	1.50089E1	2.37641E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.16689E-2
1.8E1	3.254E3	4.0E0	7.27E2	5.0E2	-7.26282E-2	-8.8001E1	2.38419E-5	-8.80002E1	-1.19209E-4	5.76973E-3	9.37223E-2	1.58101E1	-1.98651E1	-1.99816E1	1.50136E1	2.37627E-9	2.52084E-3	2.52084E-3	6.3121E-3	2.1712E-2
1.9E1	1.855E3	2.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80011E1	2.6226E-4	-8.79999E1	2.14577E-4	5.57899E-3	9.33647E-2	1.57825E1	-1.98603E1	-1.99714E1	1.4992E1	2.37745E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.19151E-2
2.0E1	2.2E1	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80011E1	0.0E0	-8.8E1	3.57628E-4	5.36442E-3	9.37462E-2	1.58143E1	-1.98416E1	-1.99762E1	1.5031E1	2.37538E-9	2.52757E-3	2.52757E-3	6.32936E-3	2.17633E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80008E1	-2.86102E-4	-8.79998E1	1.66893E-4	5.36442E-3	9.38654E-2	1.57761E1	-1.98417E1	-1.99832E1	1.5012E1	2.37538E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.17066E-2
2.2E1	4.0E0	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80012E1	-4.52995E-4	-8.80002E1	1.90735E-4	5.34058E-3	9.34362E-2	1.5838E1	-1.987E1	-1.99803E1	1.50226E1	2.37741E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.16991E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80012E1	-7.86781E-4	-8.8E1	2.38419E-4	5.50747E-3	9.35555E-2	1.57897E1	-1.98693E1	-2.00045E1	1.5019E1	2.37538E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.18201E-2