[Scan]
initial_time=2015-12-18T19:36:13
final_time=2015-12-18T19:36:33
ip_count=19
run=1020
dataset=0
scan=60
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08843E-4
ql1_vset=
ql1_vmon=-8.17823E-1
ql1_imon=1.40765E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=1.96173E-9
ql3_vset=
ql3_vmon=-9.13079E0
ql3_imon=2.06484E-9
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-2.31385E-10
mult1=-8.44001E-9
mult2=-2.64875E-9
rf_tmon=-5.46774E-3
rf_agc=3.15371E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.65504E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63478E0
bslens_imon=2.43252E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.201E1
lens5a_imon=1.97167E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04935E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53986E1
cs_ef1b_imon=2.82645E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02147E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05063E1
cs_ea1_imon=2.5875E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3607E0
lens1_imon=2.60098E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64571E1
os_ef1alow_imon=2.96905E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04083E1
cs_ea2_imon=1.52806E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84132E1
cs_ef1a_imon=2.92975E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.24361E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11335E1
os_restr1_imon=4.31263E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1495E1
os_ea1_imon=2.38796E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63754E1
os_ef1bup_imon=3.07833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26832E0
cs_ionrep_imon=1.18552E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93435E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01952E1
cs_anode1_imon=2.91927E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20618E0
olens4_imon=3.23126E-8
tplens_vset=1.4E-1
tplens_vmon=1.58278E0
tplens_imon=-4.65035E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.48875E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.57485E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98305E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.91339E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2808E0
ionrepsh_imon=1.74893E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33895E1
lens5b_imon=2.1903E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74601E1
cs_ef2b_imon=3.12624E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38562E0
os_ea2_imon=-7.27088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00585E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71326E1
cs_ef2a_imon=3.17601E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09697E0
os_ef2alow_imon=-2.72776E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67691E-1
os_ef2bup_imon=-5.50476E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10824E1
os_restr2_imon=3.39832E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.29067E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01853E1
cs_anode2_imon=2.23625E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72859E1
iondef1_imon=1.08032E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.08241E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.96199E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.52365E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14262E0
cs_ionaccel_imon=-1.70229E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47032E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56418E1
einzel_imon=7.72152E-6
window_vset=0.0E0
window_vmon=1.60211E-1
window_imon=-1.20453E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.38923E-4
mask2_vset=0.0E0
mask2_vmon=-1.86088E1
mask2_imon=-6.91797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.0933E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.37453E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.35161E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24945E0
defgridb_imon=6.04884E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33359E1
os_fil1_imon=9.41902E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06069E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60848E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30853E1
cs_fil1_imon=9.94929E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62334E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61404E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43831E-2
os_fil2_imon=-2.68122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.75374E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.49051E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36912E-1
cs_fil2_imon=-2.28201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.11859E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21841E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33919E-3
inlet_lpb_pmon=2.16918E-2
chamber_ion_pmon=2.37837E-9
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.8683E-1
res40_imon=-2.50321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.18372E-1	-7.98059E-1	-9.13088E0	-9.14199E0	5.03063E-3	9.3627E-2	2.73175E1	-3.26897E1	-3.26248E1	2.68106E1	2.37431E-9	2.51952E-3	2.51952E-3	6.3245E-3	2.15275E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.18324E-1	-7.97939E-1	-9.13095E0	-9.14209E0	4.98295E-3	9.36508E-2	2.73345E1	-3.26777E1	-3.26464E1	2.68106E1	2.37589E-9	2.5208E-3	2.5208E-3	6.3074E-3	2.16096E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.18157E-1	-7.98011E-1	-9.13079E0	-9.14164E0	5.26905E-3	9.34362E-2	2.73116E1	-3.26543E1	-3.26343E1	2.67856E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.17895E-1	-7.98011E-1	-9.13069E0	-9.14204E0	4.93526E-3	9.37462E-2	2.73201E1	-3.26849E1	-3.26242E1	2.68004E1	2.37538E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.16436E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.18086E-1	-7.98059E-1	-9.13098E0	-9.14176E0	5.03063E-3	9.36985E-2	2.73255E1	-3.26663E1	-3.26344E1	2.6822E1	2.37745E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.17822E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.18205E-1	-7.98178E-1	-9.13098E0	-9.14199E0	5.19753E-3	9.36985E-2	2.72847E1	-3.26621E1	-3.26116E1	2.68262E1	2.37641E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.17066E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.18157E-1	-7.98035E-1	-9.13072E0	-9.14211E0	5.26905E-3	9.32693E-2	2.73163E1	-3.26632E1	-3.26254E1	2.68148E1	2.37538E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.15938E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.18181E-1	-7.98416E-1	-9.13069E0	-9.14202E0	5.34058E-3	9.34124E-2	2.72744E1	-3.26787E1	-3.25855E1	2.68163E1	2.3764E-9	2.52384E-3	2.52384E-3	6.33977E-3	2.17732E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.18563E-1	-7.98512E-1	-9.1311E0	-9.14197E0	5.34058E-3	9.36747E-2	2.72889E1	-3.26622E1	-3.26522E1	2.68076E1	2.37538E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.16374E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.18467E-1	-7.98178E-1	-9.13143E0	-9.14185E0	5.17368E-3	9.35078E-2	2.73098E1	-3.2675E1	-3.26301E1	2.6774E1	2.3786E-9	2.51611E-3	2.51611E-3	6.29603E-3	2.16248E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.18443E-1	-7.97939E-1	-9.13119E0	-9.1418E0	5.07832E-3	9.35793E-2	2.73167E1	-3.26701E1	-3.26707E1	2.68126E1	2.37538E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.16689E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.18205E-1	-7.98392E-1	-9.13084E0	-9.14218E0	5.07832E-3	9.33409E-2	2.73057E1	-3.27023E1	-3.26224E1	2.68088E1	2.37538E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.16501E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.18062E-1	-7.98559E-1	-9.13098E0	-9.14185E0	5.07832E-3	9.3174E-2	2.72815E1	-3.26626E1	-3.26231E1	2.68035E1	2.37641E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.17444E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.18038E-1	-7.98178E-1	-9.13098E0	-9.14178E0	5.36442E-3	9.35555E-2	2.73123E1	-3.26693E1	-3.26609E1	2.68244E1	2.37538E-9	2.52276E-3	2.52276E-3	6.35059E-3	2.16621E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.18133E-1	-7.98392E-1	-9.13103E0	-9.14195E0	5.00679E-3	9.36031E-2	2.73086E1	-3.26691E1	-3.26189E1	2.68334E1	2.37641E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.15938E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.17871E-1	-7.98416E-1	-9.131E0	-9.14197E0	5.24521E-3	9.33886E-2	2.73169E1	-3.2639E1	-3.26325E1	2.6796E1	2.37538E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.17361E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.18062E-1	-7.98392E-1	-9.13081E0	-9.14199E0	5.34058E-3	9.34839E-2	2.73008E1	-3.26664E1	-3.26364E1	2.68094E1	2.3764E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.16436E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.1799E-1	-7.98392E-1	-9.13084E0	-9.14185E0	5.29289E-3	9.35555E-2	2.73141E1	-3.26669E1	-3.26272E1	2.6792E1	2.37538E-9	2.51804E-3	2.51804E-3	6.30182E-3	2.15803E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17919E-1	-7.98464E-1	-9.13072E0	-9.1419E0	5.29289E-3	9.34601E-2	2.72935E1	-3.26648E1	-3.26243E1	2.68128E1	2.37641E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.17633E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.17823E-1	-7.98297E-1	-9.13079E0	-9.14199E0	5.19753E-3	9.32932E-2	2.72859E1	-3.26849E1	-3.26416E1	2.67908E1	2.37837E-9	2.51919E-3	2.51919E-3	6.33919E-3	2.16918E-2