[Scan]
initial_time=2015-12-18T19:36:40
final_time=2015-12-18T19:37:00
ip_count=19
run=1020
dataset=0
scan=61
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.18491E-1
ql1_imon=1.40338E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.93855E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=1.74569E-9
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-1.81246E-10
mult1=-9.52366E-9
mult2=-2.71462E-9
rf_tmon=-4.7828E-3
rf_agc=3.38142E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.67884E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.39355E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=1.96721E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05028E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53394E1
cs_ef1b_imon=2.81944E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02067E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0509E1
cs_ea1_imon=2.59988E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38037E0
lens1_imon=2.59183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64849E1
os_ef1alow_imon=2.96504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.5256E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.93477E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.24489E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11652E1
os_restr1_imon=4.31004E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=2.36736E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.18674E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93236E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.92612E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2062E0
olens4_imon=3.2247E-8
tplens_vset=1.4E-1
tplens_vmon=1.55792E0
tplens_imon=-6.16582E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.49712E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02984E2
lens6_imon=2.98331E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=4.02565E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=1.75992E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.17305E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.11208E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.36205E0
os_ea2_imon=-6.38212E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71468E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07919E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75199E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=3.39535E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.31046E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.241E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72859E1
iondef1_imon=1.09769E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.06611E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.99108E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.5041E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-1.74374E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.5653E-6
window_vset=0.0E0
window_vmon=1.26042E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39016E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.46212E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.28548E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.14271E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.42138E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07305E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60954E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30853E1
cs_fil1_imon=9.9541E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63189E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61518E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42194E-2
os_fil2_imon=-2.85217E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.71285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45888E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38197E-1
cs_fil2_imon=-2.65395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.07965E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21816E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.16621E-2
chamber_ion_pmon=2.3764E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.00427E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.183E-1	-7.98178E-1	-9.13072E0	-9.14173E0	5.29289E-3	9.33409E-2	2.73039E1	-3.26248E1	-3.26344E1	2.68334E1	2.37745E-9	2.52647E-3	2.52647E-3	6.32386E-3	2.18011E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.18515E-1	-7.97987E-1	-9.13067E0	-9.14178E0	5.17368E-3	9.33409E-2	2.72916E1	-3.26321E1	-3.26468E1	2.67701E1	2.37538E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.18201E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09657E0	-8.1799E-1	-7.98488E-1	-9.13084E0	-9.14202E0	5.07832E-3	9.35078E-2	2.73216E1	-3.26482E1	-3.2663E1	2.67981E1	2.37538E-9	2.51359E-3	2.51359E-3	6.32978E-3	2.17722E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.17966E-1	-7.9813E-1	-9.13105E0	-9.14156E0	4.81606E-3	9.31978E-2	2.72909E1	-3.26638E1	-3.26231E1	2.68256E1	2.37636E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.17742E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.1799E-1	-7.98202E-1	-9.13095E0	-9.14183E0	5.00679E-3	9.31025E-2	2.73126E1	-3.26909E1	-3.26231E1	2.67804E1	2.37538E-9	2.52923E-3	2.52923E-3	6.32896E-3	2.1885E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.18014E-1	-7.98607E-1	-9.13079E0	-9.1419E0	5.10216E-3	9.32217E-2	2.7279E1	-3.26826E1	-3.25821E1	2.68088E1	2.37538E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.18011E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.17895E-1	-7.98416E-1	-9.13098E0	-9.14159E0	5.43594E-3	9.31025E-2	2.73033E1	-3.26332E1	-3.2629E1	2.68022E1	2.37648E-9	2.51758E-3	2.51758E-3	6.31321E-3	2.18714E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.17895E-1	-7.98416E-1	-9.13086E0	-9.14173E0	5.26905E-3	9.3174E-2	2.73192E1	-3.26891E1	-3.26327E1	2.681E1	2.37538E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.17066E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.17966E-1	-7.97939E-1	-9.13098E0	-9.14173E0	4.91142E-3	9.30786E-2	2.72644E1	-3.26667E1	-3.26231E1	2.67817E1	2.37538E-9	2.51693E-3	2.51693E-3	6.3074E-3	2.15803E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.18038E-1	-7.98297E-1	-9.1311E0	-9.14183E0	5.03063E-3	9.34124E-2	2.73316E1	-3.26508E1	-3.26166E1	2.68466E1	2.37538E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.16252E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.18276E-1	-7.98321E-1	-9.13119E0	-9.14207E0	5.17368E-3	9.34362E-2	2.72961E1	-3.26867E1	-3.26374E1	2.68184E1	2.37741E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.15699E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.17823E-1	-7.98273E-1	-9.13126E0	-9.14202E0	4.98295E-3	9.34362E-2	2.72781E1	-3.2644E1	-3.26939E1	2.67914E1	2.37641E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.16689E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.17847E-1	-7.98464E-1	-9.13146E0	-9.1418E0	5.17368E-3	9.37462E-2	2.73123E1	-3.26609E1	-3.26404E1	2.6795E1	2.37641E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.15938E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.17966E-1	-7.98726E-1	-9.13136E0	-9.14159E0	4.88758E-3	9.34839E-2	2.73213E1	-3.26819E1	-3.26182E1	2.68214E1	2.37641E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.16125E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.18086E-1	-7.98583E-1	-9.13126E0	-9.14164E0	5.19753E-3	9.38654E-2	2.73488E1	-3.2662E1	-3.26815E1	2.68221E1	2.37745E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.16313E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.18133E-1	-7.9844E-1	-9.13126E0	-9.14185E0	5.05447E-3	9.38177E-2	2.73249E1	-3.26777E1	-3.26561E1	2.68082E1	2.3764E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.17547E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.178E-1	-7.98368E-1	-9.13098E0	-9.14166E0	4.88758E-3	9.3627E-2	2.73327E1	-3.26627E1	-3.26326E1	2.67926E1	2.37538E-9	2.52318E-3	2.52318E-3	6.28552E-3	2.17822E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.1811E-1	-7.98297E-1	-9.1311E0	-9.14171E0	5.03063E-3	9.39369E-2	2.73122E1	-3.26472E1	-3.26431E1	2.68376E1	2.37538E-9	2.52538E-3	2.52538E-3	6.29645E-3	2.16878E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.18038E-1	-7.98607E-1	-9.131E0	-9.1418E0	5.24521E-3	9.35316E-2	2.73175E1	-3.26673E1	-3.26148E1	2.67949E1	2.37538E-9	2.52384E-3	2.52384E-3	6.35059E-3	2.16252E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.18491E-1	-7.98321E-1	-9.1311E0	-9.1418E0	5.19753E-3	9.36747E-2	2.72859E1	-3.26657E1	-3.26206E1	2.68166E1	2.3764E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.16621E-2