[Scan]
initial_time=2015-12-18T19:37:08
final_time=2015-12-18T19:37:28
ip_count=19
run=1020
dataset=0
scan=62
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08831E-4
ql1_vset=
ql1_vmon=-8.17251E-1
ql1_imon=1.38848E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.9925E-9
ql3_vset=
ql3_vmon=-9.13079E0
ql3_imon=1.42329E-9
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.42813E-10
mult1=-9.44025E-9
mult2=-2.72914E-9
rf_tmon=-4.29711E-3
rf_agc=3.47662E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.66855E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66385E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20084E1
lens5a_imon=1.97448E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05019E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52775E1
cs_ef1b_imon=2.80598E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.01979E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04805E1
cs_ea1_imon=2.60166E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33599E0
lens1_imon=2.51848E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64799E1
os_ef1alow_imon=2.96653E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03968E1
cs_ea2_imon=1.52179E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=2.929E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.24548E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.31285E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15364E1
os_ea1_imon=2.37656E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63693E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26095E0
cs_ionrep_imon=1.20926E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.9078E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20651E0
olens4_imon=3.22919E-8
tplens_vset=1.4E-1
tplens_vmon=1.56711E0
tplens_imon=-1.67929E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25812E1
iondef3_imon=1.4871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26691E1
iondef2_imon=1.58408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=3.95914E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24915E0
ionrepsh_imon=1.75043E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.16773E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41491E0
os_ea2_imon=-5.57264E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00513E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71374E1
cs_ef2a_imon=3.16845E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07309E0
os_ef2alow_imon=-2.57806E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93176E-1
os_ef2bup_imon=-5.38259E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10869E1
os_restr2_imon=3.41102E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.28442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01832E1
cs_anode2_imon=2.2409E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73417E1
iondef1_imon=1.10272E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.08712E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.93135E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.53056E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12725E0
cs_ionaccel_imon=-1.85173E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56121E1
einzel_imon=7.57663E-6
window_vset=0.0E0
window_vmon=1.77141E-1
window_imon=-1.14278E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39046E-4
mask2_vset=0.0E0
mask2_vmon=-1.86153E1
mask2_imon=-7.63976E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92582E3
multa_neg_imon=8.34789E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.21009E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=6.86134E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47643E0
defgridb_imon=5.93047E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.40393E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07312E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61056E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=9.95406E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62285E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61586E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36988E-2
os_fil2_imon=-2.63443E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.70384E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.22625E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.40014E-1
cs_fil2_imon=-2.33904E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.45423E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21846E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.39014E-3
inlet_lpb_pmon=2.16125E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.08642E-1
res40_imon=-2.55026E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.17776E-1	-7.9844E-1	-9.13074E0	-9.14209E0	4.93526E-3	9.35078E-2	2.73093E1	-3.26759E1	-3.26536E1	2.68118E1	2.37437E-9	2.52276E-3	2.52276E-3	6.28592E-3	2.15331E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.17728E-1	-7.98345E-1	-9.13084E0	-9.14156E0	4.98295E-3	9.35316E-2	2.73345E1	-3.26627E1	-3.2645E1	2.68126E1	2.37641E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.15563E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.17585E-1	-7.98488E-1	-9.13076E0	-9.1418E0	4.76837E-3	9.35793E-2	2.73387E1	-3.26644E1	-3.26183E1	2.68065E1	2.37538E-9	2.5225E-3	2.5225E-3	6.32418E-3	2.15803E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.17752E-1	-7.98416E-1	-9.131E0	-9.14192E0	4.81606E-3	9.38416E-2	2.73015E1	-3.26843E1	-3.26428E1	2.67842E1	2.37538E-9	2.52492E-3	2.52492E-3	6.30202E-3	2.18477E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.17609E-1	-7.98345E-1	-9.13084E0	-9.14171E0	4.72069E-3	9.38177E-2	2.73135E1	-3.26548E1	-3.26401E1	2.68051E1	2.37745E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.17066E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0934E0	-8.17609E-1	-7.98178E-1	-9.13072E0	-9.14178E0	4.60148E-3	9.34839E-2	2.73057E1	-3.26602E1	-3.26071E1	2.6819E1	2.37628E-9	2.52117E-3	2.52117E-3	6.31218E-3	2.17188E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-8.17418E-1	-7.98488E-1	-9.13095E0	-9.14152E0	5.17368E-3	9.36985E-2	2.72775E1	-3.26458E1	-3.26398E1	2.6792E1	2.37538E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.16252E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.17537E-1	-7.98488E-1	-9.13112E0	-9.14185E0	4.79221E-3	9.35555E-2	2.73246E1	-3.26632E1	-3.26349E1	2.68157E1	2.37745E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.17822E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.17752E-1	-7.98321E-1	-9.13126E0	-9.14185E0	5.126E-3	9.36508E-2	2.72979E1	-3.26585E1	-3.2605E1	2.68352E1	2.37538E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.16436E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.17752E-1	-7.98655E-1	-9.13117E0	-9.14197E0	4.86374E-3	9.36031E-2	2.73243E1	-3.26699E1	-3.2653E1	2.68034E1	2.37641E-9	2.52318E-3	2.52318E-3	6.36244E-3	2.16878E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.1768E-1	-7.98416E-1	-9.13119E0	-9.14226E0	4.93526E-3	9.34839E-2	2.72967E1	-3.26909E1	-3.26645E1	2.68328E1	2.37538E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.15938E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.17537E-1	-7.98416E-1	-9.13107E0	-9.1419E0	5.05447E-3	9.36508E-2	2.73345E1	-3.27306E1	-3.26837E1	2.67932E1	2.3764E-9	2.51739E-3	2.51739E-3	6.35059E-3	2.16436E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.17347E-1	-7.98273E-1	-9.13081E0	-9.14226E0	5.24521E-3	9.33886E-2	2.73257E1	-3.26378E1	-3.26378E1	2.68262E1	2.37745E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.17066E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.1737E-1	-7.98702E-1	-9.13091E0	-9.14207E0	5.50747E-3	9.30786E-2	2.73225E1	-3.26585E1	-3.26146E1	2.67986E1	2.37538E-9	2.52647E-3	2.52647E-3	6.26916E-3	2.15938E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17251E-1	-7.98178E-1	-9.13126E0	-9.14202E0	5.03063E-3	9.34839E-2	2.73141E1	-3.26699E1	-3.26506E1	2.68448E1	2.37641E-9	2.52318E-3	2.52318E-3	6.36244E-3	2.1575E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.1737E-1	-7.98869E-1	-9.1311E0	-9.14183E0	5.24521E-3	9.34124E-2	2.73195E1	-3.26573E1	-3.2647E1	2.68034E1	2.37641E-9	2.51662E-3	2.51662E-3	6.25827E-3	2.17255E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.1749E-1	-7.98273E-1	-9.13095E0	-9.14178E0	5.05447E-3	9.35078E-2	2.73063E1	-3.26476E1	-3.26134E1	2.67782E1	2.37538E-9	2.52099E-3	2.52099E-3	6.26916E-3	2.16878E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.17442E-1	-7.98416E-1	-9.13095E0	-9.14171E0	5.126E-3	9.3627E-2	2.73287E1	-3.26472E1	-3.26531E1	2.68383E1	2.37641E-9	2.52209E-3	2.52209E-3	6.36797E-3	2.1858E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.17299E-1	-7.9844E-1	-9.13091E0	-9.14183E0	5.07832E-3	9.3317E-2	2.73228E1	-3.26725E1	-3.26248E1	2.6816E1	2.3764E-9	2.51632E-3	2.51632E-3	6.41047E-3	2.16621E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.17251E-1	-7.98035E-1	-9.13079E0	-9.14192E0	5.53131E-3	9.33409E-2	2.73417E1	-3.26691E1	-3.25812E1	2.68142E1	2.37538E-9	2.52318E-3	2.52318E-3	6.39014E-3	2.16125E-2