[Scan]
initial_time=2015-12-18T19:38:03
final_time=2015-12-18T19:38:23
ip_count=19
run=1020
dataset=0
scan=64
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=1.38274E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=1.98169E-9
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=1.10222E-9
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-1.27971E-10
mult1=-1.03623E-8
mult2=-2.65662E-9
rf_tmon=-5.22326E-3
rf_agc=3.27487E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.65557E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.62427E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.97622E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=2.83458E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.01995E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04946E1
cs_ea1_imon=2.59591E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36895E0
lens1_imon=2.52694E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.95927E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03913E1
cs_ea2_imon=1.53317E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84046E1
cs_ef1a_imon=2.92504E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=1.25325E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.33347E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.38466E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63401E1
os_ef1bup_imon=3.04577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=1.19178E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93254E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.93224E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20642E0
olens4_imon=3.23086E-8
tplens_vset=1.4E-1
tplens_vmon=1.58856E0
tplens_imon=-3.85865E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26461E1
iondef3_imon=1.48415E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2695E1
iondef2_imon=1.58148E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98447E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.05039E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=1.75776E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75096E1
cs_ef2b_imon=3.11821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38128E0
os_ea2_imon=-8.29274E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70891E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06777E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55378E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10685E1
os_restr2_imon=3.40545E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01353E1
cs_anode2_imon=2.26227E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.07859E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68227E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.06109E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.51206E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.46884E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.91849E-6
window_vset=0.0E0
window_vmon=1.53072E-1
window_imon=-1.29324E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82591E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.56306E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.5032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.11965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.42336E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05155E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61193E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.95356E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61777E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6167E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.85818E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.22042E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38327E-1
cs_fil2_imon=-3.09844E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21719E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.15563E-2
chamber_ion_pmon=2.37538E-9
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.62005E-1
res40_imon=-2.68077E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.1718E-1	-7.9844E-1	-9.13091E0	-9.14211E0	5.126E-3	9.36031E-2	2.73147E1	-3.26867E1	-3.26699E1	2.6816E1	2.37745E-9	2.51443E-3	2.51443E-3	6.37905E-3	2.16689E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.17394E-1	-7.98106E-1	-9.13086E0	-9.14216E0	5.26905E-3	9.35793E-2	2.73335E1	-3.2658E1	-3.2635E1	2.68067E1	2.37437E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.16252E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.17466E-1	-7.98249E-1	-9.13074E0	-9.14187E0	5.17368E-3	9.36985E-2	2.73057E1	-3.26738E1	-3.25936E1	2.68268E1	2.37625E-9	2.52236E-3	2.52236E-3	6.32129E-3	2.18011E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.17275E-1	-7.98249E-1	-9.13117E0	-9.14164E0	5.17368E-3	9.36508E-2	2.73261E1	-3.26849E1	-3.26344E1	2.682E1	2.37737E-9	2.51919E-3	2.51919E-3	6.33919E-3	2.15831E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.1706E-1	-7.98178E-1	-9.13084E0	-9.14185E0	4.93526E-3	9.34839E-2	2.72992E1	-3.26543E1	-3.26254E1	2.67887E1	2.37538E-9	2.5199E-3	2.5199E-3	6.26916E-3	2.16689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.17394E-1	-7.98583E-1	-9.13103E0	-9.14192E0	5.19753E-3	9.36508E-2	2.73021E1	-3.26536E1	-3.26074E1	2.6822E1	2.37745E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.16313E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.17466E-1	-7.98559E-1	-9.13124E0	-9.14197E0	5.05447E-3	9.37462E-2	2.73316E1	-3.26697E1	-3.26408E1	2.68142E1	2.37538E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.16436E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.17347E-1	-7.98368E-1	-9.13119E0	-9.14176E0	5.14984E-3	9.3627E-2	2.73099E1	-3.26633E1	-3.26062E1	2.67872E1	2.37538E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.17066E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.17561E-1	-7.98368E-1	-9.13131E0	-9.14176E0	5.10216E-3	9.33647E-2	2.72962E1	-3.26484E1	-3.26018E1	2.68204E1	2.37951E-9	2.5188E-3	2.5188E-3	6.36797E-3	2.17066E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.17251E-1	-7.98345E-1	-9.13103E0	-9.14171E0	5.22137E-3	9.36747E-2	2.73111E1	-3.26789E1	-3.26092E1	2.68142E1	2.37538E-9	2.52169E-3	2.52169E-3	6.2645E-3	2.18477E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.17442E-1	-7.98297E-1	-9.13105E0	-9.1418E0	5.31673E-3	9.38177E-2	2.73484E1	-3.26627E1	-3.26464E1	2.68244E1	2.37538E-9	2.51771E-3	2.51771E-3	6.37351E-3	2.17444E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.17442E-1	-7.98392E-1	-9.13081E0	-9.14211E0	5.34058E-3	9.36508E-2	2.73093E1	-3.26134E1	-3.25876E1	2.68082E1	2.37641E-9	2.52647E-3	2.52647E-3	6.27461E-3	2.17444E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.17323E-1	-7.98178E-1	-9.13117E0	-9.14214E0	5.57899E-3	9.37939E-2	2.72871E1	-3.2644E1	-3.2626E1	2.68148E1	2.37641E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.17255E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17394E-1	-7.98559E-1	-9.13103E0	-9.14214E0	5.34058E-3	9.36031E-2	2.73464E1	-3.26549E1	-3.26419E1	2.68118E1	2.37538E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.18104E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.17347E-1	-7.98488E-1	-9.13124E0	-9.14197E0	5.126E-3	9.3627E-2	2.72886E1	-3.26738E1	-3.26531E1	2.68166E1	2.37641E-9	2.52428E-3	2.52428E-3	6.27461E-3	2.17066E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.1737E-1	-7.98488E-1	-9.13115E0	-9.14192E0	5.43594E-3	9.33886E-2	2.73327E1	-3.26621E1	-3.26368E1	2.68065E1	2.37641E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.16501E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.17156E-1	-7.98416E-1	-9.13141E0	-9.14192E0	5.60284E-3	9.35316E-2	2.72913E1	-3.26927E1	-3.26128E1	2.68094E1	2.37538E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.17176E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.1718E-1	-7.98655E-1	-9.13124E0	-9.14209E0	5.81741E-3	9.36508E-2	2.73299E1	-3.26502E1	-3.26183E1	2.68334E1	2.37538E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.17255E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16965E-1	-7.98464E-1	-9.13074E0	-9.14192E0	5.43594E-3	9.33886E-2	2.73243E1	-3.27089E1	-3.26182E1	2.68094E1	2.37538E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.16621E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16727E-1	-7.98726E-1	-9.13117E0	-9.14173E0	5.14984E-3	9.32932E-2	2.73039E1	-3.2695E1	-3.26461E1	2.68227E1	2.37538E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.15563E-2